
Murata Electronics Oy 2/3 2/3
www.muratamems.fi Doc. Nr. 82 1040 00 C RevC
Performance Characteristics 1)
Total Sensitivity error *
Cross-Axis sensitivity ** 8)
Start up time (in WB mode)
* 100% tested in production
** Qualified during product validation
1) Typical values are not guaranteed.
2) Includes the current through the internal 400 k pull-up resistor connected to digital I/O Vdd.
3) Range defined as
. The measuring range is tested on sensing element level. FS = 2g.
4) Includes effects over supply voltage, temperature and life time
6) Sensitivity = {Count(+1g) - Count(-1g)}/2 [Count/g].
7) From straight line through sensitivity calibration (+1g, -1g) points.
8) The cross-axis sensitivity determines how much acceleration, perpendicular to the measuring axis,
couples to the output. The total cross-axis sensitivity is the geometric sum of the sensitivities of
the two axes which are perpendicular to the measuring axis. The angular alignment error
between X, Y and Z axis is included into the cross axis sensitivity.
9) Frequency responses according to Figure 4.
10) Average noise/axis over the measurement bandwidth defined as
, where nx, ny and nz are
the measured signal's standard deviation due to noise in x, y and z directions.
11) Settling error less than 1% of FS.