MEMS Mass Flow Sensor D6F-P 7
MEMS Mass Flow Sensor
D6F-P
A Compact, High-performance Flow
Sensor with Dust Segregation Structure.
• Built in Dust Segregation System (DSS) with cyclone flow
structure, diverts particulates from sensor element.
• High resolution and repeatability, even at low flow rates.
• Barbed ports with connector or PCB terminals, or manifold
mount with connector versions.
• Built in voltage regulator, temperature compensation and
amplified output. Measure up to 200 LPM with a bypass setup.
• Alternative to differential pressure sensing.
• RoHS Compliant
Ordering Information
Note: 1. Can be calibrated for different gas types. Consult your Omron representative.
2. Dry gas must not contain large particles, eg dust, oil, mist.
3. Cable Assembly “D6F-CABLE2”, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately.
Specifications
■Characteristics
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere.
2. Dry gas. (must not contain large particles, dust, oil, mist)
Description Case Calibration Gas
(See note 1.)
Flow Range Mounting
Method
Connection Model
Flow Sensor PBT Air (See note 2.) 0-0.1 LPM Flange mount PCB terminals D6F-P0001A1
0-1 LPM D6F-P0010A1
Connector D6F-P0010A2
Manifold mount Connector D6F-P0010AM2
Cable Connector Assembly - - - - - - - - - - - - - - - D6F-CABLE2
Models D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2
Flow Range (See note 1.) 0 to 0.1 L/min. 0 to 1 L/min.
Calibration Gas (See note 2.) Air
Flow Port Type barbed fitting maximum outside dia. 4.9 mm manifold mount
Electrical Connection Lead terminal Connector (3 wire)
Power Supply 4.75 to 9.45 VDC
Current Consumption Max. 15 mA (no load, Vcc = 5 VDC)
Operating Output Voltage 0.5 to 2.5 VDC
Output Voltage Limits (Min and Max.) 0 VDC min. and 3.1 VDC max. (Lead resistance 10 kΩ)
Accuracy and Temperature Characteristics
±
5% F.S. max. of detected characteristics at 25
°
C, within -10 to 60
°
C (typical test results within
±
2% F.S.)
Repeatability (Reference (typical)) ± 1.0% F.S. ± 0.4% F.S.
Case Material PBT
Degree of Protection IP40
Withstand Pressure 50 kPa (7 psi)
Pressure Drop (Reference (typical)) 0.19 kPa 0.48 kPa
Operating Temperature -10 to 60°C (1 LPM versions) and -33 to 75°C (0.1 LPM version) with no icing or condensation
(Storage: -40 to 80°C with no icing or condensation)
Operating Humidity 35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation)
Insulation Resistance 20 MΩ (500 VDC between lead terminal and the case)
Dielectric Strength
500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case.
Weight 8.5 g 8.0 g
Response Time (Reference (typical)) 150 msec
8MEMS Mass Flow Sensor D6F-P
■Absolute Maximum Rating
■Output Voltage Characteristics
D6F-P0001A@D6F-P0010A@
D6F-P0001A@
D6F-P0010A@
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere.
2. 0 to 0.5 VDC output indicates a negative flow direction.
3. Measurement condition: Power supply voltage 5 ± 0.1VDC, ambient temperature 25 ± 5 °C and ambient humidity 25 to 75% RH.
■Repeatability. (Typical test results)
(5 Samples, D6F-P0010A@, repeated 10 times each)
Item Symbol Rating Unit
Power supply voltage Vcc 10 VDC
Output voltage Vout 4.0 VDC
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0.02
Flow Rate (L/min)
Output Voltage (V)
0.04 0.06 0.08 0.100
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0.25
Flow Rate (L/min)
Output Voltage (V)
0.5 0.75 10
Flow Rate (LPM) 0.00 0.02 0.04 0.06 0.08 0.10
Output Voltage (VDC) 0.50 ± 0.10 0.90 ± 0.10 1.30 ± 0.10 1.70 ± 0.10 2.10 ± 0.10 2.50 ± 0.10
Flow Rate (LPM) 0.00 0.25 0.50 0.75 1.00
Output Voltage (VDC) 0.50 ± 0.10 1.60 ± 0.10 2.10 ± 0.10 2.31 ± 0.10 2.50 ± 0.10
-1.0
-0.8
-0.6
-0.4
-0.2
0.0
0.2
0.4
0.6
0.8
1.0
0.0 0.3 0.5 0.81.0
Flow Rate(lpm)
Repeatability (%F.S.)
MEMS Mass Flow Sensor D6F-P 9
Dimensions
Note: All units are in millimeters unless otherwise indicated.
5.08
2.54
Two 3-dia.
through holes 13.5
Three lands,
Dia.: 1.3
Three through holes
Dia.: 0.8
4.76
9.8
2.6 dia.
23.3 11.7
Two, 4.9 dia.
1.2
7.3
13.5
4.76
2.8 dia.Two, R1.4
1.5
6
10
17.2
Two, 1.1 dia.
Label
A
2.54
5.08
Detailed View of A Recommended Dimensions
for Connector Mounting Holes
XG8V-0344
Connector
Made by OMRON
Vout
Vcc
GND
Label: Gives model and lot numbers.
27.2
1.7
616.2
14 7.6±0.2
13.2 7.2
7.2
D6F
MADE IN JAPAN
PCB terminals with Flange Mount
D6F-P0001A1 / D6F-P0010A1
2.6 dia.
23.3 11.7 Two, 4.9 dia.
1.2
7.3
13.5
2.8 dia.
Two, R: 1.4 1.5
10
17.2
8.5
A
Two, 1.1 dia.
Label
Detailed View of A
3.Vcc
2.Vout
1.GND
Label: Gives model
and lot numbers.
8.5
27.2
1.7
6
14
16.2
7.6±0.2
D6F
MADE IN JAPAN
13.2
0.3±0.1
1. GND
Label
2-C0.3
2. Vout
3. Vcc
Detailed View of A
Antirotain groove
Detailed View of B
Connector
3.5 dia.
27.2
22
14±0.05
2.7±0.1
0.3±0.1
6.7±0.1 *1
18
22
8
2
6.4 9.6
Two, 4 dia.
0
-0.05
1+0.1
0
A
B
D6F
MADE IN JAPAN
Connector with Flange Mount
D6F-P0010A2
Connector with Manifold Mount
D6F-P0010AM2
Note: 1. Use M3 or M2.6 pan screw or tapping screw
with an equal diameter for installation. And
bind tight with 0.59N·m or less torque.
2. Use an attached connector. Manufactured
by JST Mfg Co., Ltd. (Japan) for A2 and
AM2 types.
• Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30
• Crimp type connector
Contact: SSH-003T-P0.2|
Wire: AWG#32 to #28
• Housing: SHR-03V-S
3. O-rings are not attached. 4mm ID tube
recommended for D6F-P0010A1 and
D6F-P0010A2 types.
Applicable Cable for D6F-P0010A@2 (Optional - sold separately)
part number: D6F-CABLE2
10 MEMS Mass Flow Sensor D6F-P
Packaging
Application Information and Examples
■Bidirectional Dust Segregation System
The D6F-P series has a patented dust segregation design. The flow path incorporates dual centrifugal chambers, in which particulate matter follows
in the outer path, away from the MEMS sensor chip regardless of the flow direction. Note, standard products are calibrated for unidirectional flow,
as indicated in note 3 of the “Output Characteristics” table, above. Contact Omron for bidirectional calibration options.
Bypass Setup
When used in a bypass set-up, as illustrated below, the D6F-P mass
flow sensors can measure flow rates far beyond the 1 LPM in-line rat-
ing. The pressure differential required to pull airflow through the sen-
sor can be accomplished by installing a flow restrictor between the
two ports or through the use of a flow cross in large ducts, as shown
in the HVAC application.
HVAC Application
The D6F-P mass flow sensor is ideal for damper control in variable
air volume systems, where low flow rates are difficult to measure with
differential pressure sensors.
Note:
Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information”
for correct use.
218
240
95
3
Display seal
1
2
TYPE D6F-P
No. Item Material
1 Sock liner CCNB
2 Tray (25pcs) Polyethylene
3 Box (100 pcs) CCNB
sensing element
MEMS Mass Flow Sensor D6F-P
MEMO
MEMS Mass Flow Sensor D6F-P
OMRON ON-LINE
Global - http://www.omron.com
USA - http://www.components.omron.com
Cat. No. X305-E-1 Printed in USA
OMRON ELECTRONIC
COMPONENTS LLC
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
10/10 Specifications subject to change without notice
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.