MEMS Mass Flow Sensor - D6F-10A5/A6/20A5/A6/50A5/A6 Text Compact, intelligent sensors featuring MEMS technology for precision mass airflow measurement QPrecision unidirectional mass airflow up to 50 LPM QStable output across full scale A5 TYPE A6 TYPE QHorizontal mounting feature with *NBR `O' ring (A5 Type), Rc 1/4 screw (A6 Type) QCompact size 78 (L) x 30 (W) x 30 (H) mm QLow power consumption Application Examples * * * * Industrial processes Oxygen concentrators / conservators Leak detection Spectroscopy * * * * Mass flow controllers Scientific / test equipment Environmental comfort controls Fuel cell controls Ordering Information Model** Case Applicable Gas Flow Range D6F-10A5-000 D6F-10A6-000 PPS / Aluminium Alloy Air* 0 - 10 LPM D6F-20A5-000 D6F-20A6-000 PPS / Aluminium Alloy Air* 0 - 20 LPM D6F-50A5-000 D6F-50A6-000 PPS / Aluminium Alloy Air* 0 - 50 LPM D6F-CABLE1 *Dry gas must not contain large particles, eg. dust, oil, mist. **NBR `O' Ring = A5 type, Rc 1/4 screw = A6 type J Ratings Absolute maximum rating Symbol Ratings Unit VCC 26.4 VDC Output Voltage VOUT 6 VDC J Electrical Performance Recommended operation condition and DC characteristic Item Term Condition Min. 10.8 Typ. - Max. 26.4 Unit Power Supply VCC - VDC Operating Temperature TOPR - -10 - 60 C Output Voltage (Max.) VOH Load resistance 10k - - 5.7 VDC Output Voltage (Min.) VOL Load resistance 10k 0 - - VDC 1014 Flow - Intelligent Sensors Item Power Supply MEMS Mass Flow Sensor - D6F-10A5/A6/20A5/A6/50A5/A6 Text J Basic Performance 0 to 10, 0 to 20 and 0 to 50L/min (Normal) volumetric flow rate at 0C, 101.3kPa. Measurement condition: Power-supply voltage 12 0.1VDC, ambient temperature 255C and ambient humidity 25 to 75% RH. D6F-10A5-000 D6F-10A6-000 Flow Rate (LPM) 0 2 4 6 8 10 Output Voltage (VDC) 1.00 0.12 1.75 0.12 2.60 0.12 3.45 0.12 4.25 0.12 5.00 0.12 D6F-20A5-000 D6F-20A6-000 Flow Rate (LPM) 0 4 8 12 16 20 Output Voltage (VDC) 1.00 0.12 1.93 0.12 2.87 0.12 3.70 0.12 4.41 0.12 5.00 0.12 D6F-50A5-000 D6F-50A6-000 Flow Rate (LPM) 0 10 20 30 40 50 Output Voltage (VDC) 1.00 0.12 2.45 0.12 3.51 0.12 4.20 0.12 4.66 0.12 5.00 0.12 J Characteristics Degree of Protection IP40 Joint Type Manifold Mount with 'O' Ring (A5 Type), Rc 1/4 (A6 Type) Applicable Gas Air Electrical Connection Connector (3 wire) - see Dimensions (note 1) for details Accuracy 3% F.S. max of detected characteristics at 25C Repeatability* 0.3% F.S. (for 10/20 type) 0.7% F.S. (for 50 Type) Withstand Pressure 500 kPa Pressure Drop* 0.8 kPa (for 10A5), 2.9 kPa (for 20A5), 17.2 kPa (for 50A5), 0.3kPa (for 10A6), 1.2kPa (for 20A6), 7.2 kPa (for 50A6) Temperature Characteristics 3% F.S. max. of detected characteristics at 25C (within -10 to 60C) Operating Temperature -10 to +60C (with no icing or condensation) Operating Humidity 85%RH max. (with no icing or condensation) Storage Temperature -30 to +80C (with no icing or condensation) Storage Humidity 85%RH max. (with no icing or condensation) Current Consumption Max 15mA (no load, VCC = 12 to 24VDC, VSS = GND = 0V, 25C) Insulation Resistance 20M (500VDC between lead terminals and case) Dielectric Strength 500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals and case Weight 102.56g * Typical value - for reference only 1015 MEMS Mass Flow Sensor - D6F-10A5/A6/20A5/A6/50A5/A6 Text J Installation Tighten screw with 0.59Nm or less torque. Use M3 pan head screw. Please seal to INLET and OUTLET with the `O' ring etc. Please install the product as shown below. Recommended `O' ring for sealing inlet and outlet orifice Material: NBR70 (recommended) Example part number: JASO part number: CO 0003 A5 TYPE ONLY J Precautions Flow - Intelligent Sensors 1. Avoid use in excessively dirty, wet environments 2. Do not use in the presence of flammable gases (e.g. hydrogen, methane, ethane and liquefied petroleum gas. In addition, do not use with corrosive gases (eg chlorine, sulphur, acids, alkalis etc). 3. Install in the direction of the arrow indicated. 4. For best results (optimum accuracy), mount horizontally. 5. Use suitable M3 screws for mounting. Do not exceed a fixing torque of 0.59 Nm. 6. Do not modify D6F- in any way. 7. Do not place any object in or close to the inlet and outlet orifices. 8. Do not use the sensor in any of the following environments: - a location that receives radiant heat from the sun or apparatus - a place where intense light may radiate down - where fast changing temperatures occur - locations prone to freezing, high humidity, condensation - places where large magnitudes of vibration or shock could occur 9. Noise countermeasures: VERY IMPORTANT: Take suitable precautions to minimise the effects and potential for induced electrical noise. Install away from apparatus that generates strong high frequencies, surges and spikes. Take particular care to install away from AC power transformers, live mains power lines and high power magnetic circuits. Attach a surge suppressor and a noise filter to the peripheral equipment. 10. Ensure good grounding is achieved by grounding the GND terminal to the peripheral equipments main ground frame connection and its associated regulated power supply. 11. Do not make a direct solder connection to the integral terminals. It is recommended you use the optional cable `D6F-CABLE1' for attachment and to ensure correct connection. 12. D6F is a precision component. Keep in original packaging and remove only when ready for installation. Damage may occur if subjected to excessive force (e.g. dropped or kicked). Any item suspected to be damaged should be discarded. 13. Immediately following installation, a qualified person should perform checks to ensure safe, satisfactory operation. 1016 MEMS Mass Flow Sensor - D6F-10A5/A6/20A5/A6/50A5/A6 Text J Dimensions All dimensions are shown in millimetres. 2-14 0.1 D6F-10A5-000 D6F-20A5-000 D6F-50A5-000 4-3.2 through hole NOTE 2 Installation hole recomdended size. 3.7 Use an attached connector Housing: MOLEX-51021 Terminal: MOLEX-50079 Wire: AWG26, 28 Citcuit number: Refer to enlargement A. 78 0.5 NOTE1 66 0.1 Outlet A 3. GND Lot. No. Label 14 0.05 30 0.5 Use an attached connector Housing: MOLEX-51021 Terminal: MOLEX-50079 Wire: AWG26, 28 Citcuit number: Refer to enlargement A NOTE 3 The connection must use taper pipe thread R1/4 Moreover, please give the tightning torque as 5N.m or less 1. VCC 2. VOUT 3.4 NOTE 2 A 5.7 80.4 Bind tight with 0.59N.m or less torque Use M3 pan head screw 78 0.5 NOTE 1 3. GND Lot. No. Label 2.40 Depth 4.5 2 - Rc1/4 2-P c 1.4 Taper Pipe Thread 30 0.5 A (2:1) 66 0.1 12 0.2 D6F-10A6-000 D6F-20A6-000 D6F-50A6-000 Tap er P ics Thread 30 0.5 J D6F-CABLE1 (Optional) 2003.5 Black Brown 1001.5 1. VCC 2. VOUT Blue 1017 3. GND 6 4-M3 Screw Hole 2-5 30 0.5 A (2:1) Inlet 6 2. VOUT 66 0.05 1. VCC 30 .05 6 MEMS Mass Flow Sensor - D6F-10A5/A6/20A5/A6/50A5/A6 Text J Packaging No. Name Material 1 D6F - 2 Polyethylene bag Polyethylene 3 Box Coated board paper 4 Label (Bar code) - J Change in specifications Product specifications and accessories may be changed at any time based on improvements and other reasons. Consult with your Omron representative at any time to confirm actual specifications of puchased product. J Warranty Omron corporation manufactures products to the highest standards and warrants that all products it manufactures are free of defects and faulty workmanship. Please contact your local Omron representative for warranty information. We provide application assistance personally and through our literature including our website for guidance only. It is the customers full responsibility to determine suitability of product in any intended application. Flow - Intelligent Sensors ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. CAT NO. G903-E2-02 1018