Small, Low Power, 3-Axis ±16 g
Accelerometer
ADXL326
Rev. 0
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rights of third parties that may result from its use. Specifications subject to change without notice. No
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Tel: 781.329.4700 www.analog.com
Fax: 781.461.3113 ©2009 Analog Devices, Inc. All rights reserved.
FEATURES
3-axis sensing
Small, low profile package
4 mm × 4 mm × 1.45 mm LFCSP
Low power: 350 μA typical
Single-supply operation: 1.8 V to 3.6 V
10,000 g shock survival
Excellent temperature stability
Bandwidth adjustment with a single capacitor per axis
RoHS/WEEE lead-free compliant
APPLICATIONS
Cost-sensitive, low power, motion- and tilt-sensing applications
Mobile devices
Gaming systems
Disk drive protection
Image stabilization
Sports and health devices
GENERAL DESCRIPTION
The ADXL326 is a small, low power, complete 3-axis
accelerometer with signal conditioned voltage outputs. The
product measures acceleration with a minimum full-scale range
of ±16 g. It can measure the static acceleration of gravity in tilt-
sensing applications, as well as dynamic acceleration, resulting
from motion, shock, or vibration.
The user selects the bandwidth of the accelerometer using
the CX, CY, and CZ capacitors at the XOUT, YOUT, and ZOUT pins.
Bandwidths can be selected to suit the application with a
range of 0.5 Hz to 1600 Hz for X and Y axes and a range of
0.5 Hz to 550 Hz for the Z axis.
The ADXL326 is available in a small, low profile, 4 mm ×
4 mm × 1.45 mm, 16-lead, plastic lead frame chip scale package
(LFCSP_LQ).
FUNCTIONAL BLOCK DIAGRAM
3-AXIS
SENSOR
AC AMP DEMOD OUTPUT AMP
OUTPUT AMP
V
S
COM ST
X
OUT
Y
OUT
+3
V
C
X
C
Y
ADXL326
C
DC
OUTPUT AMP
Z
OUT
C
Z
~32kΩ
~32kΩ
~32kΩ
0
7948-001
Figure 1.
ADXL326
Rev. 0 | Page 2 of 16
TABLE OF CONTENTS
Features .............................................................................................. 1
Applications ....................................................................................... 1
General Description ......................................................................... 1
Functional Block Diagram .............................................................. 1
Revision History ............................................................................... 2
Specifications ..................................................................................... 3
Absolute Maximum Ratings ............................................................ 4
ESD Caution .................................................................................. 4
Pin Configuration and Function Descriptions ............................. 5
Typical Performance Characteristics ............................................. 6
Theory of Operation ...................................................................... 10
Mechanical Sensor ...................................................................... 10
Performance ................................................................................ 10
Applications Information .............................................................. 11
Power Supply Decoupling ......................................................... 11
Setting the Bandwidth Using CX, CY, and CZ .......................... 11
Self Test ........................................................................................ 11
Design Trade-Offs for Selecting Filter Characteristics: The
Noise/BW Trade-Off .................................................................. 11
Use with Operating Voltages Other Than 3 V .......................... 11
Axes of Acceleration Sensitivity ............................................... 12
Layout and Design Recommendations ................................... 13
Outline Dimensions ....................................................................... 14
Ordering Guide .......................................................................... 14
REVISION HISTORY
8/09—Revision 0: Initial Version
ADXL326
Rev. 0 | Page 3 of 16
SPECIFICATIONS
TA = 25°C, VS = 3 V, CX = CY = CZ = 0.1 µF, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are
guaranteed. Typical specifications are not guaranteed.
Table 1.
Parameter Conditions Min Typ Max Unit
SENSOR INPUT Each axis
Measurement Range ±16 ±19 g
Nonlinearity Percent of full scale ±0.3 %
Package Alignment Error ±1 Degrees
Interaxis Alignment Error ±0.1 Degrees
Cross Axis Sensitivity1 ±1 %
SENSITIVITY (RATIOMETRIC)2 Each axis
Sensitivity at XOUT, YOUT, ZOUT V
S = 3 V 51 57 63 mV/g
Sensitivity Change Due to Temperature3 V
S = 3 V ±0.01 %/°C
ZERO g BIAS LEVEL (RATIOMETRIC)
0 g Voltage at XOUT, YOUT V
S = 3 V 1.35 1.5 1.65 V
0 g Voltage at ZOUT V
S = 3 V 1.2 1.5 1.8 V
0 g Offset vs. Temperature ±1 mg/°C
NOISE PERFORMANCE
Noise Density XOUT, YOUT, ZOUT 300 μg/√Hz rms
FREQUENCY RESPONSE4
Bandwidth XOUT, YOUT5 No external filter 1600 Hz
Bandwidth ZOUT5 No external filter 550 Hz
RFILT Tolerance 32 ± 15% kΩ
Sensor Resonant Frequency 5.5 kHz
SELF TEST6
Logic Input Low +0.6 V
Logic Input High +2.4 V
ST Actuation Current +60 μA
Output Change at XOUT Self test 0 to 1 −29 −62 −114 mV
Output Change at YOUT Self test 0 to 1 +29 +62 +114 mV
Output Change at ZOUT Self test 0 to 1 +29 +105 +190 mV
OUTPUT AMPLIFIER
Output Swing Low No load 0.1 V
Output Swing High No load 2.8 V
POWER SUPPLY
Operating Voltage Range 1.8 3.6 V
Supply Current VS = 3 V 350 μA
Turn-On Time7 No external filter 1 ms
TEMPERATURE
Operating Temperature Range −40 +85 °C
1 Defined as coupling between any two axes.
2 Sensitivity is essentially ratiometric to VS.
3 Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature.
4 Actual frequency response controlled by user-supplied external filter capacitors (CX, CY, CZ).
5 Bandwidth with external capacitors = 1/(2 × π × 32 kΩ × C). For CX, CY = 0.003 μF, bandwidth = 1.6 kHz. For CZ = 0.01 μF, bandwidth = 500 Hz. For CX, CY, CZ = 10 μF,
bandwidth = 0.5 Hz.
6 Self test response changes cubically with VS.
7 Turn-on time is dependent on CX, CY, CZ and is approximately 160 × CX or CY or CZ + 1 ms, where CX, CY, CZ are in μF.
ADXL326
Rev. 0 | Page 4 of 16
ABSOLUTE MAXIMUM RATINGS
Table 2.
Parameter Rating
Acceleration (Any Axis, Unpowered) 10,000 g
Acceleration (Any Axis, Powered) 10,000 g
VS −0.3 V to +3.6 V
All Other Pins (COM − 0.3 V) to (VS + 0.3 V)
Output Short-Circuit Duration
(Any Pin to Common)
Indefinite
Temperature Range (Powered) −55°C to +125°C
Temperature Range (Storage) −65°C to +150°C
Stresses above those listed under Absolute Maximum Ratings
may cause permanent damage to the device. This is a stress
rating only; functional operation of the device at these or any
other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
ESD CAUTION
ADXL326
Rev. 0 | Page 5 of 16
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
NC = NO CONNECT
NC
1
ST
2
COM
3
NC
4
X
OUT
12
NC
11
Y
OUT
10
NC
9
COM
COM
COM
Z
OUT
5678
16
NC
15
V
S
14
V
S
13
NC
ADXL326
TOP VIEW
(Not to Scale)
+X
+Z
+Y
07948-003
Figure 2. Pin Configuration
Table 3. Pin Function Descriptions
Pin No. Mnemonic Description
1 NC No Connect (or Optionally Ground)
2 ST Self Test
3 COM Common
4 NC No Connect
5 COM Common
6 COM Common
7 COM Common
8 ZOUT Z Channel Output
9 NC No Connect (or Optionally Ground)
10 YOUT Y Channel Output
11 NC No Connect
12 XOUT X Channel Output
13 NC No Connect
14 VS Supply Voltage (1.8 V to 3.6 V)
15 VS Supply Voltage (1.8 V to 3.6 V)
16 NC No Connect
EP Exposed pad Not internally connected. Solder for mechanical integrity.
ADXL326
Rev. 0 | Page 6 of 16
TYPICAL PERFORMANCE CHARACTERISTICS
N > 1000 for all typical performance plots, unless otherwise noted.
1.46 1.47 1.48 1.49 1.51 1.52 1.53 1.54
OUTPUT (V)
POPUL
A
TION (%)
0
10
20
30
40
50
60
70
80
90
1.50
07948-005
Figure 3. X-Axis Zero g Bias at 25°C, VS = 3 V
POPUL
A
TION (%)
0
10
20
30
40
50
60
70
80
90
100
1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 1.54
OUTPUT (V)
0
7948-006
Figure 4. Y-Axis Zero g Bias at 25°C, VS = 3 V
POPUL
A
TION (%)
0
10
20
30
40
50
60
70
80
1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 1.54
OUTPUT (V)
07948-007
Figure 5. Z-Axis Zero g Bias at 25°C, VS = 3 V
POPUL
A
TION (%)
0
10
20
30
40
–62 –60 –58 –56 –54 –52 –50
VOLTAGE (mV)
07948-008
Figure 6. X-Axis Self Test Response at 25°C, VS = 3 V
POPUL
A
TION (%)
VOLTAGE (mV)
0
10
20
30
40
52 54 56 58 60 62 64 66
07948-009
Figure 7. Y-Axis Self Test Response at 25°C, VS = 3 V
POPUL
A
TION (%)
VOLTAGE (mV)
0
10
20
30
90 92 94 96 98 100 102 104
07948-010
Figure 8. Z-Axis Self Test Response at 25°C, VS = 3 V
ADXL326
Rev. 0 | Page 7 of 16
POPUL
TION (%)
0
5
10
15
20
25
30
35
40
45
50
55
60
65
–2.5 –2.0 –1.5 –1.0 –0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5
TEMPERATURE COEFFICIENT (m
g
/°C)
07948-011
Figure 9. X-Axis Zero g Bias Temperature Coefficient, VS = 3 V
POPUL
A
TION (%)
–2.5 –2.0 –1.5 –1.0 –0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5
TEMPERATURE COEFFICIENT (mg/°C)
0
10
20
30
40
50
60
70
07948-012
Figure 10. Y-Axis Zero g Bias Temperature Coefficient, VS = 3 V
–2.5 –2.0 –1.5 –1.0 –0.5 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5
TEMPERATURE COEFFICIENT (m
g
/°C)
0
5
10
15
20
25
30
07948-013
POPUL
A
TION (%)
Figure 11. Z-Axis Zero g Bias Temperature Coefficient, VS = 3 V
1.48
1.49
1.50
1.51
1.52
1.53
–40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100
TEMPERATURE (°C)
OUTPUT (V)
N = 8
07948-014
Figure 12. X-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB
1.48
1.49
1.50
1.51
1.52
1.53
OUTPUT (V)
–40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100
TEMPERATURE (°C)
N = 8
07948-015
Figure 13. Y-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB
1.480
1.485
1.490
1.495
1.500
1.505
1.510
1.515
1.520
1.525
1.530
OUTPUT (V)
–40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100
TEMPERATURE (°C)
N = 8
07948-016
Figure 14. Z-Axis Zero g Bias vs. Temperature, Eight Parts Soldered to PCB
ADXL326
Rev. 0 | Page 8 of 16
POPUL
A
TION (%)
0
5
10
15
20
25
30
35
0.053 0.054 0.055 0.056 0.057 0.058 0.059 0.060 0.061
SENSITIVITY (V/g)
07948-017
Figure 15. X-Axis Sensitivity at 25°C, VS = 3 V
POPUL
TION (%)
0
5
10
15
20
25
30
35
40
45
50
55
0.053 0.054 0.055 0.056 0.057 0.058 0.059 0.060 0.061
SENSITIVITY (V/g)
07948-018
Figure 16. Y-Axis Sensitivity at 25°C, VS = 3 V
POPUL
A
TION (%)
0.053 0.054 0.055 0.056 0.057 0.058 0.059 0.060 0.061
SENSITIVITY (V/
g
)
0
5
10
15
20
25
30
35
40
07948-019
Figure 17. Z-Axis Sensitivity at 25°C, VS = 3 V
–40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100
TEMPERATURE (°C)
0.051
0.053
0.055
0.057
0.059
0.061
SENSITIVITY (V/g)
N = 8
07948-020
Figure 18. X-Axis Sensitivity vs. Temperature,
Eight Parts Soldered to PCB, VS = 3 V
–40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100
TEMPERATURE (°C)
0.051
0.053
0.055
0.057
0.059
0.061
SENSITIVITY (V/g)
N = 8
07948-021
Figure 19. Y-Axis Sensitivity vs. Temperature,
Eight Parts Soldered to PCB, VS = 3 V
–40 –30 –20 –10 0 10 20 30 40 50 60 70 80 90 100
TEMPERATURE (°C)
0.051
0.053
0.055
0.057
0.059
0.061
SENSITIVITY (V/
g
)
N = 8
07948-022
Figure 20. Z-Axis Sensitivity vs. Temperature,
Eight Parts Soldered to PCB, VS = 3 V
ADXL326
Rev. 0 | Page 9 of 16
0
100
200
300
400
500
600
1.5 2.0 2.5 3.0 3.5 4.0
SUPPLY (V)
CURRENT (µA)
07948-023
Figure 21. Typical Current Consumption vs. Supply Voltage
1
2
3
4
OUTPUTS ARE OFFSET
FOR CLARITY
CH1: POWER, 2V/DIV
CH2: X
OUT
, 500mV/DIV
CH4: Z
OUT
, 500mV/DIV
TIME (1ms/DIV)
CH3: Y
OUT
, 500mV/DIV
07948-024
Figure 22. Typical Turn-On Time, VS = 3 V,
CX = CY = CZ = 0.0047 μF
ADXL326
Rev. 0 | Page 10 of 16
THEORY OF OPERATION
The ADXL326 is a complete 3-axis acceleration measurement
system. The ADXL326 has a measurement range of ±16 g
minimum. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an open-
loop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in
tilt sensing applications, as well as dynamic acceleration, resulting
from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180° out-of-phase square waves. Acceleration deflects
the moving mass and unbalances the differential capacitor resulting
in a sensor output whose amplitude is proportional to acceleration.
Phase-sensitive demodulation techniques are then used to
determine the magnitude and direction of the acceleration.
The demodulator output is amplified and brought off-chip through
a 32 kΩ resistor. The user then sets the signal bandwidth of the
device by adding a capacitor. This filtering improves measurement
resolution and helps prevent aliasing.
MECHANICAL SENSOR
The ADXL326 uses a single structure for sensing the X, Y, and Z axes.
As a result, the three axes sense directions are highly orthogonal
with little cross-axis sensitivity. Mechanical misalignment of the
sensor die to the package is the chief source of cross-axis sensitivity.
Mechanical misalignment can, of course, be calibrated out at
the system level.
PERFORMANCE
Rather than using additional temperature compensation circuitry,
innovative design techniques ensure that high performance is built-
in to the ADXL326. As a result, there is neither quantization error
nor nonmonotonic behavior, and temperature hysteresis is very
low (typically <3 mg over the −25°C to +70°C temperature range).
ADXL326
Rev. 0 | Page 11 of 16
APPLICATIONS INFORMATION
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 µF capacitor, CDC, placed
close to the ADXL326 supply pins adequately decouples the
accelerometer from noise on the power supply. However, in
applications where noise is present at the 50 kHz internal clock
frequency (or any harmonic thereof), additional care in power
supply bypassing is required because this noise can cause errors
in acceleration measurement. If additional decoupling is needed, a
100 Ω (or smaller) resistor or ferrite bead can be inserted in the
supply line. Additionally, a larger bulk bypass capacitor (1 µF or
greater) can be added in parallel to CDC. Ensure that the connection
from the ADXL326 ground to the power supply ground is low
impedance because noise transmitted through ground has a
similar effect as noise transmitted through VS.
SETTING THE BANDWIDTH USING CX, CY, AND CZ
The ADXL326 has provisions for band limiting the XOUT, YOUT, and
ZOUT pins. Capacitors must be added at these pins to implement
low-pass filtering for antialiasing and noise reduction. The 3 dB
bandwidth equation is
f−3 dB = 1/(2π(32 kΩ) × C(X, Y, Z))
or more simply
f–3 dB = 5 F/C(X, Y, Z)
The tolerance of the internal resistor (RFILT) typically varies as
much as ±15% of its nominal value (32 kΩ), and the bandwidth
varies accordingly. A minimum capacitance of 0.0047 µF for CX,
CY, and CZ is recommended in all cases.
Table 4. Filter Capacitor Selection, CX, CY, and CZ
Bandwidth (Hz) Capacitor (μF)
1 4.7
10 0.47
50 0.10
100 0.05
200 0.027
500 0.01
SELF TEST
The ST pin controls the self test feature. When this pin is set to
VS, an electrostatic force is exerted on the accelerometer beam.
The resulting movement of the beam allows the user to test
whether the accelerometer is functional. The typical change in
output is −1.08 g (corresponding to −62 mV) in the X axis, +1.08 g
(+62 mV) on the Y axis, and +1.83 g (+105 mV) on the Z axis.
This ST pin can be left open circuit or connected to common
(COM) in normal use.
Never expose the ST pin to voltages greater than VS + 0.3 V. If
this cannot be guaranteed due to the system design (for instance,
there are multiple supply voltages), then a low VF clamping
diode between ST and VS is recommended.
DESIGN TRADE-OFFS FOR SELECTING FILTER
CHARACTERISTICS: THE NOISE/BW TRADE-OFF
The selected accelerometer bandwidth ultimately determines
the measurement resolution (smallest detectable acceleration).
Filtering can be used to lower the noise floor to improve the
resolution of the accelerometer. Resolution is dependent on the
analog filter bandwidth at XOUT, YOUT, and ZOUT.
The output of the ADXL326 has a typical bandwidth greater
than 500 Hz. The user must filter the signal at this point to limit
aliasing errors. The analog bandwidth must be no more than half
the analog-to-digital sampling frequency to minimize aliasing.
The analog bandwidth can be further decreased to reduce noise
and improve resolution.
The ADXL326 noise has the characteristics of white Gaussian
noise, which contributes equally at all frequencies and is described
in terms of µg/√Hz (the noise is proportional to the square root
of the accelerometer bandwidth). The user should limit bandwidth
to the lowest frequency needed by the application to maximize
the resolution and dynamic range of the accelerometer.
With the single-pole roll-off characteristic, the typical noise of
the ADXL326 is determined by
rms Noise = Noise Density × )1.6( ×BW
Often, the peak value of the noise is desired. Peak-to-peak noise
can only be estimated by statistical methods. Table 5 is useful for
estimating the probabilities of exceeding various peak values, given
the rms value.
Table 5. Estimation of Peak-to-Peak Noise
Peak-to-Peak Value
% of Time That Noise Exceeds
Nominal Peak-to-Peak Value
2 × rms 32
4 × rms 4.6
6 × rms 0.27
8 × rms 0.006
USE WITH OPERATING VOLTAGES OTHER THAN 3 V
The ADXL326 is tested and specified at VS = 3 V; however, it can be
powered with VS as low as 1.8 V or as high as 3.6 V. Note that some
performance parameters change as the supply voltage is varied.
The ADXL326 output is ratiometric; therefore, the output
sensitivity (or scale factor) varies proportionally to the supply
voltage. At VS = 3.6 V, the output sensitivity is typically 68 mV/g.
At VS = 2 V, the output sensitivity is typically 38 mV/g.
The zero g bias output is also ratiometric; therefore, the zero g
output is nominally equal to VS/2 at all supply voltages.
The output noise is not ratiometric but is absolute in volts;
therefore, the noise density decreases as the supply voltage
increases. This is because the scale factor (mV/g) increases while
the noise voltage remains constant. At VS = 3.6 V, the X- and Y-
axis noise density is typically 120 µg/√Hz, while at VS = 2 V, the
X- and Y-axis noise density is typically 270 µg/√Hz.
ADXL326
Rev. 0 | Page 12 of 16
Self test response in g is roughly proportional to the square of
the supply voltage. However, when ratiometricity of sensitivity
is factored in with supply voltage, the self test response in volts
is roughly proportional to the cube of the supply voltage.
For example, at VS = 3.6 V, the self test response for the
ADXL326 is approximately −107 mV for the X axis, +107 mV
for the Y axis, and +181 mV for the Z axis. At VS = 2 V, the self
test response is approximately −18 mV for the X axis, +18 mV
for the Y axis, and −31 mV for the Z axis.
The supply current decreases as the supply voltage decreases.
Typical current consumption at VS = 3.6 V is 375 µA, and
typical current consumption at VS = 2 V is 200 µA.
AXES OF ACCELERATION SENSITIVITY
07948-025
A
Z
A
Y
A
X
TOP
Figure 23. Axes of Acceleration Sensitivity (Corresponding Output Voltage
Increases When Accelerated Along the Sensitive Axis)
07948-026
XOUT = –1g
YOUT = 0g
ZOUT = 0g
GRAVITY
X
OUT = 0g
Y
OUT = 1g
Z
OUT = 0g
XOUT = 0g
YOUT = –1g
ZOUT = 0g
XOUT = 1g
YOUT = 0g
ZOUT = 0g
XOUT = 0g
YOUT = 0g
ZOUT = 1g
XOUT = 0g
YOUT = 0g
ZOUT = –1g
TOP
TOP TOP
TOP
TOP
Figure 24. Output Response vs. Orientation to Gravity
ADXL326
Rev. 0 | Page 13 of 16
LAYOUT AND DESIGN RECOMMENDATIONS
The recommended soldering profile is shown in Figure 25, followed by a description of the profile features in Table 6. The recommended
PCB layout or solder land drawing is shown in Figure 26.
t
P
t
L
t25°C TO PEAK
t
S
PREHEAT
CRITICAL ZONE
T
L
TO T
P
TEMPERATURE
TIME
RAMP-DOWN
RAMP-UP
T
SMIN
T
SMAX
T
P
T
L
07948-002
Figure 25. Recommended Soldering Profile
Table 6. Recommended Soldering Profile
Profile Feature Sn63/Pb37 Pb-Free
Average Ramp Rate (TL to TP) 3°C/sec maximum 3°C/sec maximum
Preheat
Minimum Temperature (TSMIN) 100°C 150°C
Maximum Temperature (TSMAX) 150°C 200°C
Time (TSMIN to TSMAX), tS 60 sec to 120 sec 60 sec to 180 sec
TSMAX to TL
Ramp-Up Rate 3°C/sec maximum 3°C/sec maximum
Time Maintained Above Liquidous (TL)
Liquidous Temperature (TL) 183°C 217°C
Time (tL) 60 sec to 150 sec 60 sec to 150 sec
Peak Temperature (TP) 240°C + 0°C/−5°C 260°C + 0°C/−5°C
Time Within 5°C of Actual Peak Temperature (tP) 10 sec to 30 sec 20 sec to 40 sec
Ramp-Down Rate 6°C/sec maximum 6°C/sec maximum
Time 25°C to Peak Temperature 6 minutes maximum 8 minutes maximum
C
ENTER PAD IS NOT
INTERNALLY CONNECTED
BUT SHOULD BE SOLDERED
FOR MECHANICAL INTEGRITY
0.50
MAX
0.65 0.325
1.95
0.65
0.325
4
4
0.35
MAX
1.95
DIMENSIONS SHOWN IN MILLIMETERS
07948-004
Figure 26. Recommended PCB Layout
ADXL326
Rev. 0 | Page 14 of 16
OUTLINE DIMENSIONS
112008-A
16
5
13
8
9
12 1
4
0.65 BSC
2.43
1.75 SQ
1.08
1.95 BSC
0.20 MIN PIN 1
INDICATOR
0.20 MIN
SEATING
PLANE
1.50
1.45
1.40
PIN 1
INDICATOR
COPLANARITY
0.05
0.05 MAX
0.02 NOM
0.35
0.30
0.25
0.55
0.50
0.45
4.15
4.00 SQ
3.85
FOR PROPER CONNECTION OF
THE EXPOSED PAD, REFER TO
THE PIN CONFIGURATION AND
FUNCTION DESCRIPTIONS
SECTION OF THIS DATA SHEET.
*STACKED DIE WITH GLASS SEAL.
TOP VIEW
EXPOSED
PAD
(BOTTOM VIEW)
Figure 27. 16-Lead Lead Frame Chip Scale Package [LFCSP_LQ]
4 mm × 4 mm Body, 1.45 mm Thick Quad
(CP-16-5a*)
Dimensions shown in millimeters
ORDERING GUIDE
Model Measurement Range Specified Voltage Temperature Range Package Description Package Option
ADXL326BCPZ1 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a
ADXL326BCPZ–RL1 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a
ADXL326BCPZ–RL71 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a
EVAL-ADXL326Z1 Evaluation Board
1 Z = RoHS Compliant Part.
ADXL326
Rev. 0 | Page 15 of 16
NOTES
ADXL326
Rev. 0 | Page 16 of 16
NOTES
Analog Devices offers specific products designated for automotive applications; please consult your local Analog Devices sales representative for details. Standard products sold by
Analog Devices are not designed, intended, or approved for use in life support, implantable medical devices, transportation, nuclear, safety, or other equipment where malfunction
of the product can reasonably be expected to result in personal injury, death, severe property damage, or severe environmental harm. Buyer uses or sells standard products for use
in the above critical applications at Buyer's own risk and Buyer agrees to defend, indemnify, and hold harmless Analog Devices from any and all damages, claims, suits, or expenses
resulting from such unintended use.
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