769
Related Information
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Pressure/
Digital Display
Pressure/
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Flow
FM-200
With analog
output
Integrated Display Type Digital Flow Sensor For Gas
FM-200 SERIES
Dual color with sub display at a glance
Easy-to-see dual color with sub display!
The setting conditions are displayed on the sub display, making it much easier to keep track of operations.
In addition, the digital display which switches between 2 colors lets you check the status of sensor operation at a
glance.
Digital
■General terms and conditions ............. F-3 ■Selection guide ............................. P.699~
■Glossary of terms........................ P.1569~ ■General precautions ................... P.1571~
Sub display
Main display
Setting value
Linked to output 1 Linked to output 2
Setting item
Main display
Sub display
Main display
Sub display
Setting values and setting items can be checked at the same time.
Easy to see with the sub display!
The display color changes in accordance
with output ON/OFF operations.
Dual color display at a glance
panasonic.net/id/pidsx/global
Integrated Display Type Digital Flow Sensor FM-200 SERIES
770
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Head-separated
Flow
FM-200
High precision of ±3 % F.S. One sensor for both intake and exhaust
A new rectication mechanism and Micro Electro
Mechanical System (MEMS) technology allow the sensor to
be mounted on a Si sensor chip (3 × 3.5 mm 0.118 × 0.138
in). This provides an extremely small heat capacity, high
precision of ±3 % F.S. and high-speed response. The two
temperature sensors on each side of the heater detect the
heat distribution to make bidirectional detection possible.
Equipped with a wide variety of functions for greater ease of use
• Integrated value reset function
During integrated mode, external input allows reset of
the integrated value.
• Analog voltage output
1 to 5 V analog voltage output is incorporated.
• Key lock function
Key operation can be disabled to prevent mis-
operation.
• Rattle prevention function (Response time setting)
The response time can be set to one of seven steps
from 50 ms to approximately 1,500 ms. This prevents
rattling from rapid changes in ow or from noise.
• Display rate setting
The display update period for the digital display can
be changed to 250 ms, 500 ms or 1,000 ms in order to
eliminate display ickering.
• ECO mode
After approx. one minute of no operation, sensor will
be switched to ECO mode.
Backlight will be turned off to reduce power
consumption.
A single sensor can detect ows bidirectionally. In
addition, it can be set to detect ows in either the
forward or reverse direction only, making it suitable for a
variety of applications.
APPLICATIONS
Controlling purge gas and air blowing
By controlling purge gas and air blowing,
performance and quality of the products
can be maintained, while contributing to
cost reduction.
Lead frame
Flexible printed circuit board
Collet
No straight pipes needed
The rectication method
used by the new
mechanism makes straight
pipes unnecessary at both
the intake and exhaust
sides.
Connection
Quick connection is
possible with a cover-
attached connector.
Flexible installation direction
Other than the ability to carry out bidirectional detection,
there are no limitations on the installation direction,
making the installation very exible.
Si substrate
New rectification mechanism
Si sensor chip
Temperature sensor 1
Heater
Temperature sensor 2Temperature sensor 1
Temperature distribution
Heater
Temperature sensor 2
Flow
When there is no flow When there is flow
Low High
Principle of Si sensor chip
Suction nozzle
Suction
For example, using a single sensor to check chip suction
Vacuum breakdown
ChipChip
Forward direction Reverse direction
One sensor detects both directions
Checking seating
Flow sensors can be used for stable detection of
transparent objects which were difcult to detect
using photoelectric sensors. The nozzle can be
extended for detection even in places where oil
spatter occurs.
Checking suction
Detection of objects is possible even on
conveyors with low suction pressures
where air is owing constantly (such as
collet conveyors and network conveyors).
771
Integrated Display Type Digital Flow Sensor FM-200 SERIES
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Pressure/
Head-separated
Flow
FM-200
Suitable for cost and quality control! Integrated output mode incorporated
The FM-200 series can control and manage ows in a wide variety of output modes such as integrated output mode,
depending on the required application.
INTEGRATED FLOW RATE DISPLAY
Integrated ow rate can be
displayed with 7 digits
• Integrated output mode
Quality control
When the volume of ow of the gas being measured reaches the set integrated value,
output switches to ON or OFF.
• Controls N2 charging volumes for electronic components
• Controls air blowing volumes, etc.
Integrated
flow value
Time
Comparative output
0
ON
OFF
Comparative output
ON
OFF
Integrated flow rate
• Integrated pulse output mode
Cost management
The pulse output is generated once at every specied integrated value*.
This lets you know the amount of air consumed per unit of time easily.
• Controls N2 purge volumes in reow furnaces
• Controls overall volumes of air consumed by equipment, etc.
ℓ: Specified integrated
value*
40 ms approx.
(Fixed value)
0
ℓ
2 ℓ
3 ℓ
Comparative output
ON
OFF
Time
Integrated flow rate
* Integrated values are specied by range and can vary.
For details, refer to “SPECIFICATIONS” (p.773).
Energy-saving and environmental-friendly
The pulse output from the ow sensor can be inputted to the pulse counter of an Eco-Power Meter so that air
consumption and power consumption can both be measured simultaneously.
Integrated pulse output
(The pulse output is generated
according to the volume of gas flow.)
(Note 1)
FM-200 series
Equipment or facility
Dedicated current sensor
Eco-Power Meter
KW2G
(Note 2)
Air consumption
Power consumption
CT
Air consumption measurement
Power consumption measurement
RS-485 communication
To upper-level
communication
Convert the data
according to the
measurement range
with a data logger, etc.
Notes: 1) Displayed value data is not outputted.
2) Refer to p.1372 for the Eco-Power Meter KW2G (AKW2010GB).
INSTANT FLOW RATE DISPLAY (FACTORY SETTING)
• Window comparator mode
This mode is used for setting
comparative output to ON or
OFF at ow rates within the
setting range.
• Hysteresis mode
This mode is used for setting
comparative output hysteresis to
the desired level and for carrying
out ON/OFF control.
• Output OFF mode
Comparative output is forcibly
maintained at OFF regardless of
the setting value.
H: 1 % F.S.(Factory setting)
0
Lo
Hi
Comparative
output
ON
OFF
Comparative
output
ON
OFF
H (Hysteresis)
H (Hysteresis)
Flow rate
H: 1 digit or more
0
Lo
Hi
Comparative
output
ON
OFF
Comparative
output
ON
OFF
H (Hysteresis)
Flow rate
0
Lo
Hi
Comparative
output
ON
OFF
Output is turned off regardless
of whether the setting value is ON or OFF.
Flow rate
Integrated Display Type Digital Flow Sensor FM-200 SERIES
772
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Head-separated
Flow
FM-200
ORDER GUIDE
Type Appearance Applicable
uid
Flow rate
range Model No. Port size Comparative output
Resin body
Clean air (Note)
Compressed air
(Note)
Nitrogen gas
500 mℓ/min. FM-252-4
ø4 ø0.157 push-in
NPN Open-collector transistor
FM-252-4-P PNP Open-collector transistor
1,000 mℓ/min.
FM-213-4 NPN Open-collector transistor
FM-213-4-P PNP Open-collector transistor
5 ℓ/min. FM-253-4 NPN Open-collector transistor
FM-253-4-P PNP Open-collector transistor
10 ℓ/min. FM-214-4 NPN Open-collector transistor
FM-214-4-P PNP Open-collector transistor
50 ℓ/min. FM-254-8
ø8 ø0.315 push-in
NPN Open-collector transistor
FM-254-8-P PNP Open-collector transistor
100 ℓ/min. FM-215-8 NPN Open-collector transistor
FM-215-8-P PNP Open-collector transistor
Aluminum body
500 ℓ/min.
FM-255-AR2 Rc1/2 female thread
NPN Open-collector transistor
FM-255-AR2-P PNP Open-collector transistor
FM-255-AG2-P G1/2 female thread PNP Open-collector transistor
1,000 ℓ/min.
FM-216-AR2 Rc1/2 female thread
NPN Open-collector transistor
FM-216-AR2-P PNP Open-collector transistor
FM-216-AG2-P G1/2 female thread PNP Open-collector transistor
Note: The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
Accessory
• CN-F15-C1 (Connector attached cable 1 m 3.281 ft)
Designation Model No. Description
Sensor
mounting
bracket
MS-FM2-1 Allows resin body type sensor to be installed on the ooring.
MS-FM2-2 Allows aluminum body type sensor to be installed on the
ooring.
OPTIONS
Sensor mounting bracket
• MS-FM2-1 • MS-FM2-2
Recommended vacuum lter
Manufactured by Nihon Pisco Co., Ltd.
VFU1-44-15P (Element length 15 mm 0.591 in)
VFU1-44-25P (Element length 25 mm 0.984 in)
VFE015B01 Filter element for rell,
length 15 mm 0.591 in
VFE025B01 Filter element for rell,
length 25 mm 0.984 in
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in
) screw with washers
(Attached to MS-FM2-1)
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in
) screw with washers
(Attached to MS-FM2-2)
Note: Contact the manufacturer for details of the
recommended products.
( )
( )
773
Integrated Display Type Digital Flow Sensor FM-200 SERIES
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Flow
FM-200
SPECIFICATIONS
Individual specications
Common specications
Type NPN output type
PNP output type
Item Model No. FM-2□FM-2□-P
CE marking directive compliance
EMC Directive, RoHS Directive
Rated pressure range −0.09 to +0.7 MPa
Pressure withstandability 1 MPa
Applicable uid Clean air (Note 3), compressed air (Note 3), nitrogen gas
Supply voltage 12 to 24 V DC ±10 % Ripple P-P10 % or less
Current consumption Normal mode: 60 mA or less, ECO mode: 40 mA or less
Comparative outputs
NPN open-collector transistor
• Maximum sink current: 50 mA or less
• Applied voltage: 26.4 V DC or less
(between comparative output and 0 V)
• Residual voltage: 2.4 V or less (at 50 mA sink current)
PNP open-collector transistor
• Maximum source current: 50 mA or less
• Applied voltage: 26.4 V DC or less
(between comparative output and +V)
• Residual voltage: 2.4 V or less (at 50 mA source current)
Output modes Output OFF mode, window comparator mode, hysteresis mode, integrated output mode, integrated pulse output mode
Short-circuit protection Incorporated
Hysteresis
Window comparator mode: 1 to 8 % F.S. approx. (variable) (Factory settings: approx. 1 % F.S.), Hysteresis mode: Variable (minimum 1 digit)
Response time 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 800 ms, 1,500 ms, selectable by key operation
Analog voltage output Output voltage: 1 to 5 V, Output impedance: 1 kΩ approx. [For details, refer to “Analog voltage output” (p.774)]
Repeatability Within ±1 % F.S.
Accuracy assurance range (Note 4)
Bi-direction : -100 to -3 % F.S., +3 to +100 % F.S., One-side direction : +3 to +100 % F.S.
External input ON voltage: 0 to +0.4 V, OFF voltage: +5 V to +V, or open
Input time: 80 ms or more
ON voltage: +5 V to +V, OFF voltage: 0 to +0.6 V, or open
Input time: 80 ms or more
Linearity Within ±3 % F.S. (Ambient temperature +25 °C +77 °F, ow rate range 3 to 100 % F.S., atmospheric criteria on secondary side)
Display 4 digits + 4 digits 2-color LCD display (Display refresh rate: 250 ms, 500 ms, 1,000 ms, selectable by key operation)
Environmental resistance
Protection IP40 (IEC)
Ambient temperature 0 to +50 °C +32 to +122 °F (No dew condensation allowed), Storage: -10 to +60 °C +14 to +140 °F
Ambient humidity 35 to 90 % RH, Storage: 35 to 90 % RH
Voltage withstandability 1,000 V AC for one min. between all supply terminals connected together and enclosure (Excluding the aluminum body type)
Insulation resistance
10 MΩ, or more, with 500 V DC megger between all supply terminals connected together and enclosure (Excluding the aluminum body type)
Vibration resistance
10 to 150 Hz frequency, 0.75 mm 0.030 in double amplitude or 49 m/s
2
max. acceleration, in X, Y and Z directions for two hours each
Shock resistance 100 m/s2 acceleration (10 G approx.) in X, Y and Z directions three times each
Temperature characteristics Within ±0.2 % F.S./°C (+25 °C +77 °F criteria, +15 to +35 °C +59 to +95 °F ambient temperature range)
Pressure characteristics Within ±5 % F.S. (-0.09 to +0.7 MPa, +25 °C +77 °F, atmospheric criteria on secondary side)
Enclosure earthing Floating (Note 5)
Material
Enclosure: ABS, Body: Polyamide (Aluminum body type: Aluminum), Switch: EPDM, Display: Acrylic, Mounting screw part (Resin body type): Brass
Current plate / Port lter: Stainless steel (used for the gas contact area),
Sensor chip: Silicon, Gasket: Fluorine rubber
Connecting method Connector
Cable length Total length up to 10 m 32.808 ft is possible with 0.3 mm2, or more, cable.
Accessory CN-F15-C1 (Connector attached cable 1 m 3.281 ft): 1 pc.
Comparative output 1 /
Comparative output 2
()
Notes: 1) Converted to volumetric ow at +20 °C +68 °F and 1 atmospheric pressure (101 kPa).
2) The display ow rate range is the case when setting to bi-direction at the ow direction setting. When the ow direction is set to one-side forward
direction or one-side reverse direction, the negative side of the display ow rate range shows 10 % of the full-scale (F.S.).
3) The clean air complies with JIS B 8392-1.1.1 to 5.6.2, and the compressed air complies with JIS B 8392-1.1.1 to 1.6.2.
4) Take care that if uid ows in the vicinity of zero-point which is out of the accuracy assurance range, the instant ow rate value may forcibly display “zero”,
or the integrated ow display value may not be counted up, or the integrated pulse output may not be outputted.
5) As a varistor (clamping voltage: approx. 40 V) is connected to the aluminum body type, do not apply voltage higher than the rated voltage of the sensor.
Type Aluminum body type
Item Model No. FM-255-AR2(-P)FM-255-AG2-P FM-216-AR2(-P)FM-216-AG2-P
Full scale ow rate (Note 1) 500 ℓ/min. 1,000 ℓ/min.
Instant
ow rate
Display range (Note 2) –550 to +550 ℓ/min. –1,100 to +1,100 ℓ/min.
Setting and display resolution
1 ℓ/min.
Integrated
ow rate
Display range (Note 2) ±9999999 ℓ
Setting and display resolution
1 ℓ
Specied integrated value 5 ℓ 10 ℓ
Port size Rc1/2 female thread G1/2 female thread Rc1/2 female thread G1/2 female thread
Weight Net weight: 155 g approx., Gross weight: 220 g approx.
Type Resin body type
Item Model No. FM-252-4(-P)FM-213-4(-P)FM-253-4(-P)FM-214-4(-P)FM-254-8(-P)FM-215-8(-P)
Full scale ow rate (Note 1) 500 mℓ/min. 1,000 mℓ/min. 5 ℓ/min. 10 ℓ/min. 50 ℓ/min. 100 ℓ/min.
Instant
ow rate
Display range (Note 2)
–550 to +550 mℓ/min.
–1,100 to +1,100 mℓ/min.
–5.5 to +5.5 ℓ/min.
–11 to +11 ℓ/min. –55 to +55 ℓ/min.
–110 to +110 ℓ/min.
Setting and display resolution
1 mℓ/min. 0.01 ℓ/min. 0.1 ℓ/min.
Integrated
ow rate
Display range (Note 2) ±9999999 mℓ ±99999.99 ℓ ±999999.9 ℓ
Setting and display resolution
1 mℓ 0.01 ℓ 0.1 ℓ
Specied integrated value 5 mℓ 10 mℓ 0.05 ℓ 0.1 ℓ 0.5 ℓ 1 ℓ
Port size ø4 ø0.157 push-in ø8 ø0.315 push-in
Weight Net weight: 50 g approx., Gross weight: 115 g approx.
Net weight: 70 g approx., Gross weight: 135 g approx.
Integrated Display Type Digital Flow Sensor FM-200 SERIES
774
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Digital Display
Pressure/
Head-separated
Flow
FM-200
I/O CIRCUIT AND WIRING DIAGRAMS
I/O circuit diagram Wiring diagram
I/O circuit diagram Wiring diagram
Non-voltage contact or NPN open-collector transistor
or
High (+5 V to +V, or Open): Invalid
Low (0 to +0.4 V): Valid
Non-voltage contact or PNP open-collector transistor
or
High (+5 V to +V): Valid
Low (0 to +0.6 V, or Open): Invalid
Notes: 1) As for the aluminum body type, varistor (clamping voltage approx.
40 V) is connected between the internal power circuit and the
metal body to prevent breakdown of the sensor. Connect the metal
body to +V of power supply or to frame ground (F.G.) of a device
that is connected to 0 V. High potential and insulation resistance
tests between the internal power circuit and the metal body must
not be done.
2) Short-circuit protection is not incorporated into the analog voltage
output. Do not connect the power supply or capacitive load directly
to the analog voltage output.
* 1: When using CH2 as a comparative output 2
* 2: When using CH2 as an external input
* 1: When using CH2 as a comparative output 2
* 2: When using CH2 as an external input
D1
D3
D4
D2
Tr1
Tr3
Tr2
1
2
3
4
5
Internal circuit Users’ circuit
(Brown) +V
Load
Load
(White) CH2 (Comparative output 2 / External input)
(Blue) 0 V
(Note 2)
1 kΩ approx.
* 1
* 2
(Black) CH1
(Comparative output 1)
50 mA max.
50 mA max.
(Gray) Analog voltage output
+
-
12 to 24 V DC
±10 %
Terminal No. Color code of connector attached cable
Main circuit
Varistor (Note 1)
Load
Load
* 1
* 2
+
-
12 to 24 V DC
±10 %
Brown
Black
White
Blue
Gray (Note 2)
Load
Load
* 1
* 2
+
-
12 to 24 V DC
±10 %
Brown
Black
White
Blue
Gray (Note 2)
D1
D2
D3
D4
Tr1
Tr2
Tr3
1
2
3
4
5
(Brown) +V
Load
Load
(Blue) 0 V
Approx. 1 kΩ
* 1
* 2
(Black) CH1 (Comparative output 1)
50 mA max. +
-
12 to 24 V DC
±10 %
Main circuit
Varistor (Note 1)
(Gray) Analog
voltage output (Note 2)
(White) CH2 (Comparative output 2 /
External input)
Symbols… D1 to D4 : Reverse supply polarity protection diode
Tr1,Tr2 : NPN output transistor
Tr3 : PNP input transistor
FM-2□NPN output type
FM-2□-P PNP output type
5
3
1
0
Flow rate
(ℓ/min.)
Flow rate
(ℓ/min.)
F.S.
5
3
1
F.S.–F.S.
0
<One-side detection><Bi-direction detection>
Output
voltage (V)
Output
voltage (V)
Analog voltage output
5
3
1
0
Flow rate
(ℓ/min.)
Flow rate
(ℓ/min.)
F.S.
5
3
1
F.S.–F.S.
0
<One-side detection><Bi-direction detection>
Output
voltage (V)
Output
voltage (V)
Analog voltage output
Notes: 1) As for the aluminum body type, varistor (clamping voltage approx.
40 V) is connected between the internal power circuit and the
metal body to prevent breakdown of the sensor. Connect the metal
body to +V of power supply or to frame ground (F.G.) of a device
that is connected to 0 V. High potential and insulation resistance
tests between the internal power circuit and the metal body must
not be done.
2) Short-circuit protection is not incorporated into the analog voltage
output. Do not connect the power supply or capacitive load directly
to the analog voltage output.
Symbols… D1 to D4 : Reverse supply polarity protection diode
Tr1,Tr2 : PNP output transistor
Tr3 : NPN input transistor
775
Integrated Display Type Digital Flow Sensor FM-200 SERIES
FIBER
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SENSORS
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ELECTRIC
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MICRO
PHOTO-
ELECTRIC
SENSORS
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CURTAINS /
SAFETY
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PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
Terminal arrangement diagram
PRESSURE LOSS CHARACTERISTICS (TYPICAL)
PRECAUTIONS FOR PROPER USE
• Never use this product as a sensing device
for personnel protection.
• In case of using sensing devices for
personnel protection, use products which
meet laws and standards, such as OSHA,
ANSI or IEC etc., for personnel protection
applicable in each region or country.
• This product is for use in air and nitrogen
only. Do not use the product for other uids
since the sensing accuracy cannot be
guaranteed.
• Take care that if foreign materials are mixed
in the sensing part, the product may break.
Part description
FM-252-4(-P)FM-213-4(-P)FM-253-4(-P)FM-214-4(-P)
FM-254-8(-P)FM-215-8(-P)FM-255-A□2(-P)FM-216-A□2(-P)
0.1 MPa
0.3 MPa
0.5 MPa
0.1 0.2 0.3 0.40
0.10
0.09
0.08
0.07
0.06
0.05
0.04
0.03
0.02
0.01
0.5
Pressure loss (kPa)
Flow rate (ℓ/min.)
0.1 MPa
0.3 MPa
0.5 MPa
0.2 0.4 0.6 0.80
0.20
0.18
0.16
0.14
0.12
0.10
0.08
0.06
0.04
0.02
1.0
Pressure loss (kPa)
Flow rate (ℓ/min.)
0.1 MPa
0.3 MPa
0.5 MPa
12340
1.6
1.4
1.2
1.0
0.8
0.6
0.4
0.2
5
Pressure loss (kPa)
Flow rate (ℓ/min.)
0.1 MPa
0.3 MPa
0.5 MPa
24680
4.5
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
10
Pressure loss (kPa)
Flow rate (ℓ/min.)
Pressure loss (kPa)
Flow rate (ℓ/min.)
0.1 MPa
0.3 MPa
0.5 MPa
10 20 30 400
6
5
4
3
2
1
50
0.1 MPa
0.3 MPa
0.5 MPa
20 40 60 800
8
7
6
5
4
3
2
1
100
Pressure loss (kPa)
Flow rate (ℓ/min.)
0.3 MPa
0.5 MPa
0.7 MPa
100 200 300 4000
12
10
8
6
4
2
500
Pressure loss (kPa)
Flow rate (ℓ/min.)
200 400 600 8000
40
35
30
25
20
15
10
5
1,000
0.3 MPa
0.5 MPa
0.7 MPa
Pressure loss (kPa)
Flow rate (ℓ/min.)
Notes: 1) Direction of the arrow indicates the forward direction of ow rate
when setting the ow direction to bi-direction or one-side forward
direction. When setting the flow direction to one-side reverse
direction, a direction opposite to the forward direction display will
be the forward direction of the ow rate.
2) ø4 mm ø0.157 in push-in joint / ø8 mm ø0.315 in push-in joint is
incorporated in FM-2□-4(-P) / FM-2□-8(-P), respectively.
The push-in joint is not incorporated in the aluminum body type.
MODE key
Forward direction display
(Note 1)
UP key
DOWN key
Connector area
for piping
(Note 2)
Connector area
for piping
(Note 2)
Comparative output 2 indicator (Green)
Comparative output 1 indicator (Green)
Main display
(Green / Red)
Sub display (Green / Red)
Connector area for
connector attached cable
12345
Connector
pin No.
Color code of the
connector attached
cable
Terminal
1 Brown +V
2 Black CH1 (comparative output 1)
3 White
CH2 (comparative output 2 / external input)
4 Gray Analog voltage output
5Blue 0 V
Terminal arrangement of the connectors of this product
(sensor body)
Refer to p.1571~ for general precautions.
Integrated Display Type Digital Flow Sensor FM-200 SERIES
776
FIBER
SENSORS
LASER
SENSORS
PHOTO-
ELECTRIC
SENSORS
MICRO
PHOTO-
ELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASURE-
MENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
PRECAUTIONS FOR PROPER USE
Mounting
• This product can be installed facing up or down or to the
left or right.
• Install a filter, an air dryer and an oil mist filter (micro-
alescer) onto the primary side (upstream) of this product
since the compressed air from the compressor contains
drain (water, oil oxide and foreign materials, etc.). Mesh
(wire net) in this product is used to rectify the ow rate in
the pipe. Always install a lter to the primary side of this
product since this mesh is not a lter to remove foreign
materials.
Pneumatics
pressure
source
Filter Regulator Flow sensor
FM-200
Air dryer Oil mist filter
(Micro-alescer)
• When using a valve on the primary side of the product,
only use an oil-prohibit specication valve. This product
may malfunction or break if subject to splattering grease
or oil, etc.
• When using this product for suction verification, etc.,
always install an air filter whose filtration property is
10 µm 0.394 mil or less onto the suction side to prevent
suction of foreign materials and water. Furthermore,
consider atmospheric dew point and ambient temperature
of the product, use the product under the conditions that
dew condensations will not be formed in the inside of
pipe.
• In case of mounting commercial joint to the aluminum
body type, apply a spanner on the metal part of this
product and tighten by the tightening torque of 16 to
18 N·m. If excessive torque is applied, the commercial
joint or the main body may break.
• When piping, take care that foreign materials such as
sealing tape and adhesive must not enter into the inside
of the pipe. If foreign materials are entered, the product
may malfunction or break.
• Make sure to mount the joint when using the product with
its secondary side (downstream) open to the air. If the
joint is not mounted, the port lter of the product may fall
off.
Horizontal mounting
• The following specied tube should be used to insert to
the push-in joint type product.
Material of tube Tube diameter
(mm in)
Allowable diameter
Polyamide
ø4 ø0.157, ø8 ø0.315
Within ±0.1 mm ±0.004 in
Polyurethane
ø4 ø0.157 Within ±0.1 mm ±0.004 in
ø8 ø0.315
Within +0.1 / -0.15 mm ±0.004 in / -0.006 in
• Before using this product, make sure to check that the
tube is rmly inserted.
Piping
Vertical mounting
When using sensor mounting bracket
<Resin body type>
<Resin body type> <Aluminum body type>
<Resin body type> <Aluminum body type>
17 mm
0.669 in
M3 screw
(Purchase separately.)
M3 screw
(Purchase separately.)
M3 screw
(Purchase separately.)
M3 screw
(Purchase separately.)
M3 (length 6 mm 0.236 in
)
screw with washers
(Attached to MS-FM2-1)
M3 screw
(Purchase separately
.)
M3 (length 6 mm 0.236 in)
screw with washers
(Attached to MS-FM2-2)
• Use M3 screws, and the tightening torque should be 0.5
N·m.
• Use M3 screws, and the tightening torque should be 0.5
N·m.
• When mounting the product on the sensor mounting
bracket MS-FM2-1 (optional) or MS-FM2-2 (optional), use
the M3 screws (length 6 mm 0.236 in) attached to the
sensor mounting bracket. The tightening torque should be
0.5 N·m. Use M3 screws to mount the sensor mounting
bracket on a sensing surface.
Use MS-FM2-1 Use MS-FM2-2 Wiring
• Make sure that the power supply is OFF during wiring.
• Take care that wrong wiring will damage this product.
• Take care if applying voltage exceeding the rated range,
or connecting to AC power supply, this product may break
or burn.
• If power is supplied from a commercial switching
regulator, ensure that the frame ground (F.G.) terminal of
the power supply is connected to an actual ground.
• In case noise generating equipment (switching regulator,
inverter motor, etc.) is used in the vicinity of this
sensor, connect the frame ground (F.G.) terminal of the
equipment to an actual ground.
• Do not run the wires together with high-voltage lines or
power lines or put them in the same raceway. This can
cause malfunction due to induction.
• Extension up to total 10 m 32.808 ft is possible with
0.3 mm2, or more, cable.
• Make sure that stress by forcible bend or pulling is not
applied directly to the sensor cable joint.
Refer to p.1571~ for general precautions.
777
Integrated Display Type Digital Flow Sensor FM-200 SERIES
FIBER
SENSORS
LASER
SENSORS
PHOTO-
ELECTRIC
SENSORS
MICRO
PHOTO-
ELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASURE-
MENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
PRECAUTIONS FOR PROPER USE
• Do not use this product for commercial purposes since
the product does not comply with International System of
Units (SI).
• Do not apply pressure that exceed resistant-pressure.
• Do not use during the initial transient time (approx.
5 sec.) after the power supply is switched ON.
• The specifications may not be satisfied in a strong
magnetic eld.
• Accuracy of the display and the analog voltage output is
inuenced by self-heating by applying current other than
the temperature characteristics. Standby time (5 min. or
more after applying current) should be taken when using
the product.
• These sensors are only for indoor use.
• Do not use this product in places having excessive vapor,
dust, etc., or where it may come in contact with corrosive
gas, etc.
• Take care that the product does not come in contact with
water, oil, grease, or organic solvents such as thinner,
etc., strong acid or alkaline.
• Do not drop the product or apply hard shock. This can
cause product breakage.
Others
Refer to p.1571~ for general precautions.
P
2
: Vacuum
P1 : Atmosphere
pressure Suction
nozzle
P
1
: Pressurized
P2 : Atmospher
e
pressure
P1 : Pressurized
P2 :
Atmosphere
pressure Pinhole
● For P
1
≥ 1.89 × P
2
(acoustic velocity)
Q=113.2 × S × P1
● For
P1 < 1.89 × P2 (sub-acoustic velocity)
Q=226.4 × S × P2(P1–P2)
Q : Flow rate ℓ/min.
P1 : Absolute pressure at primary side (MPa)
P2 : Absolute pressure at secondary side (MPa)
S≥ : Effective cross-section area of nozzle (pinhole) mm2
• If using a ow sensor for tasks such as checking suction and release from suction nozzles and sensing leaks, use the ow
rate range setting table as a guide. The effective cross-section area of the nozzle (pinhole) and the difference in pressure
inside and outside the nozzle can be used to calculate the ow rate.
FLOW SENSOR SELECTION
<Calculation example>
The ow rate calculation value for a nozzle diameter of ø0.1 to ø2.0 mm ø0.004 to ø0.079 in when P2 is varied is shown in the table below.
Notes: 1) In case of any leakage from tubes, etc., actual values will differ greatly from calculated values. When measuring ows, make sure that there is no
leakage from any tubes.
2) In case of any points in the tubes which are narrower than the diameter of the suction nozzle, ow rate will be restricted and may turn out to be lower
than the calculated values.
In addition, suction verication may not be possible in such cases.
3) The effective cross-section area is a guide only. If the nozzle is long and narrow, the effective cross-section area may be smaller than the area at the tip
of the nozzle.
4) Response times are determined by the internal volume of the tube from the ow sensor to the suction nozzle (pinhole). If carrying out high-speed
sensing, reduce the internal volume of the tube as much as possible such as by locating the ow sensor as close as possible to the suction nozzle.
P1(MPa)
Absolute pressure
P1(MPa)
Gauge pressure
P2(MPa)
Absolute pressure
P2(MPa)
Gauge pressure
Acoustic velocity /
Sub-acoustic velocity
Calculated ow rate value (ℓ/min)
ø0.1 mm
ø0.004 in
ø0.2 mm
ø0.008 in
ø0.3 mm
ø0.012 in
ø0.4mm
ø0.016 in
ø0.5mm
ø0.020 in
ø0.7 mm
ø0.027 in
ø1.0 mm
ø0.039 in
ø1.5 mm
ø0.059 in
ø2.0 mm
ø0.079 in
Suction
0.1013 00.0313 –0.07
Acoustic velocity
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 00.0413 –0.06
Acoustic velocity
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 00.0513 –0.05
Acoustic velocity
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 00.0613 –0.04
Sub-acoustic velocity
0.088 0.352 0.792 1.408 2.200 4.312 8.800 19.801 35.202
0.1013 00.0713 –0.03
Sub-acoustic velocity
0.082 0.329 0.740 1.315 2.055 4.028 8.220 18.494 32.878
0.1013 00.0813 –0.02
Sub-acoustic velocity
0.072 0.287 0.645 1.147 1.792 3.512 7.166 16.125 28.666
0.1013 00.0913 –0.01
Sub-acoustic velocity
0.054 0.215 0.483 0.859 1.343 2.631 5.370 12.083 21.480
Blow (leakage detection)
0.1113 0.01 0.1013 0
Sub-acoustic velocity
0.057 0.226 0.509 0.905 1.414 2.772 5.657 12.727 22.626
0.1213 0.02 0.1013 0
Sub-acoustic velocity
0.080 0.320 0.720 1.280 2.000 3.920 8.000 17.999 31.998
0.1413 0.04 0.1013 0
Sub-acoustic velocity
0.113 0.453 1.018 1.810 2.828 5.543 11.313 25.454 45.252
0.1613 0.06 0.1013 0
Sub-acoustic velocity
0.139 0.554 1.247 2.217 3.464 6.789 13.856 31.175 55.423
0.1813 0.08 0.1013 0
Sub-acoustic velocity
0.160 0.640 1.440 2.560 4.000 7.840 15.999 35.998 63.996
0.2013 0.1 0.1013 0
Acoustic velocity
0.179 0.716 1.610 2.862 4.472 8.765 17.888 40.248 71.552
0.3013 0.2 0.1013 0
Acoustic velocity
0.268 1.071 2.410 4.284 6.694 13.119 26.774 60.242 107.096
0.4013 0.3 0.1013 0
Acoustic velocity
0.357 1.426 3.209 5.706 8.915 17.474 35.660 80.236 142.641
0.5013 0.4 0.1013 0
Acoustic velocity
0.445 1.782 4.009 7.127 11.137 21.828 44.547 100.230 178.186
0.6013 0.5 0.1013 0
Acoustic velocity
0.534 2.137 4.809 8.549 13.358 26.182 53.433 120.224 213.731
Integrated Display Type Digital Flow Sensor FM-200 SERIES
778
FIBER
SENSORS
LASER
SENSORS
PHOTO-
ELECTRIC
SENSORS
MICRO
PHOTO-
ELECTRIC
SENSORS
AREA
SENSORS
SAFETY LIGHT
CURTAINS /
SAFETY
COMPONENTS
PRESSURE /
FLOW
SENSORS
INDUCTIVE
PROXIMITY
SENSORS
PARTICULAR
USE
SENSORS
SENSOR
OPTIONS
SIMPLE
WIRE-SAVING
UNITS
WIRE-SAVING
SYSTEMS
MEASURE-
MENT
SENSORS
STATIC
CONTROL
DEVICES
LASER
MARKERS
PLC
HUMAN
MACHINE
INTERFACES
ENERGY
MANAGEMENT
SOLUTIONS
FA
COMPONENTS
MACHINE
VISION
SYSTEMS
UV
CURING
SYSTEMS
Selection
Guide
Pressure/
Digital Display
Pressure/
Head-separated
Flow
FM-200
MS-FM2-1 Sensor mounting bracket (Optional) MS-FM2-2 Sensor mounting bracket (Optional)
R1.75 R0.069
2-ø3.5
2-ø0.138
15.5
0.610
5
0.197
t
1 t
0.039
14.5
0.571
3.5
0.138
18.5
0.278
6 0.236
30 1.181
55 0.217
27
1.063
9.5
0.374
4
0.157
8.4 0.331
17 0.609
R1.75 R0.069
2-ø3.5
2-ø0.138
13
0.512
40
1.575
6
0.236
30 1.181
65 2.559
t
1 t
0.039
5
0.197
50
1.969
30
1.181
3.5
0.138
Rc
1/2
female thread
(Note)
15
0.591
30
1.181
30
1.181
13
0.512
50
1.969
1.5
0.059
30
1.181
80
3.150
2-M3, 5 0.197 deep
37
1.457
( )
Material: Cold rolled carbon steel (SPCC)(Nickel plated)
Two M3 (length 6 mm 0.236 in) screws with washers are attached.
Material: Cold rolled carbon steel (SPCC)(Nickel plated)
Two M3 (length 6 mm 0.236 in) screws with washers are attached.
Assembly dimensions
CN-F15-C1 Connector attached cable (Accessory)
FM-2□-A□(-P)Sensor
Mounting drawing with FM-252-4
Assembly dimensions
Mounting drawing with FM-255-AR2
( )
42
1.654
R1.75
R0.069
6 0.236
30 1.181
80
3.150
65
2.559
20
0.787
25
0.984 30
1.181
40
1.575
55
2.165
35
1.378
1.5
0.059
50
1.969
t
1
t
0.039
5
0.197
20
0.787
( )
R1.75 R0.069
30
1.181
3.5
0.138
14.5
0.571
18.5
0.728
1.5
0.059
42
1.654
27
1.063
5
0.197
13.5
0.531
8.6
0.339
27
1.063 17
0.669
23
0.906
6 0.236
t
1
t
0.039
29.2
1.150
Note: FM-2□-AG2-P has G1/2 female thread.
30 1.181
or less
1,040
40.945
Housing: GHR-05V-S
manufactured by J.S.T. Mfg. Co., Ltd.
Contact: 5-SSHL-002T-P0.2
manufactured by J.S.T. Mfg. Co., Ltd.
Connector cover
Material: EPDM
( )
25
0.984
( )
3.7
0.146
DIMENSIONS (Unit:mm in)The CAD data can be downloaded from our website.
2-ø3.4 ø0.134 thru-hole
2-M3, 5 0.197 deep
ø4 ø0.157 push-in joint
17
0.669
55
2.165
15
0.591
1.5
0.059
37
1.457
3.6
0.142
27
1.063
8.5 0.335
9.5
0.374
15.5
0.610
( )
24.2
0.953
( )
64
2.520
FM-2□-8(-P)Sensor
FM-2□-4(-P)Sensor
2-ø3.4 ø0.134 thru-hole
2-M3, 5 0.197 deep
ø8 ø0.315 push-in joint
17
0.669
55
2.165
15
0.591
1.5
0.059
43
1.693
3.6
0.142
27 1.063
13
0.512
9.5
0.374
15.5
0.616
( )
70.6
2.780
( )
30.2
1.189