141A00001DB - MKS Instruments, Inc.

DIM. "X" TYPE 141 DIM. "X" TYPE 142

ADJUST

SET POINT

ABOVE

1A @ 120VAC

1A @ 30VDC

RELAY CONTACT RATING:

1.2A MAX

PWR

COM

+24V

COM

TABLE 1

RANGE

1.38 (35.05)1mm, 2mm

1.58 (40.06)10, 100, 1Kmm

0.50 DIA.

(12.7 mm)

"X"

SEE TABLE 1

TYPE 141

2.84

(72.14 mm)

TYPE 142

3.94

(100.08 mm)

3.00 DIA.

(76.2 mm)

1.00

(25.4 mm)

SWAGELOK 8VCR

COUPLING

1.13

(28.70 mm)

WITHOUT FITTING*

TYPE 141

VACUUM SWITCH

ADJUST

SET POINT

ABOVE

60mA

PWR

COM

+24V

COM

1.82 (46.23)

2.02 (51.31)

0.10 (2.50 mm)

KF 16 FITTING

1.18 (30.0 mm)

DIA. REF.

TYPE 141

VACUUM SWITCH

Note: Unless otherwise specified, dimensions are nominal values in

inches (mm referenced).

Dimensional Drawing

Description

The MKS Types 141 and 142 Vacuum/Pressure Switches offer

fast, accurate, and reliable protection for vacuum equipment and

processes. Designed for applications where a DC signal output is

not required, the Types 141 and 142 provide relay outputs that

are readily interfaced with alarms, valve actuators, computers,

process controllers, or other protection devices.

Based on the well-known MKS Baratron® capacitance

manometer principle of operation, the Types 141/142 sense the

deflection of a diaphragm due to applied pressure, providing a

switched output when pressure exceeds the chosen set point. An

LED provides visual “above set point” indication, and facilitates

adjustment of the set point. The dual electrode sensor is an all-

metal, all-welded design, thus exposing only corrosion-resistant

Inconel to the process gases.

The 142 is a heated (100°C) version of the Type 141, and is

designed to help minimize process effluent buildup that can

occur in LPCVD nitride, aluminum etch, and other types of

processes.

Features and Benefits

Ideal for protection of expensive equipment or processes:

high vacuum pumps, mass spectrometers, lasers, plasma

systems

Fully adjustable set point: from 0.2% to 100% of Full Scale

High accuracy set point: 0.5% of Full Scale

Corrosion resistant: all-metal, all-welded construction

exposes only Inconel® and stainless steel to gases

Double pole, two Form C relay contacts

Fast response switching: 20 msec

Provide inexpensive process control for opening/closing slow

pump and isolation valves, and for turning on/off various

types of pumps

Baratron® Vacuum

Pressure Switches

Type 141 Unheated

Type 142 High Temperature (100°C)

Six Shattuck Road

Andover, MA 01810-2449

(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093

E-mail: mks@mksinst.com

Web site: http://www.mksinst.com

Specifications

Ordering Information

Full Scale Ranges 1, 2, 10, 100, 1000 Torr (mmHg) absolute1

(Other engineering units available on special order, consult Applications Engineering.)

Set Point Range 0.2% to 100% of F.S.2

Accuracy ±0.5% of range (± temperature coefficients)

Temperature Coefficients

Zero Type 141: ±0.04% of F.S./°C

Type 142: ±0.015% of F.S./°C

Span Type 141: ±0.06% of set point/°C

Type 142: ±0.03% of set point/°C

Ambient Operating Temperature Type 141: 0° to 50°C

Type 142: 20° to 70°C; sensor is temperature controlled at 100°C

Response Time < 20 msec from 0 to F.S.

Material Exposed to Process Inconel and 316 S.S.

Internal Volume37.0 cc

Overpressure4120% of F.S. or 35 psia (1000 mmHg), whichever is larger

Outputs

Electromechanical relay DPDT (isolated) contacts rated up to 1 Amp @ 30 VDC or 1 Amp @ 50 VAC resistive.

Relay is energized when pressure is above set point. Fail-safe operation provides for the relay to

be energized when pressure is below set point. For CE compliance, voltages cannot equal or

exceed either 50 VAC or 75 VDC.

Input Power Required Type 141: +20 to +30 VDC, 72 mA max. (60 mA @ 24 VDC)

Type 142: +20 to + 30 VDC, 1.2 Amps max. (875 mA @ 24 VDC)

Fittings5Standard 0.5" (12.7 mm) tubulation

Optional Swagelok® 8 VCR® (female), mini-CF, NW 16 KF, Swagelok 8 VCO®

Bulletin 141/142 – 10/00

Type 141 Unheated Vacuum/Pressure Switch

Type 142 High Temperature Vacuum/Pressure Switch

1If gauge pressure set point actuation is desired on the Type 141, 142, add SP110-89 to end of

ordering code.

2Unit shipped with set point at 50% of F.S. unless otherwise specified.

35K–25K Torr units have an 8.5 cc volume.

41 and 2 Torr F.S. units have a max. overpressure of 25 psia.

5Ranges above 1000 Torr are available with certain fittings; consult Applications Engineering.

Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA.

Swagelok®, VCR®, VCO® are registered trademarks of Swagelok Marketing Co., Solon, OH.

Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.

Specifications subject to change without notice.

model number example: 141A 00001 A A

Type Numbers 141A/142A

Full Scale Ranges

1 mmHg 00001

2 mmHg 00002

10 mmHg 00010

100 mmHg 00100

1000 mmHg 01000

Fittings

½" dia. tubulation A

Swagelok 8 VCR (female) B

Mini-CF, rotatable C

NW 16 KF D

Swagelok 8 VCO (female) E

Relay Mode

Standard operation (energizes above set point) A

Fail-safe operation (energizes below set point) B