Keysight E4981A Capacitance Meter Data Sheet Deinitions and Speciications This document provides speciications and supplemental information for the Keysight Technologies, Inc. E4981A capacitance meter. All speciications apply to the conditions of a 0 C to 45 C temperature range, unless otherwise stated, and 30 minutes after the instrument has been turned on. Deinitions Speciication (spec.): Warranted performance. Specifications include guard bands to account for the expected statistical performance distribution, measurement uncertainties, and changes in performance due to environmental conditions. Supplemental information is intended to provide information that is helpful for using the instrument but that is not guaranteed by the product warranty. Typical (typ.): Describes performance that will be met by a minimum of 80% of all products. It is not guaranteed by the product warranty. Nominal (nom.): A general descriptive term that does not imply a level of performance. Option dependencies The available frequency is defined as follows. E4981A-001: 120 Hz/1 kHz/1 MHz/1 MHz 1%/1 MHz 2% E4981A-002: 120 Hz/1 kHz The information regarding "Frequency 1 MHz/1 MHz 1%/1 MHz 2%" in specifications, supplemental and general information in not valid for the E4981A-002. Basic speciications Measurement parameters - Cp-D, Cp-Q, Cp-Rp, Cp-G - Cs-D, Cs-Q, Cs-Rs where Capacitance value measured using the parallel equivalent circuit model Capacitance value measured using the series equivalent circuit model Dissipation factor Quality factor (inverse of D) Equivalent parallel conductance measured using the parallel equivalent circuit model Rp: Equivalent parallel resistance measured using the parallel equivalent circuit model Rs: Equivalent series resistance measured using the series equivalent circuit model Cp: Cs: D: Q: G: 2 Speciications Measurement Measurement signals Frequency Level Output mode Allowable frequencies 120 Hz 1 kHz 1 MHz 0.98 MHz (1 MHz - 2%) 0.99 MHz (1 MHz - 1%) 1.01 MHz (1 MHz + 1%) 1.02 MHz (1 MHz + 2%) Accuracy 0.02% Range 0.1 V to 1 V Resolution 0.01 V Accuracy 5% Continuous or Synchronous Source delay time1 Range 0 to 1 s Resolution 0.1 ms 1. Source delay time is effective when output mode is set to Synchronous mode. 3 Measurement cable lengths: 0 m, 1 m, 2 m Measurement time selection: 5 speeds measurement time mode N = 1, 2, 4, 6, 8 For information on the measurement time in each mode, refer to Table 15 "Measurement time." Measurement range selection: Auto, Hold Measurement range: Measurement signal frequency: 120 Hz 10 nF 220 nF 4.7 F 100 F 22 nF 470 nF 10 F 220 F 47 nF 1 F 22 F 470 F 100 nF 2.2 F 47 F 1 mF Measurement signal frequency: 1 kHz 100 pF 2.2 nF 47 nF 1 F 22 F 220 pF 4.7 nF 100 nF 2.2 F 47 F 470 pF 10 nF 220 nF 4.7 F 100 F 1 nF 22 nF 470 nF 10 F Measurement signal frequency: 1 MHz / 1 MHz 1% / 1 MHz 2% 1 pF 22 pF 470 pF 2.2 pF 47 pF 1 nF 4.7 pF 100 pF 10 pF 220 pF For information on measurable range in each measurement mode, refer to "Available measurement ranges" (Tables 2 through 4). Averaging: Range 1 to 256 measurements Resolution 1 4 Trigger mode: Trigger delay time: Measurement display ranges Internal trigger (Int), Manual trigger (Man), External trigger (Ext), GPIB/USB/LAN trigger (Bus) Range 0 to 1 s Resolution 0.1 ms Table 1 shows the range of the measured value that can be displayed on the screen. Table 1. Allowable measured value display range Parameter Measurement display range Cs, Cp 1.000000 aF to 999.9999 EF D 0.000001 to 9.999999 Q 0.01 to 99999.99 Rs, Rp 1.000000 a to 999.9999 E G 1.000000 aS to 999.9999 ES % a: 1 x 0.0001 % to 999.9999 % 10-18, E: 1 x 1018 5 Available measurement ranges Tables 2 through 4 show recommended measurement ranges (recommended for accurate measurement) and significant measurement ranges (ranges that do not cause overload) for each measurement value under the condition D (dissipation factor) 0.5. Table 2. Measurable capacitance ranges when measurement frequency is 120 Hz Measurement range setting Recommended measurement range Signiicant measurement range 10 nF 0 F to 15 nF 0 F to 15 nF 22 nF 15 nF to 33 nF 0 F to 33 nF 47 nF 33 nF to 68 nF 0 F to 68 nF 100 nF 68 nF to 150 nF 0 F to 150 nF 220 nF 150 nF to 330 nF 0 F to 330 nF 470 nF 330 nF to 680 nF 0 F to 680 nF 1 F 680 nF to 1.5F 0 F to 1.5 F 2.2 F 1.5 F to 3.3 F 0 F to 3.3 F 4.7 F 3.3 F to 6.8 F 0 F to 6.8 F 10 F 6.8 F to 15 F 0 F to 15 F 22 F 15 F to 33 F 0 F to 33 F 47 F 33 F to 68 F 0 F to 68 F 100 F 68 F to 150 F 0 F to 150 F 220 F 150 F to 330 F 0 F to 330 F 470 F 330 F to 680 F 0 F to 680 F 1 mF 680 F to 2 mF 0 F to 2 mF 6 Available measurement ranges (continued) Table 3. Measurable capacitance ranges when measurement frequency is 1 kHz Measurement range setting Recommended measurement range Signiicant measurement range 100 pF 0 pF to 150 pF 0 F to 150 pF 220 pF 150 pF to 330 pF 0 F to 330 pF 470 pF 330 pF to 680 pF 0 F to 680 pF 1 nF 680 pF to 1.5 nF 0 F to 1.5 nF 2.2 nF 1.5 nF to 3.3 nF 0 F to 3.3 nF 4.7 nF 3.3 nF to 6.8 nF 0 F to 6.8 nF 10 nF 6.8 nF to 15 nF 0 F to 15 nF 22 nF 15 nF to 33 nF 0 F to 33 nF 47 nF 33 nF to 68 nF 0 F to 68 nF 100 nF 68 nF to 150 nF 0 F to 150 nF 220 nF 150 nF to 330 nF 0 F to 330 nF 470 nF 330 nF to 680 nF 0 F to 680 nF 1 F 680 nF to 1.5 F 0 F to 1.5 F 2.2 F 1.5 F to 3.3F 0 F to 3.3 F 4.7 F 3.3 F to 6.8 F 0 F to 6.8 F 10 F 6.8 F to 15 F 0 F to 15 F 22 F 15 F to 33 F 0 F to 33 F 47 F 33 F to 68 F 0 F to 68 F 100 F 68 F to 200 F 0 F to 200 F 7 Available measurement ranges (continued) Table 4. Measurable capacitance ranges when measurement frequency is 1 MHz, 1 MHz 1%, 1 MHz 2% Measurement range setting Recommended measurement range Signiicant measurement range 1 pF 0 F to 1.5 pF 0 F to 1.5 pF 2.2 pF 1.5 pF to 3.3 pF 0 F to 3.3 pF 4.7 pF 3.3 pF to 6.8 pF 0 F to 6.8 pF 10 pF 6.8 pF to 15 pF 0 F to 15 pF 22 pF 15 pF to 33 pF 0 F to 33 pF 47 pF 33 pF to 68 pF 0 F to 68 pF 100 pF 68 pF to 150 pF 0 F to 150 pF 220 pF 150 pF to 330 pF 0 F to 330 pF 470 pF 330 pF to 680 pF 0 F to 680 pF 1 nF 680 pF to 1.5 nF 0 F to 1.5 nF 8 Measurement accuracy The measurement accuracy is defined when all of the following conditions are met: - Warm-up time: 30 minutes or longer - Ambient temperature: 18 C to 28 C - Execution of OPEN Correction - Execution of Cable Correction for 1 MHz measurement - Measurement cable length: 0 m, 1 m, or 2 m (16048A/B/D)1 - D (dissipation factor) 0.5 Accuracy of Cp, Cs, D, G, Rs, Q and Rp Tables 8 through 13 show the measurement accuracy of Cp, Cs, and D when D 0.1. Table 14 shows the formula of the measurement accuracy of G, Rs, Q and Rn when D 0.1. When 0.1 < D 0.5, multiply the accuracy obtained in Tables 8 through 13 by the coefficient in Table 5. Table 5. Dissipation factor Coeficient Coeficient Parameter Cp, Cs, G, Rs2 1 + D2 D 1+D Table 6. Formula of the measurement accuracy of G, Rs, Q and Rp Parameter Formula Ge (G accuracy) (Ce/100) x 2 x x f x Cx Rse (Rs accuracy) (Ce/100) / (2 x x f x Cx) Qx2 x De Qe (Q accuracy) 1 + Qx x De Rpx2 x Ge Rpe (Rp accuracy) Ce: f: Cx: Qx: Rpx: De: 1 + Rpx x Ge Cp or Cs accuracy [%] Measurement frequency [Hz] Measurement value of Cp or Cs [F] Measurement value of Q Measurement value of Rp [] D accuracy [%] 1. The outer conductor resistance of cable requires the following condition. 16048A/B: 62 m or below 16048D: 90 m or below 2. If you select a secondary measurement parameter other than D, calculate D. 9 Accuracy when ambient temperature exceeds the range of 18 C to 28 C (typical) When the ambient temperature exceeds the range of 18 C to 28 C, multiply the accuracy obtained above by the coefficient shown in the table below. Table 7. Temparature Coeficient Coeficient Accuracy when an Alternative Current magnetic ield is applied 0 C ambient temperature < 8 C 3 8 C ambient temperature < 18 C 2 18 C ambient temperature 28 C 1 28 C ambient temperature 38 C 2 38 C ambient temperature 45 C 3 When an alternating current magnetic field is applied to the instrument. Multiply the accuracy obtained in Tables 8 through 13. 1+B x (2+0.5 x K) B: Magnetic flux density [Gauss] Cx: Measured value of the capacitance (Cp or Cs), Cr: A measurement range [F] Vs: A measurement signal level [V]. In Tables 8 through 13, K is defined as follows: Cx Cr: K = (1/Vs) x (Cr/Cx) Cx > Cr: K = 1/Vs where Cx is measured value of the capacitance (Cp or Cs), Cr is a measurement range and Vs is a measurement signal level [V]. 10 Measurement accuracy (continued) Table 8. Measurement accuracy of Cp, Cs (measurement frequency: 120 Hz) Cp, Cs [%] Measurement time mode (N) 1 2 4 6 8 10 nF 22 nF 47 nF 100 nF 220 nF 470 nF 1 F 2.2 F 4.7 F 10 F 22 F 47 F 100 F 0.055 + 0.030 x K 0.055 + 0.022 x K 0.055 + 0.018 x K 0.055 + 0.016 x K 0.055 + 0.015 x K 220 F 470 F 1 mF 0.4 + 0.060 x K 0.4 + 0.044 x K 0.4 + 0.036 x K 0.4 + 0.032 x K 0.4 + 0.030 x K Table 9. Measurement accuracy of D (measurement frequency: 120 Hz) D Measurement time mode (N) 1 2 4 10 nF 22 nF 47 nF 100 nF 220 nF 470 nF 1 F 2.2 F 4.7 F 10 F 22 F 47 F 100 F 0.00035 + 0.00030 x K 0.00035 + 0.00022 x K 0.00035 + 0.00018 x K 0.00035 + 0.00016 x K 0.00035 + 0.00015 x K 220 F 470 F 1 mF 0.004 + 0.00060 x K 0.004 + 0.00044 x K 0.004 + 0.00032 x K 0.004 + 0.00036 x K 11 6 8 0.004 +0.00030 x K Measurement accuracy (continued) Table 10. Measurement accuracy of Cp, Cs (measurement frequency: 1 kHz) Cp, Cs [%] Measurement 1 time mode (N) 2 4 6 8 100 pF 0.055 + 0.070 x K 0.055 + 0.047 x K 0.055 + 0.036 x K 0.055 + 0.033 x K 0.055 + 0.030 x K 220 pF 0.055 + 0.045 x K 0.055 + 0.032 x K 0.055 + 0.025 x K 0.055 + 0.022 x K 0.055 + 0.020 x K 0.055 + 0.030 x K 0.055 + 0.022 x K 0.055 + 0.018 x K 0.055 + 0.016 x K 0.055 + 0.015 x K 0.4 + 0.060 x K 0.4 + 0.044 x K 0.4 + 0.036 x K 0.4 + 0.032 x K 0.4 + 0.030 x K 470 pF 1 nF 2.2 nF 4.7 nF 10 nF 22 nF 47 nF 100 nF 220 nF 470 nF 1 F 2.2 F 4.7 F 10 F 22 F 47 F 100 F Table 11. Measurement accuracy of D (measurement frequency: 1 kHz) D Measurement time mode (N) 1 2 4 100 pF 0.00035 + 0.00070 x K 0.00035 + 0.00047 x K 0.00035 + 0.00036 x K 0.00035 + 0.00033 x K 0.00035 + 0.00030 x K 220 pF 0.00035 + 0.00045 x K 0.00035 + 0.00032 x K 0.00035 + 0.00025 x K 0.00035 + 0.00022 x K 0.00035 + 0.00020 x K 0.00035 + 0.00030 x K 0.00035 + 0.00022 x K 0.00035 + 0.00018 x K 0.00035 + 0.00016 x K 0.00035 + 0.00015 x K 0.004 + 0.00060 x K 0.004 + 0.00044 x K 0.004 + 0.00036 x K 0.004 + 0.00030 x K 470 pF 1 nF 2.2 nF 4.7 nF 10 nF 22 nF 47 nF 100 nF 220 nF 470 nF 1 F 2.2 F 4.7 F 10 F 22 F 47 F 100 F 12 6 0.004 + 0.00032 x K 8 Measurement accuracy (continued) Table 12. Measurement accuracy of Cp, Cs (measurement frequency: 1 MHz, 1 MHz 1%, 1 MHz 2%) Cp, Cs [%] Measurement time mode (N) 1 2 4 6 8 1 pF 0.055 + 0.070 x K 0.055 + 0.047 x K 0.055 + 0.036 x K 0.055 + 0.033 x K 0.055 + 0.030 x K 2.2 pF 0.055 + 0.045 x K 0.055 + 0.032 x K 0.055 + 0.025 x K 0.055 + 0.022 x K 0.055 + 0.020 x K 0.055 + 0.030 x K 0.055 + 0.022 x K 0.055 + 0.018 x K 0.055 + 0.016 x K 0.0 55 + 0.015 x K 4.7 pF 10 pF 22 pF 47 pF 100 pF 220 pF 470 pF 1 nF Table 13. Measurement accuracy of D (measurement frequency: 1 MHz, 1 MHz 1%, 1 MHz 2%) D Measurement time mode (N) 1 1 pF 2.2 pF 4.7 pF 10 pF 22 pF 47 pF 100 pF 220 pF 470 pF 1 nF 2 4 6 8 0.00035 + 0.00070 x K 0.00035 + 0.00047 x K 0.00035 + 0.00036 x K 0.00035 + 0.00033 x K 0.00035 + 0.00030 x K 0.00035 + 0.00045 x K 0.00035 + 0.00032 x K 0.00035 + 0.00025 x K 0.00035 + 0.00022 x K 0.00035 + 0.00020 x K 0.00035 + 0.00030 x K 0.00035 + 0.00022 x K 0.00035 + 0.00018 x K 0.00035 + 0.00016 x K 0.00035 + 0.00015 x K 13 0.001 0.0009 0.0008 0.0007 Accuracy (D) N=1 0.0006 N=4 N=8 0.0005 0.0004 0.0003 0.0002 0.0001 0 1.0E-9 1.0E-8 1.0E-7 1.0E-6 1.0E-5 1.0E-4 1.0E-3 Measurement value (Cp, Cs) [F] Figure 1. Accuracy of D when measurement frequency is 120 Hz (measurement range: 10 nF to 100 F / measurement signal level: 0.5 V) 0.2 0.18 0.16 Accuracy (Cp, Cs) [%] 0.14 0.12 N=1 0.1 N=4 N=8 0.08 0.06 0.04 0.02 0 1.0E-9 1.0E-8 1.0E-7 1.0E-6 1.0E-5 Measurement value (Cp, Cs) [F] Figure 2. Accuracy of Cp and Cs when measurement frequency is 120 Hz (measurement range: 10 nF to 100 F / measurement signal level: 0.5 V) 14 1.0E-4 1.0E-3 0.005 0.0049 0.0048 Accuracy (D) 0.0047 0.0046 N=1 0.0045 0.0044 N=4 0.0043 N=8 0.0042 0.0001 0.001 0.01 Measurement value (Cp, Cs) [F] Figure 3. Accuracy of D when measurement frequency is 120 Hz (measurement range: 220 F to 1 mF / measurement signal level: 1 V) Accuracy of Cp and Cs when measurement frequency is 120 Hz (measurement signal level: 0.5 V) 0.7 0.6 N=1 Accuracy (Cp, Cs) [%] 0.5 N=4 N=8 0.4 0.3 0.2 0.1 0 0.0001 0.001 Measurement value (Cp, Cs) [F] Figure 4. Accuracy of Cp and Cs when measurement frequency is 120 Hz (measurement range: 220 F to 1 mF / measurement signal level: 1 V) 15 0.01 0.002 0.0018 0.0016 Accuracy (D) 0.0014 0.0012 0.001 0.0008 N=1 0.0006 N=4 N=8 0.0004 0.0002 0 1.0E-11 1.0E-10 1.0E-9 1.0E-8 1.0E-7 1.0E-6 1.0E-5 1.0E-4 Measurement value (Cp, Cs) [F] Figure 5. Accuracy of D when measurement frequency is 1 kHz (measurement range: 100 pF to 10 F / measurement signal level: 1 V) 0.25 Accuracy (Cp, Cs) [%] 0.2 0.15 0.1 N=1 N=4 N=8 0.05 0 1.0E-11 1.0E-10 1.0E-9 1.0E-8 1.0E-7 1.0E-6 Measurement value (Cp, Cs) [F] Figure 6. Accuracy of Cp and Cs when measurement frequency is 1 kHz (measurement range: 100 pF to 10 F / measurement signal level: 1 V) 16 1.0E-5 1.0E-4 0.005 0.0049 0.0048 Accuracy (D) 0.0047 N=1 0.0046 0.0045 0.0044 N=4 N=8 0.0043 0.0042 0.00001 0.0001 0.001 Measurement value (Cp, Cs) [F] Figure 7. Accuracy of D when measurement frequency is 1 kHz (measurement range: 22 F to 100 F / measurement signal level: 1 V) 0.5 0.49 Accuracy (Cp, Cs) [%] 0.48 0.47 N=1 0.46 0.45 0.44 N=4 N=8 0.43 0.42 0.00001 0.0001 Measurement value (Cp, Cs) [F] Figure 8. Accuracy of Cp and Cs when measurement frequency is 1 kHz (measurement range: 22 F to 100 F / measurement signal level: 1 V) 17 0.001 0.25 Accuracy (Cp, Cs) [%] 0.2 0.15 0.1 N=1 N=4 N=8 0.05 0 1.0E-13 1.0E-12 1.0E-11 1.0E-10 1.0E-9 1.0E-8 Measurement value (Cp, Cs) [F] Figure 9. Accuracy of Cp and Cs when measurement frequency is 1 MHz (measurement signal level: 1 V) 0.002 0.0018 0.0016 Accuracy (D) 0.0014 0.0012 0.001 0.0008 N=1 0.0006 N=4 N=8 0.0004 0.0002 0 1.0E-13 1.0E-12 1.0E-11 1.0E-10 1.0E-9 Measurement value (Cp, Cs) [F] Figure 10. Accuracy of D when measurement frequency is 1 MHz (measurement signal level: 1 V) Sample calculation of measurement accuracy is described on page 31. 18 1.0E-8 Supplemental Information Measurement signals Frequency: 120 Hz SLC OFF ( 220 F range) SLC ON ( 220 F range) 2.2 F to 100 F range 10 nF to 1 F range 1.5 (nom.)1 0.3 (nom.)1 0.3 (nom.)1 20 (nom.)1 Frequency: 1 kHz SLC OFF ( 22 F range) SLC ON ( 22 F range) 220 nF to 10 F range 100 pF to 100 nF range 1.5 (nom.)1 0.5 (nom.)1 0.3 (nom.)1 20 (nom.)1 Output impedance 20 (nom.)1 Frequency: 1 MHz / 1 MHz 2% / 1 MHz 1% Measurement time T3 T1 T2 E X T _T R IG /IN D E X /EOM /READY FOR_TRIG Figure 11. Timing chart and measurement time 1. This value is defined without an extension cable. 19 T4 T5 Table 14 shows the values of T1 - T5 when the following conditions are met: - Display update: Off - Synchronous source: On - Measurement range mode: Hold range mode (Hold) - Source delay time: 0 ms - Trigger delay time: 0 ms - Averaging factor: 1 - SLC: Off - Measurement time mode (N): 1 - Correction: On - Multi connection: On - LAN: Not connected Table 14. Values of T1 - T5 (typical) Measurement frequency Minimum value Typical value T1 Trigger pulse width N/A 1 s - N/A - 40 s 120 Hz 1 kHz 1 MHz - - - 10.0 ms 2.0 ms 1.3 ms N/A - 1.0 ms N/A 0 Sec - T2 Trigger response time of /READY_FOR_TRIG, /INDEX and /EOM (T3 + T4) T3 Measurement time Analog measurement time (T3 + T4) T4 Measurement time Measurement computation time T5 Trigger wait time 20 Display time Except in the case of the DISPLAY BLANK page, the time required to update the display on each page (display time) is as follows (Table 15). When the screen is changed, drawing time and switching time are added. The measurement display is updated about every 100 ms. Table 15. Display time Item Time MEAS DISPLAY page drawing time 10 ms MEAS DISPLAY page (large) drawing time 10 ms BIN No. DISPLAY page drawing time 10 ms BIN COUNT DISPLAY page drawing time 10 ms Measurement display switching time 35 ms Table 16 shows the measurement time (T3 + T4) for each measurement time mode. Measurement time Table 16. Measurement time Frequency Measurement time [ms] 120 Hz (N x 8.3 x Ave + 2.7) 0.5 1 kHz (N x 1.0 x Ave + 2.0) 0.5 1 MHz / 1 MHz 1% / 1 MHz 2% (N x 1.0 x (100/(100 + Fshift)) x Ave + 1.3) 0.5 Measurement time mode (N) = 1, 2, 4, 6, 8 Ave: Averaging factor Fshift: Frequency shift setting 21 Measurement data transfer time Table 17 shows the measurement data transfer time under the following conditions. The measurement transfer time varies with the measurement conditions and computer used. - Host computer: DELL PRECISION 390, 1.86 GHz/Windows XP - USB GPIB Interface Card: 82350A - USB GPIB Interface: E2078A - Display: ON - Measurement range mode: Hold range mode (Hold) - OPEN/SHORT/LOAD correction: OFF - Measurement signal monitor: OFF - BIN count function: OFF Table 17. Measurement data transfer time (typical) Interface GPIB USB LAN Data transfer format using :FETC? command (one point measurement) using :READ command (one point measurement) using data buffer memory (1000 measurement points (BUFFER3)) Comparator ON [ms] Comparator OFF [ms] Comparator ON [ms] Comparator OFF [ms] Comparator ON [ms] Comparator OFF [ms] ASCII 1 1 3 3 202 186 ASCII Long 1 1 3 3 247 231 Binary 1 1 3 4 145 111 ASCII 1 1 4 4 101 94 ASCII Long 1 1 4 4 121 114 Binary 1 1 4 4 43 33 ASCII 3 3 5 5 158 146 ASCII Long 3 3 6 6 193 181 Binary 5 5 7 7 105 79 22 Measurement Assistance Functions Measurement assistance functions Correction function - OPEN/SHORT/LOAD Correction are available - The OFFSET Correction is available MULTI Correction function - OPEN/SHORT/LOAD Correction for 256 channels - The LOAD Correction standard value can be defined for each channel Cable Correction funtion Cable Correction is available Deviation measurement function Deviation from reference value and percentage of deviation from the reference value can be outputted as the result Comparator function - BIN sort: The primary parameter can be sorted into 9 BINs, OUT_OF_BINS, AUX_BIN, and LOWC_OR_NC. The secondary parameter can be sorted into High, In, and Low. - Limit setup: An absolute value, deviation value, and % deviation value can be used for setup - Bin count: Countable from 0 to 999999 Low C reject function Extremely low measured capacitance values can be automatically detected as measurement errors Contact check function The contact check function is available on 120 Hz and 1 kHz Single Level Compensation - SLC function compensates the voltage drop by the resistance inside the E4981A and the extension cable under the following frequencies and ranges - Measurement cable: 16048A or 16048D - When the measurement frequency is 120 Hz: 220 F range, 470 F range, 1 mF range - When the measurement frequency is 1 kHz: 22 F range, 47 F range, 100 F range Signal Level Error (120 Hz) 10 D=0 D=0.2 5 D=0.5 0 -5 V err [%] SLC:ON -10 -15 SLC:OFF -20 -25 -30 1 10 100 Cdut [uF] 10000 Signal Level Error (1 kHz) 10 D=0 D=0.2 5 D=0.5 0 Verr [%] -5 SLC:ON -10 -15 SLC:OFF -20 -25 -30 0.1 1 10 Cdut [uF] 23 100 1000 Measurement assistance functions Measurement signal level monitor function - Measurement voltage and measurement current can be monitored - Level monitor accuracy (typical): (3% + 1 mV) Data buffer function Up to 1000 measurement results can be read out in batch Save/recall function - Up to 10 setup conditions can be written to/read from the built-in nonvolatile memory - Up to 10 setup conditions can be written to/read from the external USB memory - Auto recall function can be performed when the setting conditions are written to Register 9 in the built-in non-volatile memory Key lock function The front panel keys can be locked GPIB interface Complies with IEEE488.1, 2 and SCPI USB host port Universal serial bus jack, type-A (4 contact positions, contact 1 is on your left); female; for connection to USB memory device only Note: The following USB memory can be used. - Complies with USB 1.1; mass storage class, FAT16/FAT32 format; maximum consumption current is below 500 mA - Recommended USB memory: 4 GB USB Flash memory (Keysight PN 1819-0637) - Use the prepared USB memory device exclusively for the E4981A; otherwise, other previously saved data may be cleared. If you use a USB memory other than the recommended device, data may not be saved or recalled normally. - Keysight will NOT be responsible for data loss in the USB memory caused by using the E4981A USB interface port - Universal serial bus jack, type mini-B (4 contact positions); complies with USBTMC-USB488 and USB 2.0; female; for connection to the external controller. - USBTMC: Abbreviation for USB Test & Measurement Class LAN interface - 10/100 BaseT Ethernet, 8 pins; two speed options - Compliant with LXI standard (LAN eXtensions for Instrumentation): Version 1.2, Class C - Auto MDIX Handler interface The input/output signals are negative logic and optically isolated open collector signals - Output signal: Bin1-Bin9, Out of Bins, Aux Bin, P-Hi, P-Lo, S-Reject, INDEX, EOM, Alarm, OVLD, Low C Reject or No Contact, Ready_For_Trigger - Input signal: Keylock, Ext-Trigger Scanner interface The input/output signals are negative logic and optically isolated open collector signals - Output signal: INDEX, EOM - Input signal: Ch0 - Ch7, Ch valid, Ext-Trigger Measurement circuit protection The maximum discharge withstand voltage, where the internal circuit remains protected if a charged capacitor is connected to the UNKNOWN terminal, is illustrated below. NOTE: Discharge capacitors before connecting them to the UNKNOWN terminal or a test fixture. Table 18. Maximum discharge withstand voltage (typical) Maximum discharge withstand voltage Range of capacitance value C of DUT 1000 V C < 2 F 2/C V C 2 F 24 1200 1000 Voltage [V] 800 600 400 200 0 1p 10 p 100 p 1n 10 n 100 n Capacitance [F] Figure 13. Maximum discharge withstand voltage (typical) 25 1 10 100 General Speciications Power source Voltage 90 VAC to 264 VAC Frequency 47 Hz to 63 Hz Power consumption Maximum 150 VA Operating environment Temperature 0 C to 45 C Humidity ( 40 C, no condensation) 15% to 85% RH Altitude 0 m to 2000 m Storage environment Temperature -20 C to 70 C Humidity ( 65 C, no condensation) 0% to 90% RH Altitude 0 m to 4572 m Other Weight 4.3 kg (nominal) Display LCD, 320 x 240 (pixel), RGB color Outer dimensions 370 (width) x 105 (height) x 405 (depth) mm (nominal) 26 367.43 338.57 14.43 14.43 27.28 55.01 103.76 27.53 40.1 55.15 27 22 22 22 40.1 Figure 14. Dimensions (front view, with handle and bumper, in millimeters, nominal) 319.08 17.99 87.72 21.79 32.02 55.15 27 22 22 22 30.3 Figure 15. Dimensions (front view, without handle and bumper, in millimeters, nominal) 367.43 332.17 17.63 71.03 17.63 10.39 113.85 15.5 31 41.67 39.38 42.64 58.1 40.43 41.65 37.65 101.58 36.72 28.05 52.35 70.07 24.75 Figure 16. Dimensions (rear view, with handle and bumper, in millimeters, nominal) 27 319.08 71.03 10.37 107.38 15.5 31 41.62 30.1 36.04 51.54 31.24 32.87 28.37 88.28 32.71 24.04 47.44 63.47 24.8 Figure 17. Dimensions (rear view, without handle and bumper, in millimeters, nominal) 55.03 101.58 103.78 401.95 141 .49 79.76 Figure 18. Dimensions (side view, with handle and bumper, in millimeters, nominal) 373.96 347.85 10.45 45.72 21.91 84.43 88.28 21.92 15.65 19.72 50.9 Figure 19. Dimensions (side view, without handle and bumper, in millimeters, nominal) 28 EMC European Council Directive 2004/108/EC IEC 61326-1:1997 +A1:1998 +A2:2000 EN 61326-1:1997 +A1:1998 +A2:2001 CISPR 11:1997 +A1:1999 +A2:2002 EN 55011:1998 +A1:1999 +A2:2002 Group 1, Class A IEC 61000-4-2:1995 +A1:1998 +A2:2001 EN 61000-4-2:1995 +A1:1998 +A2:2001 4 kV CD / 8 kV AD IEC 61000-4-3:1995 +A1:1998 +A2:2001 EN 61000-4-3:1996 +A1:1998 +A2:2001 3 V/m, 80-1000 MHz, 80% AM IEC 61000-4-4:1995 +A1:2001 +A2:2001 EN 61000-4-4:1995 +A1:2001 +A2:2001 1 kV power / 0.5 kV Signal IEC 61000-4-5:1995 +A1:2001 EN 61000-4-5:1995 +A1:2001 0.5 kV Normal / 1 kV Common IEC 61000-4-6:1996 +A1:2001 EN 61000-4-6:1996 +A1:2001 3 V, 0.15-80 MHz, 80% AM IEC 61000-4-11:1994 +A1:2001 EN 61000-4-11:1994 +A1:2001 100% 1cycle This ISM device complies with Canadian ICES-001:1998. Cet appareil ISM est conforme a la norme NMB-001 du Canada. AS/NZS 2064.1 Group 1, Class A Safety European Council Directive 73/23/EEC, 93/68/EEC IEC 61010-1:2001 EN 61010-1:2001 Measurement Category I Pollution Degree 2 Indoor Use IEC60825-1:1994 Class 1 LED CAN/CSA C22.2 61010-1-04 Measurement Category I Pollution Degree 2 Indoor Use WEEE European Council Directive 2002/96/EC 29 Sample Calculation of Measurement Accuracy This section describes an example for calculating the measurement accuracy of each measurement parameter, assuming the following measurement conditions Sample - - - - - When measurement parameter is Cp-D (or Cs-D) The following is an example for calculating the accuracy of Cp (or Cs) and D, assuming that measured result of Cp (or Cs) is 8.00000 nF and measured result of D is 0.01000. Measurement signal frequency: 1 kHz Measurement signal level: 0.5 V Measurement range: 10 nF Measurement time mode: N = 1 Ambient temperature: 28 C From Table 7, the equation to calculate the accuracy of Cp (or Cs) is 0.055 + 0.030 x K and the equation to calculate the accuracy of D is 0.00035 + 0.00030 x K The measurement signal level is 0.5, the measurement range is 10 nF, and the measured result of Cp (or Cs) is 8.00000 nF. Therefore, K = (1/0.5) x (10/8.00000) = 2.5 Substitute this result into the equation. As a result, the accuracy of Cp (or Cs) is 0.055 + 0.030 x 2.5 = 0.13% and the accuracy of D is 0.00035 + 0.00030 x 2.5 = 0.0011 Therefore, the true Cp (or Cs) value exists within 8.00000 (8.00000 x 0.13/100) = 8.00000 0.0104 nF that is, 7.9896 nF to 8.0104 nF and the true D value exists within 0.01000 0.0011 that is, 0.0089 to 0.0111 30 When measurement parameter is Cp-Q (or Cs-Q) The following is an example for calculating the accuracy of Cp (or Cs) and Q, assuming that measured result of Cp (or Cs) is 8.00000 nF and measured result of Q is 20.0. The accuracy of Cp (or Cs) is the same as that in the example of Cp-D. From Table 8, the equation to calculate the accuracy of D is 0.00035 + 0.00030 x K Substitute K = 2.5 (same as Cp-D) into this equation. The accuracy of D is 0.00035 + 0.00030 x 2.5 = 0.0011 Then, substitute the obtained D accuracy into Equation 1. The accuracy of Q is (20.0)2 x 0.0011/(1 + 20.0 x 0.0011) = 0.44/(1 + 0.022) that is, -0.43 to 0.45 Therefore, the true Q value exists within the range of 19.57 to 20.45 31 When measurement parameter is Cp-G The following is an example for calculating the accuracy of Cp and G, assuming that measured result of Cp is 8.00000 nF and measured result of G is 1.00000 S. The accuracy of Cp is the same as that in the example of Cp-D. From Table 11, the equation to calculate the accuracy of G is (3.5 + 2.0 x K) x Cx Substitute K = 2.5 (same as Cp-D) and 8.00000 nF of the measured Cp result into this equation. The accuracy of G is (3.5 + 2.0 x 2.5) x 8.00000 = 68 nS (0.068 S) Therefore, the true G value exists within 1.00000 0.068 S that is, 0.932 S to 1.068 S 32 When measurement parameter is Cp-Rp The following is an example for calculating the accuracy of Cp and Rp, assuming that measured result of Cp is 8.00000 nF and measured result of Rp is 2.00000 M. The accuracy of Cp is the same as that in the example of Cp-D. From Table 11 the equation to calculate the accuracy of G is (3.5 + 2.0 x K) x Cx Substitute K = 2.5 (same as Cp-D) and 8.00000 nF of the measured Cp result into this equation. The accuracy of G is (3.5 + 2.0 x 2.5) x 8.00000 = 68 nS Then, substitute the obtained G accuracy into Equation 2. The accuracy of Rp is (2 x 106)2 x 68 x 10-9/(1 + 2 x 106 x 68 x 10-9) = 0.272 x 106/(1 + 0.136) that is, -0.23944 M to 0.31481 M Therefore, the true Rp value exists within 1.76056 M to 2.31481 M 33 When measurement parameter is Cs-Rs The following is an example for calculating the accuracy of Cp and Rs, assuming that measured result of Cs is 8.00000 nF and measured result of Rs is 4.00000 k. Because the Cs accuracy is D = 2 x x Freq x Cs x Rp = 2 x x 103 x 8 x 10-9 x 4 x 103 = 0.2 > 0.1 multiply 0.13% (the result obtained for Cs-D) by 1 + D2. The result is 0.13 x (1 + 0.22) = 0.1352% From Table 11 the equation to calculate the accuracy of Rs is (90 + 50 x K)/Cx Substitute K = 2.5 (same as Cs-D) and 8.00000 nF of the measured Cs result into this equation. The accuracy of G is (90 + 50 x 2.5)/8.00000 = 26.875 Because D > 0.1, multiply the result by 1 + D2 as in the case of Cs. The final result is 27.95 . Therefore, the true Cs value exists within 8.00000 (8.00000 x 0.1352/100) = 8.00000 0.01082 nF that is, 7.98918 nF to 8.01082 nF and the true Rs value exists within 4.00000 0.02795 k that is, 3.97205 to 4.02795 k 34 35 | Keysight | E4981A Capacitance Meter - Data Sheet myKeysight www.keysight.com/find/mykeysight A personalized view into the information most relevant to you. www.axiestandard.org AdvancedTCA(R) Extensions for Instrumentation and Test (AXIe) is an open standard that extends the AdvancedTCA for general purpose and semiconductor test. Keysight is a founding member of the AXIe consortium. 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