ADXRS150ABG-REEl - Analog Devices

±150°/s Single Chip Yaw Rate

Gyro with Signal Conditioning

ADXRS150

FEATURES

Complete rate gyroscope on a single chip

Z-axis (yaw rate) response

High vibration rejection over wide frequency

0.05°/s/√Hz noise

2000 g powered shock operation

Self-test on digital command

Temperature sensor output

Precision voltage reference output

Absolute rate output for precision applications

5 V single-supply operation

Ultrasmall and light (< 0.15 cc, < 0.5 gram)

APPLICATIONS

GPS navigation systems

Vehicle stability control

Inertial measurement units

Guidance and control

Platform stabilization

GENERAL DESCRIPTION

The ADXRS150 is a complete angular rate sensor (gyroscope)

that uses Analog Devices’ surface-micromachining process to

make a functionally complete and low cost angular rate sensor

integrated with all of the required electronics on one chip.

The manufacturing technique for this device is the same high

volume BIMOS process used for high reliability automotive

airbag accelerometers.

The output signal, RATEOUT (1B, 2A), is a voltage proportional

to the angular rate about the axis normal to the top surface of

the package (see Figure 2). A single external resistor can be used

to lower the scale factor. An external capacitor is used to set the

bandwidth. Other external capacitors are required for operation

(see Figure 21).

A precision reference and a temperature output are also pro-

vided for compensation techniques. Two digital self-test inputs

electromechanically excite the sensor to test the operation of

both sensors and the signal conditioning circuits. The

ADXRS150 is available in a 7 mm × 7 mm × 3 mm BGA

surface-mount package.

FUNCTIONAL BLOCK DIAGRAM

7E 6G

PDD

12V

ADXRS150

47nF

22nF

100nF

22nF

CP2 CP1 PGND CP4 CP3 CP5

CHARGE PUMP/REG.

TEMP

PTAT

RATEOUT

2.5V

π DEMOD

RATE

SENSOR

SELF

TEST

100nF 100nF

CMID

AGND

AVCC

ST1

ST2 CORIOLIS SIGNAL CHANNEL

SEN1

SEN2

OUT

SUMJ

OUT

2.5V REF

≈

Ω

35%

≈

Ω

35%

180k

Ω

RESONATOR LOOP

–

Figure 1.

Rev. A

Information furnished by Analog Devices is believed to be accurate and reliable.

However, no responsibility is assumed by Analog Devices for its use, nor for any

infringements of patents or other rights of third parties that may result from its use.

Specifications subject to change without notice. No license is granted by implication

or otherwise under any patent or patent rights of Analog Devices. Trademarks and

registered trademarks are the property of their respective companies.

One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.

Tel: 781.329.4700 www.analog.com

ADXRS150

TABLE OF CONTENTS

ADXRS150—Specifications ............................................................ 3

Absolute Maximum Ratings............................................................ 4

Rate Sensitive Axis........................................................................ 4

Typical Performance Characteristics ............................................. 5

Theory of Operation ........................................................................ 8

Supply and Common Considerations ....................................... 8

Setting Bandwidth........................................................................ 8

Increasing Measurement Range ................................................. 9

Temperature Output and Calibration.........................................9

Using the ADXRS150 with a Supply-Ratiometric ADC ..........9

Null Adjustment ............................................................................9

Self-Test Function .........................................................................9

Continuous Self-Test.....................................................................9

Acceleration Sensitivity ............................................................. 10

Pin Configurations And Functional Descriptions..................... 11

Outline Dimensions....................................................................... 12

REVISION HISTORY

Revision A

1/03—Data Sheet Changed from REV. 0 to REV. A

Edit to Figure 5.................................................................................. 5

Rev. A | Page 2 of 12

ADXRS150

ADXRS150—SPECIFICATIONS

Table 1. @TA = 25°C, VS = 5 V, Bandwidth = 80 Hz (COUT = 0.01 µF), Angular Rate = 0°/s, Unless Otherwise Noted.

ADXRS150ABG

Parameter Conditions Min1 Typ Max1 Unit

SENSITIVITY Clockwise Rotation Is Positive Output

Dynamic Range2 Full-Scale Range over Specifications Range ±150 °/s

Initial @25°C 11.25 12.5 13.75 mV/°/s

Over Temperature3 V

CC = 4.75 V to 5.25 V 11.25 13.75 mV/°/s

Nonlinearity Best Fit Straight Line 0.1 % of FS

Voltage Sensitivity VCC = 4.75 V to 5.25 V 0.7 %/V

NULL

Initial Null 2.50 V

Null Drift over Temperature3 Delta from 25°C ±300 mV

Turn-On Time Power on to ±½°/s of Final 35 ms

Linear Acceleration Effect Any Axis 0.2 °/s/g

Voltage Sensitivity VCC = 4.75 V to 5.25 V 1 °/s/V

NOISE PERFORMANCE

Rate Noise Density @25°C 0.05 °/s/√Hz

FREQUENCY RESPONSE

3 db Bandwidth4 (User Selectable) 22 nF as Comp Cap (See Applications section) 40 Hz

Sensor Resonant Frequency 14 kHz

SELF TEST

ST1 RATEOUT Response5 ST1 Pin from Logic “0” to “1,” –40°C to +85°C –400 –660 –1000 mV

ST2 RATEOUT Response5 ST2 Pin from Logic “0” to “1,” –40°C to +85°C +400 +660 +1000 mV

Logic “1” Input Voltage Standard High Logic Level Definition 3.3 V

Logic “0” Input Voltage Standard Low Logic Level Definition 1.7 V

Input Impedance To Common 50 kΩ

TEMPERATURE SENSOR

VOUT at 298°K 2.50 V

Max Current Load on Pin Source to Common 50 µA

Scale Factor Proportional to Absolute Temperature 8.4 mV/°K

OUTPUT DRIVE CAPABILITY

Output Voltage Swing IOUT = ±100 µA 0.25 VS – 0.25 V

Capacitive Load Drive 1000 pF

2.5 V REFERENCE

Voltage Value 2.45 2.5 2.55 V

Load Drive to Ground Source 200 µA

Load Regulation 0 < IOUT < 200 µA 5.0 mV/mA

Power Supply Rejection 4.75 VS to 5.25 VS 1.0 mV/V

Temperature Drift3 Delta from 25°C 5.0 mV

POWER SUPPLY

Operating Voltage Range 4.75 5.00 5.25 V

Quiescent Supply Current 6.0 8.0 mA

TEMPERATURE RANGE

Specified Performance Grade A –40 +85 °C

1 All min and max specifications are guaranteed. Typical specifications are not tested or guaranteed.

2 Dynamic range is the maximum full-scale measurement range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at

5 V supplies.

3 Specification refers to the maximum extent of this parameter as a worst-case value at TMIN or TMAX.

4 Frequency at which response is 3 dB down from dc response with specified compensation capacitor value. Internal pole forming resistor is 180 kΩ. See Setting Band-

width section.

5 Self-test response varies with temperature. Refer to the Self-Test Function section for details.

Rev. A | Page 3 of 12

ADXRS150

Rev. A | Page 4 of 12

ABSOLUTE MAXIMUM RATINGS

Table 2. ADXRS150 Absolute Maximum Ratings

Parameter Rating

Acceleration (Any Axis, Unpowered, 0.5 ms) 2000 g

Acceleration (Any Axis, Powered, 0.5 ms) 2000 g

+VS –0.3 V to +6.0 V

Output Short-Circuit Duration

(Any Pin to Common) Indefininte

Operating Temperature Range –55°C to +125°C

Storage Temperature –65°C to +150°C

Stresses above those listed under Absolute Maximum Ratings

may cause permanent damage to the device. This is a stress rat-

ing only and functional operation of the device at these or any

other condition s above those indicated in the operational sec-

tion of this specification is not implied. Exposure to absolute

maximum rating conditions for extended periods may affect

device reliability.

Applications requiring more than 200 cycles to MIL-STD-883

Method 1010 Condition B (–55°C to +125°C) require underfill

or other means to achieve this requirement.

Drops onto hard surfaces can cause shocks of greater than

2000 g and exceed the absolute maximum rating of the device.

Care should be exercised in handling to avoid damage.

Rate Sensitive Axis

This is a Z-axis rate-sensing device that is also called a yaw-rate

sensing device. It produces a positive going output voltage for

clockwise rotation about the axis normal to the package top, i.e.,

clockwise when looking down at the package lid.

2.5V

RATE

AXIS

RATEOUT

RATE IN

GND

4.75V

0.25V

LATERAL AXIS

ABCDEFG

A1 1

LONGITUDINAL

AXIS

= 5V

Figure 2. RATEOUT Signal Increases with Clockwise Rotation

ADXRS150

TYPICAL PERFORMANCE CHARACTERISTICS

–0.05 0.05 0.15 0.25

TIME – Sec

RATEOUT – V

4.5

3.0

0.0

0.5

1.5

1.0

2.5

2.0

4.0

3.5

0.00 0.10 0.20

Figure 3. Rate Sensing Start-Up Time

0 1200 2400 3600

TIME – Sec

RATEOUT – V

2.570

2.540

2.545

2.555

2.550

2.565

2.560

600 1800 3000

Figure 4. Null Stability for 1 Hour

–55 –5 45 95

TEMPERATURE – °C

TEMP

– V

3.4

1.8

2.4

2.8

2.6

3.2

3.0

–30 20 70

2.0

2.2

Figure 5. Temperature Sensor Output

0 60 120 180

TIME – Sec

RATEOUT – V

2.570

2.540

2.545

2.555

2.550

2.565

2.560

30 90 150

NO PRIOR WARMUP, 0.6Hz SAMPLING

Figure 6. Null Settling Time

1 100

TIME – Sec

°/s

0.07

0.02

0.01

0.04

0.03

0.06

0.05

Figure 7. Root Allan Variance vs. Averaging Time

TEMPERATURE – °C

V2.5 – V

2.5040

2.5010

2.5020

2.5015

2.5025

2.5035

2.5030

–40 –30 –20 –10 0 10 20 30 40 50 60 70 80

Figure 8. 2.5 V Voltage Reference vs. Temperature

Rev. A | Page 5 of 12

ADXRS150

ADXRS150 @ BW = 40 Hz, Typical Vibration Characteristics, 10 g Flat Band, 20 Hz to 2 kHz

TIME – Sec

RATEOUT – V

2.450

2.470

2.460

2.480

2.500

2.490

0510

PACKAGE LATERAL AXIS (1/60 SEC SAMPLE RATE)

Figure 9. 10 g Random Vibration in Package-Lateral Axis Orientation

TIME – Sec

RATEOUT – V

2.450

2.470

2.460

2.480

2.500

2.490

0510

PACKAGE LONGITUDINAL AXIS (1/60 SEC SAMPLING RATE)

Figure 10. 10 g Random Vibration in Package-Longitudinal Axis Orientation

TIME – Sec

RATEOUT – V

2.450

2.470

2.460

2.480

2.500

2.490

0510

RATE AXIS (1/60 SEC SAMPLING RATE)

Figure 11. 10 g Random Vibration in Rate Axis Orientation

TIME – Sec

RATEOUT – V

2.450

2.470

2.460

2.480

2.500

2.490

0510

PACKAGE LATERAL AXIS (0.5s Average)

Figure 12. 10 g Random Vibration in Package-Lateral Axis Orientation

TIME – Sec

RATEOUT – V

2.450

2.470

2.460

2.480

2.500

2.490

0510

PACKAGE LONGITUDINAL AXIS (0.5s Average)

10g

Figure 13. 10 g Random Vibration in Package-Longitudinal Axis Orientation

TIME – Sec

RATEOUT – V

2.450

2.470

2.460

2.480

2.500

2.490

0510

RATE AXIS (0.5s Average)

10g

Figure 14. 10 g Random Vibration in Rate Axis Orientation

Rev. A | Page 6 of 12

ADXRS150

Rev. A | Page 7 of 12

Behavior under Various Shock Test Conditions

Figure 15. Shock Test 100 g, 5 ms in Lateral Axis (40 Hz)

Figure 16. Hi-g Shock Test in Lateral Axis (40 Hz)

Figure 17. Hi-g Shock in Rate Axis (40 Hz)

Figure 18. Shock Test 100 g, 5 ms in Longitudinal Axis (40 Hz)

Figure 19. Hi-g Shock Test, Lateral Axis, 10× Time Base (40 Hz)

Figure 20. Hi-g Shock, Rate Axis, BW Reduced to 8 Hz

ADXRS150

THEORY OF OPERATION

The ADXRS150 operates on the principle of a resonator gyro.

Two polysilicon sensing structures each contain a dither frame,

which is electrostatically driven to resonance. This produces the

necessary velocity element to produce a Coriolis force during

angular rate. At two of the outer extremes of each frame,

orthogonal to the dither motion, are movable fingers that are

placed between fixed pickoff fingers to form a capacitive pickoff

structure that senses Coriolis motion. The resulting signal is fed

to a series of gain and demodulation stages that produce the

electrical rate signal output. The dual-sensor design rejects

external g-forces and vibration. Fabricating the sensor with the

signal conditioning electronics preserves signal integrity in

noisy environments.

The electrostatic resonator requires 14 V to 16 V for operation.

Since only 5 V is typically available in most applications, a

charge pump is included on-chip. If an external 14 V to 16 V

supply is available, the two capacitors on CP1–CP4 can be omit-

ted and this supply can be connected to CP5 (Pin 7D) with a

100 nF decoupling capacitor in place of the 47 nF.

After the demodulation stage there is a single-pole low-pass

filter consisting of an internal 9 kΩ resistor (RSEN1) and an

external user-supplied capacitor (CMID). A CMID capacitor of

100 nF sets a 400 Hz ±35% low-pass pole and is used to limit

high frequency artifacts before final amplification. Bandwidth

limit capacitor, COUT, sets the pass bandwidth (see Figure 22 and

the Setting Bandwidth section).

AGND

TEMP

ST2

ST1

CP1

CP2

RATEOUT

CP4 PDD

CMID

SUMJ 2.5V

1B 1C 1D 1E 1F

7B 7C 7D 7E 7F

CP5

CP3

100nF

OUT

= 22nF

22nF

AVCC

100nF

PGND

22nF

47nF

NOTE THAT INNER ROWS/COLUMNS OF PINS HAVE BEEN OMITTED

FOR CLARITY BUT SHOULD BE CONNECTED IN THE APPLICATION.

Figure 21. Example Application Circuit (Top View)

Supply and Common Considerations

Only power supplies used for supplying analog circuits are rec-

ommended for powering the ADXRS150. High frequency noise

and transients associated with digital circuit supplies may have

adverse effects on device operation.

Figure 21 shows the recommended connections for the

ADXRS150 where both AVCC and PDD have a separate

decoupling capacitor. These should be placed as close to their

respective pins as possible before routing to the system analog

supply. This will minimize the noise injected by the charge

pump that uses the PDD supply.

It is also recommended to place the charge pump capacitors

connected to the CP1–CP4 pins as close to the part as possible.

These capacitors are used to produce the on-chip high voltage

supply switched at the dither frequency at approximately

14 kHz. Care should be taken to ensure that there is no more

than 50 pF of stray capacitance between CP1–CP4 and ground.

Surface-mount chip capacitors are suitable as long as they are

rated for over 15 V.

SELF

TEST

AVCC

ST1

ST2

ADXRS150

CP2 CP1

PDD

4A 5A 7E 6G

CHARGE

PUMP/REG.

12V

PTAT

7F 6A 7B 7C 7D

47nF

CP4

CP3

CP5

RATE

SENSOR

2G 1F 1D

CORIOLIS

SIGNAL CHANNEL

AGND

CMID

SUMJ

RATE-

OUT

2.5V

3G TEMP

OUT

180k

Ω

RESONATOR LOOP

DEMOD

2.5V REF

≈

Ω±

35%

100nF

22nF

PGND

100nF 100nF C

OUT

SEN1

SEN2

22nF

Figure 22. Block Diagram with External Components

Setting Bandwidth

External capacitors CMID and COUT are used in combination

with on-chip resistors to create two low-pass filters to limit the

bandwidth of the ADXRS150’s rate response. The –3 dB

frequency set by ROUT and COUT is:

(

)

OUTOUTOUT CRπ/f ××

and can be well controlled since ROUT has been trimmed during

manufacturing to be 180 kΩ ±1%. Any external resistor applied

between the RATEOUT (1B, 2A) and SUMJ (1C, 2C) pins will

result in:

(

)( )

EXTEXTOUT RkΩ/RkΩR+

180180

The –3 dB frequency is set by RSEN (the parallel combination

Rev. A | Page 8 of 12

ADXRS150

Rev. A | Page 9 of 12

of RSEN1 and RSEN2) at about 4.5 kΩ nominal, and CMID is less

well controlled since RSEN1 and RSEN2 have been used to trim the

rate sensitivity during manufacturing and have a ±35% toler-

ance. Its primary purpose is to limit the high frequency

demodulation artifacts from saturating the final amplifier stage.

Thus, this pole of nominally 400 Hz @ 0.1 µF need not be

precise. Lower frequency is preferable, but its variability usually

requires it to be about 10 times greater (in order to preserve

phase integrity) than the well-controlled output pole. In general,

both –3 dB filter frequencies should be set as low as possible to

reduce the amplitude of these high frequency artifacts as well as

to reduce the overall system noise.

Increasing Measurement Range

The full-scale measurement range of the ADXRS150 can be

increased by placing an external resistor between the

RATEOUT (1B, 2A) and SUMJ (1C, 2C) pins, which would

parallel the internal ROUT resistor that is factory-trimmed to

180 kΩ. For example, a 330 kΩ external resistor will give

approximately 8.1 mV/°/sec sensitivity and a commensurate

~50% increase in the full-scale range. This is effective for up to a

4× increase in the full-scale range (minimum value of the paral-

lel resistor allowed is 45 kΩ). Beyond this amount of external

sensitivity reduction, the internal circuitry headroom require-

ments prevent further increase in the linear full-scale output

range. The drawbacks of modifying the full-scale range are the

additional output null drift (as much as 2°/sec over tempera-

ture) and the readjustment of the initial null bias (see the Null

Adjust section).

Temperature Output and Calibration

It is common practice to temperature-calibrate gyros to

improve their overall accuracy. The ADXRS150 has a tempera-

ture-proportional voltage output that provides input to such a

calibration method. The voltage at TEMP (3F, 3G) is nominally

2.5 V at 27°C and has a PTAT (proportional to absolute tem-

perature) characteristic of 8.4 mV/°C. Note that the TEMP

output circuitry is limited to 50 µA source current.

Using a 3-point calibration technique, it is possible to calibrate

the ADXRS150’s null and sensitivity drift to an overall accuracy

of nearly 300°/hour. An overall accuracy of 70°/hour or better

is possible using more points. Limiting the bandwidth of the

device reduces the flat-band noise during the calibration

process, improving the measurement accuracy at each

calibration point.

Using the ADXRS150 with a Supply-

Ratiometric ADC

The ADXRS150’s RATEOUT signal is nonratiometric, i.e., nei-

ther the null voltage nor the rate sensitivity is proportional to

the supply. Instead they are nominally constant for dc supply

changes within the 4.75 V to 5.25 V operating range. If the

ADXRS150 is used with a supply-ratiometric ADC, the

ADXRS150’s 2.5 V output can be converted and used to make

corrections in software for the supply variations.

Null Adjustment

Null adjustment is possible by injecting a suitable current to

SUMJ (1C, 2C). Adding a suitable resistor to either ground or

the positive supply is a simple way of achieving this. The nomi-

nal 2.5 V null is for a symmetrical swing range at RATEOUT

(1B, 2A). However, a nonsymmetric output swing may be suit-

able in some applications. Note that if a resistor is connected to

the positive supply, supply disturbances may reflect some null

instability. Digital supply noise should be avoided particularly in

this case (see Supply and Common Considerations section).

The resistor value to use is approximately:

)V – )/(V( R NULL1NULL0NULL 00018052 , .

VNULL0 is the unadjusted zero rate output, and VNULL1 is the target

null value. If the initial value is below the desired value, the

resistor should terminate on common or ground. If it is above

the desired value, the resistor should terminate on the 5 V sup-

ply. Values typically are in the 1 MΩ to 5 MΩ range.

If an external resistor is used across RATEOUT and SUMJ, then

the parallel equivalent value is substituted into the above equa-

tion. Note that the resistor value is an estimate since it assumes

VCC = 5.0 V and VSUMJ = 2.5 V.

Self-Test Function

The ADXRS150 includes a self-test feature that actuates each of

the sensing structures and associated electronics in the same

manner as if subjected to angular rate. It is activated by standard

logic high levels applied to inputs ST1 (5F, 5G), ST2 (4F, 4G), or

both. ST1 will cause the voltage at RATEOUT to change about

–0.66 V and ST2 will cause an opposite change of +0.66 V. The

self-test response follows the viscosity temperature dependence

of the package atmosphere, approximately 0.25%/°C.

Activating both ST1 and ST2 simultaneously is not damaging.

Since ST1 and ST2 are not necessarily closely matched, actuat-

ing both simultaneously may result in an apparent null

bias shift.

Continuous Self-Test

The one-chip integration of the ADXRS150 gives it higher reli-

ability than is obtainable with any other high volume manufac-

turing method. Also, it is manufactured under a mature BIMOS

process that has field-proven reliability. As an additional failure

detection measure, power-on self-test can be performed. How-

ever, some applications may warrant continuous self-test while

ADXRS150

Rev. A | Page 10 of 12

sensing rate. Application notes outlining continuous self-test

techniques are also available on the Analog Devices website.

Acceleration Sensitivity

The sign convention used is that lateral acceleration is positive

in the direction from Pin Column A to Pin Column G of the

package. That is, a device has positive sensitivity if its voltage

output increases when the row of Pins 2A–6A are tipped under

the row of Pins 2G–6G in the earth’s gravity.

There are two effects of concern, shifts in the static null and

induced null noise. Scale factor is not significantly affected until

the acceleration reaches several hundred m/s2.

Vibration rectification for frequencies up to 20 kHz is on the

order of 0.00002(°/s)/(m/s2)2, is not significantly dependent on

frequency, and has been verified up to 400 m/s2 rms.

Linear vibration spectral density near the 14 kHz sensor reso-

nance translates into output noise. In order to have a significant

effect, the vibration must be within the angular rate bandwidth

(typically ±40 Hz of the resonance), so it takes considerable

high frequency vibration to have any effect.

Away from the 14 kHz resonance the effect is not discernible,

except for vibration frequencies within the angular rate pass

band. This can be seen in Figure 9 to Figure 14 for the various

sensor axes. The in-band effect can be seen in Figure 24. This is

the result of the static g-sensitivity. The specimen used for

Figure 24 had a g-sensitivity of 0.15°/s/g and its total in-band

noise degraded from 3 mV rms to 5 mV rms for the specified

vibration. The effect of broadband vibration up to 20 kHz is

shown in Figure 23 and Figure 25.

The output noise of the part falls away in accordance with the

output low-pass filter and does not contain any “spikes” greater

than 1% of the low frequency noise. A typical noise spectrum is

shown in Figure 26.

TIME – Seconds

RATEOUT – V

2.50

2.52

2.54

2.56

024 6 8 10

2.58

2.60

Figure 23. Random Vibration (Lateral) 10 kHz to 20 kHz

at 0.01 g/√Hz with 60 Hz Sampling and 0.5 Sec Averaging

TIME – Seconds

RATEOUT – V

2.50

2.52

2.54

2.56

024 6 8 10

2.58

2.60

Figure 24. Random Vibration (Lateral) 2 Hz to 40 Hz, 3.2 g rms

TIME – Seconds

RATEOUT – V

2.50

2.52

2.54

2.56

024 6 8 10

2.58

2.60

STATIC 0.8mV rms

SHAKING 2.4mV rms

Figure 25. Random Vibration (Lateral) 10 kHz to 20 kHz

at 0.01 g/√Hz with 60 Hz Sampling and 0.5 Sec Averaging

FREQUENCY – Hz

RATEOUT – V

–130

–110

–120

–100

–90

010 100 1000 10000 100000

–80

–70

–60

Figure 26. Noise Spectral Density at RATEOUT –BW = 4Hz

ADXRS150

Rev. A | Page 11 of 12

PIN CONFIGURATIONS AND FUNCTIONAL DESCRIPTIONS

AGND

TEMP

ST2

ST1

PGND

AVCC

CP1

CP2

CP4

RATEOUT

GFEDCBA

CP5 CP3

PDD

CMID SUMJ

2.5V

Figure 27. BGA-32 (Bottom View)

Table 3. Pin Function Descriptions—32-Lead BGA

Pin No. Mnemonic Description

6D, 7D CP5 HV Filter Capacitor—47 nF

6A, 7B CP4

6C, 7C CP3

Charge Pump Capacitor—22 nF

5A, 5B CP1

4A, 4B CP2

Charge Pump Capacitor—22 nF

3A, 3B AVCC + Analog Supply

1B, 2A RATEOUT Rate Signal Output

1C, 2C SUMJ Output Amp Summing Junction

1D, 2D CMID HF Filter Capacitor—100 nF

1E, 2E 2.5V 2.5 V Precision Reference

1F, 2G AGND Analog Supply Return

3F, 3G TEMP Temperature Voltage Output

4F, 4G ST2 Self-Test for Sensor 2

5F, 5G ST1 Self-Test for Sensor 1

6G, 7F PGND Charge Pump Supply Return

6E, 7E PDD + Charge Pump Supply

ADXRS150

Rev. A | Page 12 of 12

OUTLINE DIMENSIONS

BOTTOM

VIEW

65 4 3

TOP VIEW

DETAIL A

3.65 MAX SEATING

PLANE

DETAIL A

BALL DIAMETER

7.00 BSC SQ

4.80 BSC

0.60

0.55

0.50

3.20

2.50 0.44

0.25 0.15 MAX

COPLANARITY

0.80

BSC

A1 CORNER

INDEX AREA

Figure 28. 32-Lead Chip Scale Ball Grid Array [CSPBGA]

(BC-32)

Dimensions shown in millimeters

ESD CAUTION

ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the

human body and test equipment and can discharge without detection. Although this product features

proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy

electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance

degradation or loss of functionality.

Table 4. Ordering Guide

ADXRS150 Products Temperature Package Package Description Package Outline

ADXRS150ABG –40°C to +85°C 32-Lead BGA BC-32

ADXRS150ABG-Reel –40°C to +85°C 32-Lead BGA BC-32

tered trademarks are the property of their respective companies.

Printed in the U.S.A. C03226-0-1/03(A)