™
DESCRIPTION
Honeywell Zephyr™ Analog Airflow Sensors: HAF Series-High
Accuracy, provide an analog interface for reading airflow over
the specified full scale flow span and temperature range. Their
thermally isolated heater and temperature sensing elements
help these sensors provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and
other non-corrosive gases. They are available in standard flow
ranges and are fully calibrated and temperature compensated
with an on-board Application Specific Integrated Circuit (ASIC).
The HAF Series is compensated over the temperature range of
0 C to 50 C [32 F to 122 F] and operates across a
temperature range of -20 C to 70 C [-4 F to 158 F]. The
state-of-the-art ASIC-based compensation provides analog
outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to
measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS)
with temperature-sensitive resistors deposited with thin films of
platinum and silicon nitride. The MEMS sensing die is located
in a precise and calculated airflow channel to provide
repeatable flow response.
Zephyr sensors provide customers with enhanced reliability,
analog accuracy, repeatable measurements and the ability to
customize sensor options to meet many specific application
needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are
designed and manufactured according to ISO 9001 standards.
FEATURES AND BENEFITS (= competitive differentiator)
High ±2.5% accuracy allows for very precise airflow
measurement, often ideal for demanding applications with
high accuracy requirements
Full calibration and temperature compensation typically allow
customer to remove additional components associated with
signal conditioning from the PCB, reducing PCB size as well
as costs often associated with those components (e.g.,
acquisition, inventory, assembly)
Customizable for specific end-user needs
High sensitivity at very low flows allows a customer’s
application to detect presence or absence of airflow
High stability reduces errors due to thermal effects and null
shift to provide accurate readings over time, often eliminating
need for system calibration after PCB mount and periodically
over time
Low pressure drop typically improves patient comfort in
medical applications, and reduces noise and system wear on
other components such as motors and pumps
Linear output provides more intuitive sensor signal than the
raw output of basic airflow sensors, which can help reduce
production costs, design, and implementation time
Fast response time allows a customer's application to
respond quickly to airflow change, important in critical
medical (i.e., anesthesia) and industrial (i.e., fume hood)
applications
11-bit resolution increases ability to sense small airflow
changes, allowing customers to more precisely control their
application
Low 3.3 Vdc operating voltage option and low power
consumption allow for use in battery-driven and other
portable applications
Bidirectional flow sensing capability eliminates the need for
two airflow sensors, helping to reduce production costs and
implementation time
Insensitivity to mounting orientation allows customer to
position sensor in most optimal point in the system,
eliminating concern for positional effects
Insensitivity to altitude eliminates customer-implemented
altitude adjustments in the system, easing integration and
reducing production costs by not having to purchase
additional sensors for altitude adjustments
Small size occupies less space on PCB, allowing easier fit
and potentially reducing production costs; PCB size may
also be reduced for easier fit into space-constrained
applications
RoHS-compliant materials meet Directive 2002/95/EC
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POTENTIAL APPLICATIONS
Medical
Anesthesia delivery machines
Ventricular assist devices (heart pumps)
Hospital diagnostics (spectrometry, gas chromatography)
Nebulizers
Oxygen concentrators
Patient monitoring systems (respiratory monitoring)
Sleep apnea machines
Spirometers
Ventilators
Industrial
Air-to-fuel ratio
Analytical instrumentation (spectrometry, chromatography)
Fuel cells
Gas leak detection
Gas meters
HVAC filters
VAV system on HVAC systems
Meteorolgy
Table 1: Absolute Maximum Ratings1
Characteristic
Parameter
CAUTION
IMPROPER USE
Do not use these products to sense liquid or
fluid flow.
Failure to comply with these instructions
may result in product damage.
Supply voltage
-0.3 Vdc to 6.0 Vdc
Voltage on output pin
-0.3 V to Vsupply
Storage temperature range
-40 C to 125 C [-40 F to 257 F]
Maximum flow change
5.0 SLPM/s
Maximum common mode pressure
25 psi at 25 C [77 F]
Maximum flow
10 SLPM
Note 1: Using the sensor at or beyond the Absolute Maximum Ratings may affect the reliability of the device or cause permanent damage. This is a
stress rating only. Using the sensor beyond the operational characteristic ranges may still affect the functional operation of the device.
Table 2: Operating Characteristics
Parameter
Note
3.3 Vdc 10%; 5.0 Vdc 10%
16 mA max. (no load)
40 mW typ. (no load)
55 mW typ. (no load)
-20 C to 70 C [-4 F to 158 F]
0 C to 50 C [32 F to 122 F]
1
±0.25% FSS or ±2.5% Reading, whichever is greater
±0.25% FSS or ±15% Reading, whichever is greater
2, 4
±0.25% FSS or ±4.5% Reading, whichever is greater
±0.25% FSS or ±15% Reading, whichever is greater
3, 4
±0.08 %FSS
4, 8
1 ms typ.
5
11 bit
15 ms
6
gaseous nitrogen
7
±0.06 FSS max. deviation from null output after 1000 hrs at 25 C
no
Notes:
1. Custom and extended compensated temperature ranges are possible. Contact Honeywell for details.
2. Accuracy is the maximum deviation from the nominal digital output over the compensated flow range at a reference temperature of 25 C.
Errors include offset, span, non-linearity, hysteresis and non-repeatability (see Figure 3 for the Accuracy Error Band vs Flow).
3. Total error band includes all errors over the compensated flow range including all effects due to temperature over the compensated
temperature range (see Figure 4 for the Total Error Band).
4. Full Scale Span (FSS) is the algebraic difference between the digital output at the forward Full Scale (FS) flow and the digital output at the
reverse FS flow. Forward flow is defined as flow from P1 to P2 as shown in Figure 4. The references to mass flow (SCCM) refer to gas flows at
the standard conditions of 0 °C and atmospheric pressure 760 (101.3 kPa).
5. Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer
may be affected by the pneumatic interface).
6. Warm-up time: time to the first valid flow measurement after power is applied.
7. Default calibration media is dry nitrogen gas. Please contact Honeywell for other calibration options.
8. Null accuracy is the maximum deviation in output at 0 SCCM from the ideal transfer function over the compensated temperature range. This
includes offset errors, thermal airflow hysteresis and repeatability errors.
Honeywell Sensing and Control 3
Table 3. Suggested Load
Characteristic
Parameter
CAUTION
LARGE PARTICULATE DAMAGE
Use a 5-micron filter upstream of the sensor to keep media
flow through the sensor free of condensing moisture and
particulates. Large, high-velocity particles or conductive
particles may damage the sensing element.
Failure to comply with these instructions may result in
product damage.
Minimum suggested resistance:
3.3 Vdc
5.0 Vdc
3.3 kOhm
5.0 kOhm
Maximum suggested capacitance:
3.3 Vdc
5.0 Vdc
10 nF
10 nF
Table 4. Environmental Characteristics
Table 5. Wetted Materials
Characteristic
Parameter
Characteristic
Parameter
Humidity
0% to 95% RH, non-condensing
Covers
high temperature polymer
Shock
100 g, 11 ms
Substrate
PCB
Vibration
15 g at 20 Hz to 2000 Hz
Adhesives
epoxy
ESD
Class 3B per MIL-STD 883G
Electronic components
silicon, gold
Radiated Immunity
Level 3 from (80 MHz to 1000 MHz)
per spec IEC61000-4-3
Compliance
RoHS, WEEE
Table 6. Recommended Mounting and Implementation
Characteristic
Parameter
Mounting screw size
5-40
Mounting screw torque
0.68 N m [6 in-lb]
Tubing for long port style
70 durometer, size 0.125 inch inside diameter, 0.250 inch outside diameter silicone tubing
O-ring for short port style
AS568A, Size 7, Silicone, Shore A 70
O-ring for long port style
AS568A, Size 10, Silicone, Shore A 70
Filter recommendation
5-micron filter upstream of the sensor
Figure 1. Nomenclature and Order Guide
Example Catalog
Listing
HAFBLS0200CAAX5 =
High accuracy airflow
sensor, bidirectional
forward flow optimized,
long port style, snap
mount housing, 200
SCCM, analog output,
10% to 90% transfer
function, 5.0 Vdc supply
voltage.
Customer-specific
Requirements
Apart from the general
configuration required,
other customer-specific
requirements are also
possible. Please contact
Honeywell.
Note:
1. The Long Port Port Style with the Snap Mount Housing Style is not a valid configuration.
™
4 www.honeywell.com/sensing
Figure 2. Nominal Analog Output
Figure 3. Ideal Transfer Function
-150.00% Flow (%FS)
Analog Output (%Vsupply)
-100.00% -50.00% 0.00% 50.00% 100.00% 150.00%
0.00%
20.00%
40.00%
60.00%
100.00%
80.00%
120.00%
Vo = Vs 0.5 + 0.4 FA
FFS
FA = FFS(VO/VS - 0.5)
0.4
Where:
VO = Output voltage of the
device
VS = Supply voltage measured
at the device
FA = Flow applied across the
device
FFS = Full scale flow specified for
the device
Figure 4. Accuracy Error Band
Figure 5. Total Error Band
Flow (SCCM)
Error (% FSS)
050 100 150 200
-50-100-150-200
8.00%
6.00%
4.00%
-4.00%
-2.00%
0.00%
2.00%
-6.00%
-8.00%
Flow (SCCM)
Error (% FSS)
050 100 150 200
-50-100-150-200
8.00%
6.00%
4.00%
-4.00%
-2.00%
0.00%
2.00%
-6.00%
-8.00%
Null Accuracy =
±0.08% FSS
Figure 6. Long Port Style Flow vs Pressure
Flow
(SCCM)
Typical Pressure Drop
in H2O
mBar
kPa
-200
-0.019
-0.047
-0.005
-150
-0.013
-0.032
-0.003
-100
-0.007
-0.017
-0.002
-50
-0.001
-0.002
0.000
0
0.000
0.000
0.000
50
0.005
0.012
0.001
100
0.010
0.025
0.002
150
0.016
0.040
0.004
200
0.022
0.055
0.005
Figure .7 Short Port Style Flow vs Pressure
Flow
(SCCM)
Typical Pressure Drop
in H2O
mBar
kPa
-200
-0.470
-1.171
-0.117
-150
-0.284
-0.707
-0.071
-100
-0.143
-0.356
-0.036
-50
-0.045
-0.112
-0.011
0
0.000
0.000
0.000
50
0.048
0.120
0.012
100
0.139
0.346
0.035
150
0.287
0.715
0.071
200
0.452
1.126
0.113
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Figure 8. Wave Solder Profile
0 20 40 60 80 100
0
50
100
150
200
250
300
Time (s)
Temperature (°C)
Max. temp. = 243 °C
Max. temp. = 205 °C
Housing temp. (top of device)
Pin temp. (bottom of device)
Figure 9. Mounting Dimensions (For reference only: mm [in]). Additional port and housing styles available.
Long Port Style, Fastener Mount
Short Port Style, Snap Mount
SENSOR FOOTPRINT
VIEWED FROM TERMINAL SIDE
TERMINAL SIDE
1 2 3 4
1234
2X PORTS
3,0
[0.12] 2,00 TYP.
[0.079]
MODEL NUMBER
LOT CODE
10,3
[0.40]
10,00
[0.39]
3,50
[0.14]
6,50
[0.26]
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
36,00
[1.42]
7,20
[0.28]
12,70
[0.50]
AIRFLOW DIRECTION, PORT SIDE
2X DIA. 3,40
[0.13]
1,00
[0.04]
7,20
[0.28]
4X DIA. 0,812
[0.032]
7,20
[0.28]
18,00
[0.71]
36,00
[1.42]
2X DIA. 3,40
[0.134]
2X DIA. 5,35
[0.21]
3X 2,00
[0.079]
1,00
[0.039]
1234
2X PORTS
TERMINAL SIDE
12 3 4
SENSOR FOOTPRINT
VIEWED FROM TERMINAL SIDE
MODEL NUMBER
LOT CODE
19,90
[0.78]
6,35
[0.25]
28,80
[1.13]
12,70
[0.50]
10,3
[0.40]
2,50
[0.10]
4,80
[0.19]
3,3
[0.13]
2,00 TYP.
[0.079] 1,00
[0.04]
3,00
[0.12]
12,8
[0.50]
26,00
[1.02]
1,80
[0.071]
6,50
[0.26] 10,40
[0.41]
7,20
[0.28] 4,60
[0.18]
26,00
[1.024]
AIRFLOW DIRECTION, PORT SIDE
22,0
[0.866]
2X DIA. 2,2
[0.086] THRU
HOLES FOR
MOUNTING
3,80
[0.150]
4,00
[0.157]
2X 2,50
[0.098]
2X 7,20
[0.28]
0,65
[0.026]
22,00
[0.87]
4X DIA. 0,812
[0.032]
DIA. 2,30
[0.09]
1,00
[0.04]
3X 2,00
[0.079]
Pinout (analog function)
1 = Vout
2 = Vsupply
3 = Ground
4 = NC
Sensing and Control
Honeywell
1985 Douglas Drive North
Golden Valley, MN 55422
www.honeywell.com
008217-1-EN IL50 GLO Printed in USA
November 2010
2010 Honeywell International Inc. All rights reserved.
WARNING
PERSONAL INJURY
DO NOT USE these products as safety or emergency stop
devices or in any other application where failure of the
product could result in personal injury.
Failure to comply with these instructions could result in
death or serious injury.
WARRANTY/REMEDY
Honeywell warrants goods of its manufacture as being free of
defective materials and faulty workmanship. Honeywell s
standard product warranty applies unless agreed to otherwise
by Honeywell in writing; please refer to your order
acknowledgement or consult your local sales office for specific
warranty details. If warranted goods are returned to Honeywell
during the period of coverage, Honeywell will repair or replace,
at its option, without charge those items it finds defective. The
foregoing is buyer s sole remedy and is in lieu of all other
warranties, expressed or implied, including those of
merchantability and fitness for a particular purpose. In no
event shall Honeywell be liable for consequential, special,
or indirect damages.
While we provide application assistance personally, through
our literature and the Honeywell web site, it is up to the
customer to determine the suitability of the product in the
application.
Specifications may change without notice. The information we
supply is believed to be accurate and reliable as of this
printing. However, we assume no responsibility for its use.
WARNING
MISUSE OF DOCUMENTATION
The information presented in this product sheet is for
reference only. Do not use this document as a product
installation guide.
Complete installation, operation, and maintenance
information is provided in the instructions supplied with
each product.
Failure to comply with these instructions could result in
death or serious injury.
SALES AND SERVICE
Honeywell serves its customers through a worldwide network
of sales offices, representatives and distributors. For
application assistance, current specifications, pricing or name
of the nearest Authorized Distributor, contact your local sales
office or:
E-mail: info.sc@honeywell.com
Internet: www.honeywell.com/sensing
Phone and Fax:
Asia Pacific +65 6355-2828
+65 6445-3033 Fax
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+44 (0) 1698 481676 Fax
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