28
D6F-PH
MEMS Differential pressure Sensor
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of ±3% RD
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of bypass configuration
Ordering Information
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. At standard atmospheric pressure (1013.25 hPa)
Output Characteristics
D6F-PH0025AD1
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 250
Dp = Differential pressure, Op = Output
D6F-PH0505AD3
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 100 - 50
Dp = Differential pressure, Op = Output
D6F-PH5050AD3
Measurement conditions: Power supply voltage of 3.3 ±0.1 VDC, ambient tem-
perature of 25±5°C, and ambient humidity of 35% to 75%.
Differential pressure conversion formula: Dp = (Op - 1024) / 60000 × 1000 - 500
Dp = Differential pressure, Op = Output
Note. Change of gas density affects the sensor output.
Change of atmospheric pressure is compensated by the following formula.
Dpeff = Dp × (Pstd / Pamb)
Dpeff: Effective differential pressure
Dp: Differential pressure of the sensor output
Pstd: Standard atmospheric pressure (1013.25 hPa)
Pamb: Actual ambient atmospheric pressure (hPa)
RoHS Compliant
Refer to the Common Precautions for the D6F Series on page 40.
Applicable fluid (See note 1.) Measurement range (See note 3.) Model
Air (See note 2.)
0 to 250 Pa (0 to 1 in. H2O) D6F-PH0025AD1
-50 to +50 Pa (±0.2 in. H2O) D6F-PH0505AD3
-500 to +500 Pa (±2 in. H2O) D6F-PH5050AD3
Differential
pressure (Pa) 050 100 150 200 250
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Differential pressure (Pa)
70000
60000
50000
40000
30000
20000
10000
0
Output (count)
50 100 150 200 2500
Differential
pressure (Pa) -50 -30 -10 010 30 50
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
31024
(7930)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Differential pressure (Pa)
70000
60000
50000
40000
30000
20000
10000
0
Output (count)
-30 -10 10 30 50-50
Differential
pressure (Pa) -500 -300 -100 0100 300 500
Output
(HEX)
1024
(0400)
13024
(32E0)
25024
(61C0)
31024
(7930)
37024
(90A0)
49024
(BF80)
61024
(EE60)
Differential pressure (Pa)
70000
60000
50000
40000
30000
20000
10000
0
Output (count)
-300 -100 100 300 500-500
29
D6F-PH MEMS Differential pressure Sensor
Characteristics/Performance
Note: 1. At standard atmospheric pressure (1013.25 hPa)
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure.
Typical characteristic of air flow by differential pressure is below.
Note: 4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
Note: 5. With no condensation or icing.
Note: 6. Please call us about functions, such as fault detection, temperature check, Vdd check, threshold value setup.
Relation between pressure and flow rate
Model D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3
Differential pressure range (See note 1) 0 to 250 Pa ±50 Pa ±500 Pa
Calibration Gas (See note 2.) Air
Port Type Bamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Power Supply 2.3 to 3.6 VDC
Current Consumption 6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C
Resolution 12 bit
Zero point tolerance (See note 4.) ±0.2 Pa
Span tolerance (See note 4.) ±3% RD
Span shift due to temperature variation < 0.5% RD per 10°C
Response time 33 ms typical at 12 bit resolution (50 ms max.)
The processing time is 6 ms typical at 12 bit resolution.
Gas flow through sensor (See note 3.) 63 mL/min 23 mL/min 100 mL/min
Interface I2C
Case material PPS
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 10 kPa
Operating temperature (See note 5.) -20 to +80°C
Operating humidity (See note 5.) 35 to 85 %RH
Storage temperature (See note 5.) -40 to +80°C
Storage humidity (See note 5.) 35 to 85 %RH
Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 5.2 g
Differential pressure (Pa)
60
40
20
0
-20
-40
-60
Flow rate (mL/min)
-300 -100 100 300 500-500
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D6F-PH MEMS Differential pressure Sensor
Connections/Dimensions (Unit: mm)
Electrical connection
Communication
Serial Interface I2C
Master/Slave Slave / Address: HEX : 0x6C
BIN : 110_1100 (7bit)
Speed mode Fast Mode 400kHz
Signal
SCL Serial Clock
SDA Data Signal
Four, through hole 0.8 dia.
Three, 2
Two, 4 dia.
Two, R2
Two, through hole 2 dia.
Two, through hole 2.2 dia
Two, through hole 2 dia
Recommendation size for pin header installation
(tolerrances: ±0.1)
Pin Header
1.2
3.1
2:GND
4:SCL
1:SDA
3:VCC
26 20 10
7.2
12 10.5
6.5
5
4
10
16.5
22
18
7.05
Four, 0.48 dia.
3.7
Two, 4.9 dia
Two, 4 dia.
3.37
16.5
Three, 2
5.25
Low pressure side
High pressure side
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
Mounting Direction
Install the Sensor so
that the joints are
facing upward.
Sensor
(slave) Master
SCL
pull-up resister 2.2 kΩ
pull-up resister 2.2 kΩ
Vcc 3.3 V
Vcc
Vcc
GND
SDA
