Features Applications
IMAGE SENSOR
CCD area image sensor
Improved etaloning (interference), high near IR sensitivity
S9060/S9061 series
PRELIMINARY DATA
Aug. 2002
S9060/S9061 series is a family of high sensitivity, back-thinned area image sensors with improved etaloning (interference) in the near IR region.
This makes S9060/S9061 series ideal for high precision measurement in the near IR region.
S9060/S9061 series image sensors have a pixel size of 24 × 24 µm and are available in pixel formats of 512 × 256 (type No. suffix: -0908) and
1024 × 256 pixels (type No. suffix: -1008).
S9061 series has a one-stage thermoelectric cooler in the same package that cools the image sensor down to -10 ˚C when used at room
temperatures. In addition, since both the CCD chip and the TE-cooler are sealed, no dry air is required, thus allowing easy handling.
S9060/S9061 series has the same dimensions as S7030/S7031 series and they are pin compatible.
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Improved etaloning (interference) type
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High near IR sensitivity
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Non-cooled type: S9060 series
One-stage TE cooled type: S9061 series
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Pixel size: 24 × 24 µm
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Line/pixel binning operation
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High quantum efficiency: 90 % or more at peak
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Wide spectral response range
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Low noise readout
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Wide dynamic range
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Low dark current by MPP operation
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High UV sensitivity and good stability under UV exposure
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Fluorescence spectroscopy, ICP
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Raman spectroscopy
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Industrial inspection
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Semiconductor inspection
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DNA sequencer
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Low-light-level detection
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Scientific measurement
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UV imaging
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Bio-photon observation
1
0
10
100 200
WAVELENGTH (nm)
TRANSMITTANCE (%)
300 400 500 600 700 800 900
1000 1100 1200
20
30
40
50
60
70
80
90
100 (Typ. Ta=25 ˚C)
AR COATED SAPPHIRE
QUARTZ
■ Spectral response (without window)
QUANTUM EFFICIENCY (%)
WAVELENGTH (nm)
(Typ. Ta=25 ˚C)
0
200 400 600 800 1000 1200
10
20
30
40
50
60
70
80
90
100
FRONT-ILLUMINATED TYPE
FRONT-ILLUMINATED
TYPE (UV COAT)
CONVENTIONAL
TYPE
S9060/S9061
SERIES
KMPDB0221EA KMPDB0110EA
0
920 930
WAVELENGTH (nm)
PHOTOCURRENT (RELATIVE VALUE)
940 950 960 970 980
20
40
60
100
80
(Ta=25 ˚C)
S9060/S9061 SERIES
CONVENTIONAL TYPE
■ Etaloning characteristic
KMPDB0223EA
■ Window transmittance vs. wavelength
■ Selection guide
Type No. Cooling *1Number of
total pixels
Number of
active pixels
Active area
[mm (H) × mm (V)]
S9060-0908 532 × 256 512 × 250 12.288 × 6.000
S9060-1008 Non-cooled 1044 × 256 1024 × 250 24.576 × 6.000
S9061-0908 532 × 256 512 × 250 12.288 × 6.000
S9061-1008 One-stage TE-cooled 1044 × 256 1024 × 250 24.576 × 6.000
*1: Custom devices with a two-stage thermoelectric cooler are available on request.
■ General rating
Parameter Specification
Vertical clock 2 phases
Horizontal clock 2 phases
Output circuit One-stage MOSFET source follower
Package 24 pin ceramic DIP
Window material Quartz glass *2
*2: Custom devices without window faceplate or with an AR (anti-reflection) coated sapphire window are available on request.
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Hamamatsu City, 435-8558 Japan, Telephone: (81) 053-434-3311, Fax: (81) 053-434-5184, http://www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Information furnished by HAMAMATSU is believed to be reliable. Howe ver, no responsibility is assumed for possible inaccuracies or omissions.
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2004 Hamamatsu Photonics K.K.
Cat. No. KMPD1069E01
Jan. 2004 DN
CCD area image sensor S9060/S9061 series
2
■ Dimensional outlines (unit: mm)
KMPDA0160EA
KMPDA0161EA KMPDA0162EA
KMPDA0159EA
WINDOW 28.6
22.9
22.4
ACTIVE AREA 24.58
6.0
8.2
44.0 2.54
3.0
PHOTOSENSITIVE SURFACE
4.4
2.4
4.8
3.8
INDEX MARK
PIN No. 1
(24 ×) 0.5
(24 ×) 0.5
7.3
1.0
3.0
6.7
4.8
PHOTOSENSITIVE SURFACE
7.7
INDEX MARK
PIN No. 1
6.0
4.0
19.0
22.4
22.9
44.0
52.0
60.0
2.54
WINDOW 28.6
ACTIVE AREA 24.58
8.2
TE-COOLER
WINDOW 16.3
8.2
34.0 2.54
22.9
22.4
6.0
ACTIVE AREA
12.29
4.4
4.8
2.4
3.8
PHOTOSENSITIVE SURFACE
INDEX MARK
PIN No. 1
3.0
(24 ×) 0.5
WINDOW 16.3
8.2
34.0
50.0
2.54
22.9
19.0
4.0
42.0
22.4
6.0
7.3
1.0
7.7
6.7
4.8
ACTIVE AREA
12.29
PHOTOSENSITIVE SURFACE
INDEX MARK
PIN No. 1
3.0
TE-COOLER
(24 ×) 0.5
■ Electrical and optical characteristics (Ta=25 °C, unless otherwise noted)
Parameter Symbol Min. Typ. Max. Unit
Saturation output voltage Vsat - Fw × Sv - V
Vertical 150,000 300,000 -
Full well capacity *3
Horizontal Fw 300,000 600,000 -e-
CCD node sensitivity *4Sv 1.8 2.2 - µV/e-
25 °C - 4,000 12,000
Dark current *5
MPP mode (tentative data) 0 °CDS -200 600 e-/pixel/s
Readout noise *6Nr - 8 16 e- rms
Line binning 18,750 75,000 - -
Dynamic range *7
Area scanning DR 9,375 37,500 - -
Photo response non-uniformity *8PRNU - ±3 ±10 %
Spectral response range λ-200 to 1100 -nm
*3: Large horizontal full well for line binning operation.
*4: VOD=20 V, load resistance=22 kΩ
*5: Dark current nearly doubles for every 5 to 7 °C increase in temperature.
*6: -40 °C, operating frequency is 80 kHz
*7: Dynamic range (DR) = Full well/Readout noise
*8: Condition: half of the saturation output voltage.
S9061-0908 S9061-1008
S9060-1008S9060-0908
Fixed pattern noise (peak to peak)
Signal × 100
Photo response non-uniformity (PRNU) [%] =
