Small, Low Power, 2-Axis 3 g i MEMS(R) Accelerometer ADXL323 FEATURES GENERAL DESCRIPTION 2-axis sensing Small, low-profile package 4 mm x 4 mm x 1.45 mm LFCSP_LQ Low power 180 A at VS = 1.8 V (typical) Single-supply operation 1.8 V to 5.25 V 10,000 g shock survival Excellent temperature stability BW adjustment with a single capacitor per axis RoHS/WEEE lead-free compliant The ADXL323 is a small, thin, low power, complete 2-axis accelerometer with signal-conditioned voltage outputs, all on a single, monolithic IC. The product measures acceleration with a minimum full-scale range of 3 g. It can measure the static acceleration of gravity in tilt-sensing applications, as well as dynamic acceleration resulting from motion, shock, or vibration. The user selects the bandwidth of the accelerometer using the CX and CY capacitors at the XOUT and YOUT pins. Bandwidths can be selected to suit the application, with a range of 0.5 Hz to 1600 Hz. APPLICATIONS The ADXL323 is available in a small, low profile, 4 mm x 4 mm x 1.45 mm, 16-lead, plastic lead frame chip scale package (LFCSP_LQ). Cost-sensitive, low power, motion- and tilt-sensing applications Mobile devices Gaming systems Disk drive protection Image stabilization Sports and health devices FUNCTIONAL BLOCK DIAGRAM +3V VS ADXL323 RFILT CDC XOUT OUTPUT AMP 2-AXIS SENSOR CX AC AMP DEMOD RFILT OUTPUT AMP YOUT CY ST 06237-001 COM Figure 1. Rev. 0 Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 (c)2007 Analog Devices, Inc. All rights reserved. ADXL323 TABLE OF CONTENTS Features .............................................................................................. 1 Performance ................................................................................ 11 Applications....................................................................................... 1 Applications..................................................................................... 12 General Description ......................................................................... 1 Power Supply Decoupling ......................................................... 12 Functional Block Diagram .............................................................. 1 Setting the Bandwidth Using CX, CY, and CZ .......................... 12 Revision History ............................................................................... 2 Self Test ........................................................................................ 12 Specifications..................................................................................... 3 Design Trade-Offs for Selecting Filter Characteristics: The Noise/BW Trade-Off.................................................................. 12 Absolute Maximum Ratings............................................................ 4 ESD Caution.................................................................................. 4 Pin Configuration and Function Descriptions............................. 5 Typical Performance Characteristics ............................................. 6 Theory of Operation ...................................................................... 11 Use with Operating Voltages Other Than 3 V ........................... 12 Axes of Acceleration Sensitivity ............................................... 13 Outline Dimensions ....................................................................... 14 Ordering Guide .......................................................................... 14 Mechanical Sensor...................................................................... 11 REVISION HISTORY 8/06--Revision 0: Initial Version Rev. 0 | Page 2 of 16 ADXL323 SPECIFICATIONS TA = 25C, VS = 3 V, CX = CY = 0.1 F, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. Table 1. Parameter SENSOR INPUT Measurement Range Nonlinearity Package Alignment Error Inter-Axis Alignment Error Cross Axis Sensitivity 1 SENSITIVITY (RATIOMETRIC) 2 Sensitivity at XOUT, YOUT Sensitivity Change Due to Temperature 3 ZERO g BIAS LEVEL (RATIOMETRIC) 0 g Voltage at XOUT, YOUT 0 g Offset vs. Temperature NOISE PERFORMANCE Noise Density XOUT, YOUT FREQUENCY RESPONSE 4 Bandwidth XOUT, YOUT 5 RFILT Tolerance Sensor Resonant Frequency SELF TEST 6 Logic Input Low Logic Input High ST Actuation Current Output Change at XOUT Output Change at YOUT OUTPUT AMPLIFIER Output Swing Low Output Swing High POWER SUPPLY Operating Voltage Range Supply Current Turn-On Time 7 TEMPERATURE Operating Temperature Range T Conditions Each axis Min Typ 3 3.6 0.3 1 0.1 1 270 300 0.015 330 mV/g %/C 1.35 1.5 0.6 1.65 V mg/C % of full scale Each axis VS = 3 V VS = 3 V Each axis VS = 3 V Max Unit g % Degrees Degrees % 280 g/Hz rms 1600 32 15% 5.5 Hz k kHz Self Test 0 to Self Test 1 Self Test 0 to Self Test 1 +0.6 +2.4 +60 -150 +150 V V A mV mV No load No load 0.1 2.8 V V No external filter T 1.8 VS = 3 V No external filter -25 1 5.25 V A ms +70 C 320 1 Defined as coupling between two axes. Sensitivity is essentially ratiometric to VS. Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature. 4 Actual frequency response controlled by user-supplied external filter capacitors (CX, CY). 5 Bandwidth with external capacitors = 1/(2 x x 32 k x C). For CX, CY = 0.003 F, bandwidth = 1.6 kHz. For CX, CY = 10 F, bandwidth = 0.5 Hz. 6 Self-test response changes cubically with VS. 7 Turn-on time is dependent on CX, CY and is approximately 160 x CX or CY + 1 ms, where CX, CY are in F. 2 3 Rev. 0 | Page 3 of 16 ADXL323 ABSOLUTE MAXIMUM RATINGS Table 2. Parameter Acceleration (Any Axis, Unpowered) Acceleration (Any Axis, Powered) VS All Other Pins Output Short-Circuit Duration (Any Pin to Common) Temperature Range (Powered) Temperature Range (Storage) Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. Rating 10,000 g 10,000 g -0.3 V to +7.0 V (COM - 0.3 V) to (VS + 0.3 V) Indefinite -55C to +125C -65C to +150C CRITICAL ZONE TL TO TP tP TP TL tL TSMAX TSMIN tS RAMP-DOWN PREHEAT 06237-002 TEMPERATURE RAMP-UP t25C TO PEAK TIME Figure 2. Recommended Soldering Profile Table 3. Recommended Soldering Profile Profile Feature Average Ramp Rate (TL to TP) Preheat Minimum Temperature (TSMIN) Maximum Temperature (TSMAX) Time (TSMIN to TSMAX), tS TSMAX to TL Ramp-Up Rate Time Maintained Above Liquidous (TL) Liquidous Temperature (TL) Time (tL) Peak Temperature (TP) Time within 5C of Actual Peak Temperature (tP) Ramp-Down Rate Time 25C to Peak Temperature Sn63/Pb37 3C/sec max Pb-Free 3C/sec max 100C 150C 60 sec to 120 s 150C 200C 60 sec to 180 sec 3C/sec max 3C/sec max 183C 60 sec to 150 sec 240C + 0C/-5C 10 sec to 30 sec 6C/sec max 6 minutes max 217C 60 sec to 150 sec 260C + 0C/-5C 20 sec to 40 sec 6C/sec max 8 minutes max ESD CAUTION ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the human body and test equipment and can discharge without detection. Although this product features proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance degradation or loss of functionality. Rev. 0 | Page 4 of 16 ADXL323 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS 0.50 MAX 4 0.65 0.325 NC ST VS NC 16 VS NC 0.35 MAX 15 14 13 1 ADXL323 2 TOP VIEW (Not to Scale) 0.65 4 12 XOUT 11 NC 10 YOUT 1.95 0.325 +Y 7 8 NC NC = NO CONNECT 1.95 DIMENSIONS SHOWN IN MILLIMETERS Figure 4. Recommended PCB Layout Figure 3. Pin Configuration Table 4. Pin Function Descriptions Pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Mnemonic NC ST COM NC COM COM COM NC NC YOUT NC XOUT NC VS VS NC Description No Connect Self Test Common No Connect Common Common Common No Connect No Connect Y Channel Output No Connect X Channel Output No Connect Supply Voltage (1.8 V to 5.25 V) Supply Voltage (1.8 V to 5.25 V) No Connect Rev. 0 | Page 5 of 16 06237-004 9 6 CENTER PAD IS NOT INTERNALLY CONNECTED BUT SHOULD BE SOLDERED FOR MECHANICAL INTEGRITY 06237-003 +X 5 NC 4 COM NC COM 3 COM COM ADXL323 TYPICAL PERFORMANCE CHARACTERISTICS 16 14 14 12 12 10 8 6 10 8 6 4 4 2 2 0 06237-008 % OF POPULATION 16 06237-005 % OF POPULATION N > 1000 for all typical performance plots, unless otherwise noted. 0 0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09 0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09 OUTPUT (V) OUTPUT (V) Figure 5. X-Axis Zero g Bias at 25C, VS = 2 V Figure 8. Y-Axis Zero g Bias at 25C, VS = 2 V 40 35 35 30 % OF POPULATION 25 20 15 10 1.42 1.44 1.46 1.48 1.50 1.52 1.54 1.56 15 10 0 1.42 1.58 OUTPUT (V) 1.44 1.46 1.48 1.50 1.52 1.54 1.56 1.58 OUTPUT (V) Figure 6. X-Axis Zero g Bias at 25C, VS = 3 V Figure 9. Y-Axis Zero g Bias at 25C, VS = 3 V 30 25 25 % OF POPULATION 30 20 15 10 5 20 15 10 5 06237-007 % OF POPULATION 06237-009 0 20 5 06237-006 5 25 0 06237-010 % OF POPULATION 30 0 2.30 2.34 2.38 2.42 2.46 2.50 2.54 2.58 2.62 2.66 2.70 2.30 2.34 2.38 2.42 2.46 2.50 2.54 2.58 2.62 2.66 2.70 OUTPUT (V) OUTPUT (V) Figure 7. X-Axis Zero g Bias at 25C, VS = 5 V Figure 10. Y-Axis Zero g Bias at 25C, VS = 5 V Rev. 0 | Page 6 of 16 35 40 30 35 30 25 % OF POPULATION 20 15 10 25 20 15 10 5 06237-011 5 0 -2.5 -2.0 -1.5 -1.0 -0.5 0 0.5 1.0 1.5 2.0 06237-014 % OF POPULATION ADXL323 0 2.5 -2.5 -2.0 -1.5 -1.0 -0.5 TEMPERATURE COEFFICIENT (mg/C) 0.5 1.0 1.5 2.0 2.5 Figure 14. Y-Axis Zero g Bias Temperature Coefficient, VS = 3 V 35 40 30 35 30 25 % OF POPULATION 20 15 10 25 20 15 10 5 06237-012 5 0 -2.5 -2.0 -1.5 -1.0 -0.5 0 0.5 1.0 1.5 2.0 06237-015 % OF POPULATION Figure 11. X-Axis Zero g Bias Temperature Coefficient, VS = 3 V 0 2.5 -2.5 -2.0 -1.5 -1.0 -0.5 TEMPERATURE COEFFICIENT (mg/C) 0 0.5 1.0 1.5 2.0 2.5 TEMPERATURE COEFFICIENT (mg/C) Figure 12. X-Axis Zero g Bias Temperature Coefficient, VS = 5 V Figure 15. Y-Axis Zero g Bias Temperature Coefficient, VS = 5 V 1.55 1.55 N=8 N=8 1.54 1.53 1.53 1.52 1.52 1.51 1.51 1.50 1.50 1.49 1.49 1.48 1.48 1.47 1.47 1.46 1.45 -30 -20 -10 0 10 20 30 40 50 60 70 06237-016 VOLTS 1.54 06237-013 VOLTS 0 TEMPERATURE COEFFICIENT (mg/C) 1.46 1.45 -30 80 TEMPERATURE (C) -20 -10 0 10 20 30 40 50 60 TEMPERATURE (C) Figure 13. X-Axis Zero g Bias vs. Temperature; Eight Parts Soldered to PCB, VS = 3 V Figure 16. Y-Axis Zero g Bias vs. Temperature; Eight Parts Soldered to PCB, VS = 3 V Rev. 0 | Page 7 of 16 70 80 35 40 30 35 30 % OF POPULATION 25 20 15 10 25 20 15 5 0 0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210 5 0 0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210 SENSITIVITY (V/g) SENSITIVITY (V/g) Figure 17. X-Axis Sensitivity at 25C, VS = 2 V Figure 20. Y-Axis Sensitivity at 25C, VS = 2 V 60 70 60 % OF POPULATION 50 40 30 20 10 0.26 0.27 0.28 0.29 0.30 0.31 0.32 0.33 40 30 20 10 06237-018 0 50 06237-021 % OF POPULATION 06237-020 10 06237-017 % OF POPULATION ADXL323 0 0.26 0.34 SENSITIVITY (V/g) 0.27 0.28 0.29 0.30 0.31 0.32 0.33 0.34 SENSITIVITY (V/g) Figure 18. X-Axis Sensitivity at 25C, VS = 3 V Figure 21. Y-Axis Sensitivity at 25C, VS = 3 V 25 40 35 20 % OF POPULATION 15 10 25 20 15 10 5 0 06237-022 5 06237-019 % OF POPULATION 30 0 0.50 0.51 0.52 0.53 0.54 0.55 0.56 0.57 0.58 0.59 0.60 0.50 0.51 0.52 0.53 0.54 0.55 0.56 0.57 0.58 0.59 0.60 SENSITIVITY (V/g) SENSITIVITY (V/g) Figure 19. X-Axis Sensitivity at 25C, VS = 5 V Figure 22. Y-Axis Sensitivity at 25C, VS = 5 V Rev. 0 | Page 8 of 16 ADXL323 90 70 80 60 % OF POPULATION % OF POPULATION 70 60 50 40 30 50 40 30 20 20 0 -2.0 -1.6 -1.2 -0.8 -0.4 0 0.4 0.8 1.2 1.6 06237-026 10 06237-023 10 0 -2.0 -1.6 -1.2 -0.8 -0.4 2.0 DRIFT (%) 0 0.4 0.8 1.2 1.6 2.0 DRIFT (%) Figure 23. X-Axis Sensitivity Drift Over Temperature, VS = 3 V Figure 26. Y-Axis Sensitivity Drift Over Temperature, VS = 3 V 100 80 90 70 80 % OF POPULATION % OF POPULATION 60 70 60 50 40 30 50 40 30 20 20 0 -2.0 -1.6 -1.2 -0.8 -0.4 0 0.4 0.8 1.2 1.6 06237-027 10 06237-024 10 0 2.0 -2.0 -1.6 -1.2 -0.8 -0.4 DRIFT (%) 0.4 0.8 1.2 1.6 2.0 Figure 24. X-Axis Sensitivity Drift Over Temperature, VS = 5 V Figure 27. Y-Axis Sensitivity Drift Over Temperature, VS = 5 V 0.33 0.33 N=8 N=8 0.32 0.31 0.31 SENSITIVITY (V/g) 0.32 0.30 0.29 0.27 -30 0.30 0.29 0.28 -20 -10 0 10 20 30 40 50 60 70 0.27 -30 80 TEMPERATURE (C) 06237-028 0.28 06237-025 SENSITIVITY (V/g) 0 DRIFT (%) -20 -10 0 10 20 30 40 50 60 TEMPERATURE (C) Figure 25. X-Axis Sensitivity vs. Temperature Eight Parts Soldered to PCB, VS = 3 V Figure 28. Y-Axis Sensitivity vs. Temperature Eight Parts Soldered to PCB, VS = 3 V Rev. 0 | Page 9 of 16 70 80 ADXL323 600 T 500 4 300 3 200 2 1 06237-030 100 06237-029 CURRENT (A) 400 0 0 1 2 3 4 5 CH1 1.00V BW CH2 500mV CH3 500mV CH4 500mV 6 SUPPLY (V) Figure 29. Typical Current Consumption vs. Supply Voltage B W M1.00ms T 9.400% A CH1 300mV Figure 30. Typical Turn-On Time; CX, CY = 0.0047 F, VS = 3 V Rev. 0 | Page 10 of 16 ADXL323 THEORY OF OPERATION The ADXL323 is a complete 2-axis acceleration measurement system on a single, monolithic IC. The ADXL323 has a measurement range of 3 g minimum. It contains a polysilicon surface micromachined sensor and signal conditioning circuitry to implement an open-loop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The accelerometer can measure the static acceleration of gravity in tilt sensing applications, as well as dynamic acceleration resulting from motion, shock, or vibration. The sensor is a polysilicon surface micromachined structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180 out-of-phase square waves. Acceleration deflects the moving mass and unbalances the differential capacitor resulting in a sensor output whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to determine the magnitude and direction of the acceleration. MECHANICAL SENSOR The ADXL323 uses a single structure for sensing the X-axis and Y-axis. As a result, the sense directions of the two axes are highly orthogonal with little cross axis sensitivity. Mechanical misalignment of the sensor die to the package is the chief source of cross axis sensitivity. Mechanical misalignment can, of course, be calibrated out at the system level. PERFORMANCE Rather than using additional temperature compensation circuitry, innovative design techniques ensure that high performance is built in to the ADXL323. As a result, there is neither quantization error nor nonmonotonic behavior, and temperature hysteresis is very low (typically less than 3 mg over the -25C to +70C temperature range). Figure 13 and Figure 16 show the zero g output performance of eight parts (X-axis and Y-axis) soldered to a PCB over a -25C to +70C temperature range. Figure 25 and Figure 28 demonstrate the typical sensitivity shift over temperature for supply voltages of 3 V. This is typically better than 1% over the -25C to +70C temperature range. The demodulator output is amplified and brought off-chip through a 32 k resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. Rev. 0 | Page 11 of 16 ADXL323 APPLICATIONS POWER SUPPLY DECOUPLING For most applications, a single 0.1 F capacitor, CDC, placed close to the ADXL323 supply pins adequately decouples the accelerometer from noise on the power supply. However, in applications where noise is present at the 50 kHz internal clock frequency (or any harmonic thereof), additional care in power supply bypassing is required because this noise can cause errors in acceleration measurement. If additional decoupling is needed, a 100 (or smaller) resistor or ferrite bead can be inserted in the supply line. Additionally, a larger bulk bypass capacitor (1 F or greater) can be added in parallel to CDC. Ensure that the connection from the ADXL323 ground to the power supply ground is low impedance because noise transmitted through ground has an effect similar to that of noise transmitted through VS. SETTING THE BANDWIDTH USING CX, CY, AND CZ The ADXL323 has provisions for band limiting the XOUT pin and the YOUT pin. Capacitors must be added at these pins to implement low-pass filtering for antialiasing and noise reduction. The equation for the 3 dB bandwidth is DESIGN TRADE-OFFS FOR SELECTING FILTER CHARACTERISTICS: THE NOISE/BW TRADE-OFF The selected accelerometer bandwidth ultimately determines the measurement resolution (smallest detectable acceleration). Filtering can be used to lower the noise floor to improve the resolution of the accelerometer. Resolution is dependent on the analog filter bandwidth at XOUT and YOUT. The output of the ADXL323 has a typical bandwidth of greater than 1600 Hz. The user must filter the signal at this point to limit aliasing errors. The analog bandwidth must be no more than half the analog-to-digital sampling frequency to minimize aliasing. The analog bandwidth can be further decreased to reduce noise and improve resolution. The ADXL323 noise has the characteristics of white Gaussian noise, which contributes equally at all frequencies and is described in terms of g/Hz (the noise is proportional to the square root of the accelerometer bandwidth). The user should limit bandwidth to the lowest frequency needed by the application to maximize the resolution and dynamic range of the accelerometer. F-3 dB = 1/(2(32 k) x C(X, Y, Z)) or more simply F-3 dB = 5 F/C(X, Y, Z) The tolerance of the internal resistor (RFILT) typically varies as much as 15% of its nominal value (32 k), and the bandwidth varies accordingly. A minimum capacitance of 0.0047 F for CX, CY, and CZ is recommended in all cases. Table 5. Filter Capacitor Selection, CX, CY, and CZ Bandwidth (Hz) 1 10 50 100 200 500 Never expose the ST pin to voltages greater than VS + 0.3 V. If this cannot be guaranteed due to the system design (for example, if there are multiple supply voltages), a low VF clamping diode between ST and VS is recommended. With the single-pole, roll-off characteristic, the typical noise of the ADXL323 is determined by rms Noise = Noise Density x ( BW x 1.6 ) Often, the peak value of the noise is desired. Peak-to-peak noise can only be estimated by statistical methods. Table 6 is useful for estimating the probabilities of exceeding various peak values, given the rms value. Capacitor (F) 4.7 0.47 0.10 0.05 0.027 0.01 Table 6. Estimation of Peak-to-Peak Noise SELF TEST The ST pin controls the self-test feature. When this pin is set to VS, an electrostatic force is exerted on the accelerometer beam. The resulting movement of the beam allows the user to test if the accelerometer is functional. The typical change in output is -500 mg (corresponding to -150 mV) in the X-axis, and 500 mg (or 150 mV) on the Y-axis. This ST pin can be left open circuit or connected to common (COM) in normal use. Peak-to-Peak Value 2 x rms 4 x rms 6 x rms 8 x rms % of Time that Noise Exceeds Nominal Peak-to-Peak Value 32 4.6 0.27 0.006 USE WITH OPERATING VOLTAGES OTHER THAN 3 V The ADXL323 is tested and specified at VS = 3 V; however, it can be powered with VS as low as 1.8 V or as high as 5.25 V. Note that some performance parameters change as the supply voltage is varied. Rev. 0 | Page 12 of 16 ADXL323 The zero g bias output is also ratiometric, so the zero g output is nominally equal to VS/2 at all supply voltages. At VS = 1.8 V, the self-test response is approximately -40 mV for the X-axis and +40 mV for the Y-axis. The supply current decreases as the supply voltage decreases. Typical current consumption at VS = 5 V is 500 A, and typical current consumption at VS = 1.8 V is 180 A. AXES OF ACCELERATION SENSITIVITY AY The output noise is not ratiometric but is absolute in volts; therefore, the noise density decreases as the supply voltage increases. This is because the scale factor (mV/g) increases, while the noise voltage remains constant. At VS = 5 V, the noise density is typically 180 g/Hz, while at VS = 1.8 V, the noise density is typically 360 g/Hz. Self-test response in g is roughly proportional to the square of the supply voltage. However, when ratiometricity of sensitivity is factored in with supply voltage, the self-test response in volts is roughly proportional to the cube of the supply voltage. For example, at VS = 5 V, the self-test response for the ADXL323 is approximately -700 mV for the X-axis and +700 mV for the Y-axis. TOP AX Figure 31. Axes of Acceleration Sensitivity, Corresponding Output Voltage Increases When Accelerated Along the Sensitive Axis XOUT = -1g YOUT = 0g TOP GRAVITY TOP TOP XOUT = 0g YOUT = -1g TOP XOUT = 1g YOUT = 0g TOP XOUT = 0g YOUT = 0g Figure 32. Output Response vs. Orientation to Gravity Rev. 0 | Page 13 of 16 XOUT = 0g YOUT = 0g 06237-032 XOUT = 0g YOUT = 1g 06237-031 The ADXL323 output is ratiometric; therefore, the output sensitivity (or scale factor) varies proportionally to the supply voltage. At VS = 5 V, the output sensitivity is typically 550 mV/g. At VS = 2 V, the output sensitivity is typically 190 mV/g. ADXL323 OUTLINE DIMENSIONS 0.20 MIN PIN 1 INDICATOR 0.20 MIN 13 PIN 1 INDICATOR 4.15 4.00 SQ 3.85 0.65 BSC TOP VIEW 16 1 12 BOTTOM VIEW 9 4 8 0.55 0.50 0.45 2.43 1.75 SQ 1.08 5 1.95 BSC 0.05 MAX 0.02 NOM SEATING PLANE 0.35 0.30 0.25 COPLANARITY 0.05 *STACKED DIE WITH GLASS SEAL. 072606-A 1.50 1.45 1.40 Figure 33. 16-Lead Lead Frame Chip Scale Package [LFCSP_LQ] 4 mm x 4 mm Body, Thick Quad (CP-16-5a*) Dimensions shown in millimeters ORDERING GUIDE Model ADXL323KCPZ 1 ADXL323KCPZ-RL1 EVAL-ADXL323Z1 1 Measurement Range 3 g 3 g Specified Voltage 3V 3V Temperature Range -25C to +70C -25C to +70C Z = Pb-free part. Rev. 0 | Page 14 of 16 Package Description 16-Lead LFCSP_LQ 16-Lead LFCSP_LQ Evaluation Board Package Option CP-16-5a CP-16-5a ADXL323 NOTES Rev. 0 | Page 15 of 16 ADXL323 NOTES (c)2007 Analog Devices, Inc. All rights reserved. Trademarks and registered trademarks are the property of their respective owners. D06237-0-6/07(0) Rev. 0 | Page 16 of 16