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Sensing and Control
Honeywell Inc.
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Freeport, Illinois 61032
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Airflow Sensors AWM1000 Series
Microbridge Mass Airflow/Unamplified
Honeywell 1MICRO SWITCH Sensing and Control 11-800-537-6945 USA 1F1-815-235-6847 International 11-800-737-3360 Canada
65
FEATURES
1Cost-effective microbridge technology
1Accurate, repeatable airflow sensing
1Bi-directional sensing capability
1Low differential pressure sensing
Take advantage of microbridge mass
flow sensor technology. The AWM1000
series mass flow sensor provides all of the
outstanding performance benefits of the
standard AWM2000 series in a more cost-
effective sensor platform. This device pro-
vides accurate, repeatable flow sensing.
Sensor to sensor interchangeability
specifications are approximately twice as
large as compared to the AWM2000 se-
ries.
The heater control circuit in Figure 1 and
the sensing bridge supply circuit in Figure
2 are both required for operation per
specification. These two circuits are NOT
on board the sensor and must be sup-
plied in the application. The differential
amplifier circuitry in Figure 3 may be use-
ful in providing output gain and/or intro-
ducing voltage offsets to the sensor out-
put (Ref. Equation 1).
NOTE: For applications involving sens-
ing hydrogen (H2) gas or helium (He) gas,
see Application Note 3, page 131.
Figure 1
Heater Control Circuit
Figure 2
Sensing Bridge Supply Circuit
Figure 3
Differential Instrumentation Amplifier Circuit
Equation 1:
VoJ2R2+R1R4V2-V1+V offset
()()()
R
1R
3
where V offsetJVS
()
R
6
R
6+
R
5
Airflow
Airflow Sensors AWM1000 Series
Microbridge Mass Airflow/Unamplified
66
Honeywell 1MICRO SWITCH Sensing and Control 11-800-537-6945 USA 1F1-815-235-6847 International 11-800-737-3360 Canada
AWM1000 SERIES ORDER GUIDE (Performance Characteristics @ 10.0 ±0.01 VDC, 25°C)
Catalog Listings AWM1100V AWM1200V AWM1300V
Flow Range (Full Scale) ±200 sccm +1000 sccm to −600 sccm
Pressure Range
(See Application Note #1) ±4.0NH2O (10 mBar)
Output Voltage @ Trim Point 30 mV @ 100 sccm 20 mV @ 2.0NH2O 50 mV @ 650 sccm
Null Voltage Shift, Typ.
+25 to −25°C, +25 to 85°C±0.7 mV (max.) ±0.7 mV (max.) ±0.7 mV (max.)
Output Voltage Shift, Max.
+25 to −25°C±4% Full Scale +22% Reading (Note 2) ±4% Full Scale
+25 to +85°C±4% Full Scale −22% Reading ±4% Full Scale
Repeatability & Hysteresis, Max. ±1% Full Scale ±1% Full Scale ±1% Full Scale
Min. Typ. Max.
Excitation (VDC) (Note 1) 8.0 10±0.01 15
Power Consumption (mW) — 30 50
Null Voltage (mV) −1.0 0.0 +1.0
Response Time (msec) — 1.0 3.0
Common Mode Pressure (psi) — — 25
Sensor Resistance (kΩ)
Pin 2-Pin 1, Pin 6-Pin 1 — 5 —
Sensor Current (mA)
Pin 2-Pin 1, Pin 6-Pin 1 — 0.3 0.6
Temperature Range Operating: −25°to +85°C (−13°to +185°F); Storage: −40°to +90°C (−40°to +194°F)
Termination 2,54 mm (.100N) centers, 0,635 mm (0.025N) square
Weight (grams) 10.8
Shock Rating 100 g peak (5 drops, 6 axes)
Notes:
1. Output Voltage is ratiometric to supply voltage.
2. Temperature shifts when sensing differential pressure correlates to the density change of the gas over temperature.
See Application Note 1.
3. Maximum allowable rate of flow change to prevent damage: 5 SLPM/1.0 sec.
MOUNTING DIMENSIONS (for reference only)
Airflow Sensors AWM1000 Series
Microbridge Mass Airflow/Unamplified
Honeywell 1MICRO SWITCH Sensing and Control 11-800-537-6945 USA 1F1-815-235-6847 International 11-800-737-3360 Canada
67
OUTPUT FLOW VS INTERCHANGEABILITY (Note 1) Performance Characteristics @ 10.0 ±0.01 VDC, 25°C
AWM1100V AWM1200V (Note 2) AWM1300V
Press Flow Nom. Tol. Flow Press. Nom. Tol. Press Flow Nom. Tol.
mBar sccm mV ±mV sccm NH2OmV ±mV mBar sccm mV ±mV
0.49 200 44.25 4.25 120 4.00 31.75 8.0 3.4 1000 55.50 7.0
0.35 150 38.75 3.00 90 3.00 26.75 6.0 2.4 800 52.90 6.0
0.21 100 30.00 1.00 60 2.00 20.00 3.0 1.8 650 50.00 5.0
0.09 50 18.40 2.00 30 1.00 11.20 4.0 0.83 400 42.50 6.0
000.00 1.00 0 0.00 0.00 1.0 0.31 200 29.20 5.0
−0.09 −50 −18.40 3.90 −30 −1.00 −11.20 7.0 0 00.00 1.5
−0.21 −100 −30.00 5.00 −60 −2.00 −20.00 7.0 −0.31 −200 −28.90 15.0
−0.35 −150 −38.75 7.65 −90 −3.00 −26.75 11.0 −0.83 −400 −41.20 26.0
−0.49 −200 −44.25 9.75 −120 −4.00 −31.75 15.0 −1.6 −600 −48.20 30.0
Notes:
1. Numbers in BOLD type indicate calibration type, mass flow or differ-
ential pressure. Tolerance values apply to calibration type only.
2. Differential pressure calibrated devices are not recommended for flow
measurement. Use flow calibrated devices for flow measurement.
OUTPUT CURVES
Airflow
