Baratron(R) Vacuum Pressure Switches Type 141 Unheated Type 142 High Temperature (100C) Features and Benefits Ideal for protection of expensive equipment or processes: high vacuum pumps, mass spectrometers, lasers, plasma systems Fully adjustable set point: from 0.2% to 100% of Full Scale High accuracy set point: 0.5% of Full Scale Corrosion resistant: all-metal, all-welded construction exposes only Inconel(R) and stainless steel to gases Dimensional Drawing Double pole, two Form C relay contacts Fast response switching: 20 msec 3.00 DIA. (76.2 mm) "X" SEE TABLE 1 1.13 (28.70 mm) WITHOUT FITTING* 1A @ 30VDC 1A @ 120VAC RELAY CONTACT RATING: TYPE 141 2.84 (72.14 mm) TYPE 142 3.94 (100.08 mm) Provide inexpensive process control for opening/closing slow pump and isolation valves, and for turning on/off various types of pumps Description SWAGELOK 8VCR COUPLING 0.50 DIA. (12.7 mm) KF 16 FITTING 1.00 (25.4 mm) 1.18 (30.0 mm) DIA. REF. TABLE 1 RANGE DIM. "X" TYPE 141 DIM. "X" TYPE 142 1mm, 2mm 1.82 (46.23) 1.38 (35.05) 10, 100, 1Kmm 2.02 (51.31) 1.58 (40.06) ABOVE SET POINT COM PWR 60mA VACUUM SWITCH TYPE 141 SET POINT ADJUST 0.10 (2.50 mm) ABOVE SET POINT +24V NO COM NC NO COM NC PWR 1.2A MAX VACUUM SWITCH TYPE 141 SET POINT ADJUST COM +24V NO COM NC NO COM NC Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). The MKS Types 141 and 142 Vacuum/Pressure Switches offer fast, accurate, and reliable protection for vacuum equipment and processes. Designed for applications where a DC signal output is not required, the Types 141 and 142 provide relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron(R) capacitance manometer principle of operation, the Types 141/142 sense the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual "above set point" indication, and facilitates adjustment of the set point. The dual electrode sensor is an allmetal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases. The 142 is a heated (100C) version of the Type 141, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Specifications 1, 2, 10, 100, 1000 Torr (mmHg) absolute1 Full Scale Ranges (Other engineering units available on special order, consult Applications Engineering.) Set Point Range Accuracy Temperature Coefficients Zero Span Ambient Operating Temperature Response Time Material Exposed to Process Internal Volume3 Overpressure4 Outputs Electromechanical relay Input Power Required 0.2% to 100% of F.S.2 0.5% of range ( temperature coefficients) Type 141: 0.04% of F.S./C Type 142: 0.015% of F.S./C Type 141: 0.06% of set point/C Type 142: 0.03% of set point/C Type 141: 0 to 50C Type 142: 20 to 70C; sensor is temperature controlled at 100C < 20 msec from 0 to F.S. Inconel and 316 S.S. 7.0 cc 120% of F.S. or 35 psia (1000 mmHg), whichever is larger DPDT (isolated) contacts rated up to 1 Amp @ 30 VDC or 1 Amp @ 50 VAC resistive. Relay is energized when pressure is above set point. Fail-safe operation provides for the relay to be energized when pressure is below set point. For CE compliance, voltages cannot equal or exceed either 50 VAC or 75 VDC. Type 141: +20 to +30 VDC, 72 mA max. (60 mA @ 24 VDC) Type 142: +20 to + 30 VDC, 1.2 Amps max. (875 mA @ 24 VDC) Fittings5 Standard Optional 0.5" (12.7 mm) tubulation Swagelok(R) 8 VCR(R) (female), mini-CF, NW 16 KF, Swagelok 8 VCO(R) 1 If gauge pressure set point actuation is desired on the Type 141, 142, add SP110-89 to end of ordering code. Unit shipped with set point at 50% of F.S. unless otherwise specified. 3 5K-25K Torr units have an 8.5 cc volume. 4 1 and 2 Torr F.S. units have a max. overpressure of 25 psia. 5 Ranges above 1000 Torr are available with certain fittings; consult Applications Engineering. 2 Type 141 Unheated Vacuum/Pressure Switch Type 142 High Temperature Vacuum/Pressure Switch Type Numbers Baratron(R) is a registered trademark of MKS Instruments, Inc., Andover, MA. Swagelok(R), VCR(R), VCO(R) are registered trademarks of Swagelok Marketing Co., Solon, OH. Inconel(R) is a registered trademark of Inco Alloys International, Huntington, WV. Specifications subject to change without notice. Ordering Information model number example: 141A 00001 A A 141A/142A Full Scale Ranges 1 mmHg 2 mmHg 10 mmHg 100 mmHg 1000 mmHg 00001 00002 00010 00100 01000 Fittings 1/2" dia. tubulation Swagelok 8 VCR (female) Mini-CF, rotatable NW 16 KF Swagelok 8 VCO (female) A B C D E Relay Mode Standard operation (energizes above set point) Fail-safe operation (energizes below set point) Bulletin 141/142 - 10/00 (c) 2000 MKS Instruments, Inc. All rights reserved. A B Six Shattuck Road Andover, MA 01810-2449 (800) 227-8766 or (978) 975-2350 Fax: (978) 975-0093 E-mail: mks@mksinst.com Web site: http://www.mksinst.com