MEMS Sensors &
Sensing Elements
S47E.pdf
Jan.11,2019
Series
No. of
axes Range
Supply
voltage
Temperature
range Sensitivity
Signal
bandwidth
Output
type Typical applications
SCA800 1 ±2 g 3.3 V −40 ... +125 ºC 900 LSB/g 50 Hz Digital/SPI
Automotive safety critical
applications, IMU, Industrial
applications
SCA2100 2 ±2 g 3.3 V −40 ... +125 ºC 900 LSB/g 45 Hz Digital/SPI
SCA3100 3 ±2 g
±6 g
3.3 V −40 ... +125 ºC 900 LSB/g
650 LSB/g
45 Hz Digital/SPI
SCA3300 3 ±3 g
±6 g
±1.5 g
3.3 V −40 ... +125 °C 2700 LSB/g
1350 LSB/g
5400 LSB/g
70 Hz
70 Hz
70 Hz/10Hz*
Digital/SPI
* user selectable via SPI bus
Series
No. of
axes Range
Supply
voltage
Temperature
range Sensitivity
Signal
bandwidth
Output
type Typical applications
SCA830 1 ±90°, ±1 g 3.3 V -40 ... +125 ºC 32000 LSB/g 6.25 Hz Digital/SPI Levelling, Tilt sensing,
Machine control,
Structural health
monitoring, Inertial
measurement units
(IMUs), Robotics,
Positioning and
guidance systems
SCL3300 3 ±1.8g/±90°
±3.6g/±90°
- /±10°
3.3 V -40 ... +125 ºC 6000 LSB/g/*182 LSB/°
3000 LSB/g/*182 LSB/°
12000 LSB/g/*182 LSB/°
40 Hz
70 Hz
10 Hz
Digital/SPI
* Inclination output
Accelerometers
Murata is the global market leader in low-g acceleration sensors for automotive applications.
The extensive accelerometer product range includes high performance analog and digital accelerometers
for both safety critical automotive and industrial applications.
Murata accelerometers are based on the company’s proprietary 3D MEMS technology and o er a number
of excellent product features for the most demanding applications. The sensing element and the
measuring ASIC are assembled in dual fl at lead plastic package with pins for the surface mount and re-
fl ow soldering. They are environmentally protected with silicone gel, resulting in excellent performance
and reliability in humid environments and at temperature cycling. In addition, the robust sensing element
design with over damped frequency response enables excellent performance even in harsh and vibrating
environments.
Inclinometers
Murata inclination sensors are an optimum choice for high accuracy leveling and inclination measurement
instruments. Highest accuracy 3-axis inclination measurement is available with Murata’s SCL3300. This
sensor also features direct inclination angle output making it a perfect choice for variety of di erent use
cases and applications.
With the best shock durability available on the MEMS market, Murata inclinometers provide trouble-free
measurements in moving machines, vehicles, airplanes, construction machines and handheld devices.
Murata Electronics Oy’s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.com
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S47E.pdf
Jan.11,2019
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Parameter Unit B012 B080 B250
Typical
applications
Measuring range kPa 30–120 100–800 100–2500
Medical devices,
Flow meters,
Barometers,
Altimeters
Capacitance at min. pressure pF 7.8 7.5 7.3
Capacitance at max. pressure pF 11.8 13.4 13.9
Capacitance dynamics pF 4.0 5.9 6.6
Sensitivity fF/kPa 55 (@100 kPa) 6.2 (@350 kPa) 1.3 (@100 kPa)
6.5 (@2500 kPa)
Series
No. of
axes Range
Supply
voltage
Temperature
range Sensitivity
Signal
bandwidth
Output
type
Typical
applications
SCC1300 X-axis gyro
3-axis
accelerometer
±100°/s, ±2 g
±300°/s, ±6 g
5 V analog
3.3 V digital
-40 ... +125 ºC 50 LSB/(°/s),
1800 LSB/g,
18 LSB/(°/s),
650 LSB/g
50 Hz Digital/SPI
Platform
stabilization,
Motion
analysis
and control,
Guidance
and
navigation
systems
SCR1100 X-axis gyro ±100 °/s
±300 °/s
5 V analog
3.3 V digital
-40 ... +125 ºC 50 LSB/(°/s)
18 LSB/(°/s)
50 Hz Digital/SPI
SCC2130 X-axis gyro
3-axis
accelerometer
±125°/s, ±6 g 3.3 V -40 ... +125 ºC 50 LSB/(°/s)
1962 LSB/g
60 Hz/10 Hz* Digital/SPI
SCR2100 X-axis gyro ±125 °/s 3.3 V -40 ... +125 ºC 50 LSB/g 60 Hz/10 Hz* Digital/SPI
SCC2230 Z-axis gyro
3-axis
accelerometer
±125°/s, ±6 g
±125°/s, ±2 g
3.3 V -40 ... +125 ºC 50 LSB/(°/s)
1962 LSB/g (6 g)
5886 LSB/g (2 g)
60 Hz/10 Hz* Digital/SPI
* User selectable via SPI bus
Gyroscopes
Murata develops and manufactures gyroscope components based on the company’s proven 3D MEMS
technology and highly integrated electronics.
Industrial gyros o er a performance level that typically has been available only for expensive module
products. The sensing elements and measuring circuitry are assembled into a premolded plastic
dual-in-line (DIL) package, protected with silicon gel and covered with a stainless steel lid. All products are
RoHS compatible and suitable for lead-free refl ow soldering.
Pressure Sensing Elements
Murata SCB10H capacitive absolute pressure sensing elements have been designed for applications that
require a small size and ultra low power consumption. The SCB10H pressure sensing elements are ideal
for implantable medical devices thanks to their inherent accuracy, reliability, small size and enabled low
power consumption.
The SCB10H pressure sensing element allows the possibility for volume OEM customers to integrate
pressure measurement functions in an optimal way into their products.
For more information, please refer to the product datasheets available online at www.murata.com
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S47E.pdf
Jan.11,2019
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Murata Manufacturing Co., Ltd.
www.murata.com
Note
1 Export Control
For customers outside Japan:
No Murata products should be used or
sold, through any channels, for use in the
design, development, production, utilization,
maintenance or operation of, or otherwise
contribution to (1) any weapons (Weapons of
Mass Destruction [nuclear, chemical or biological
weapons or missiles] or conventional weapons)
or (2) goods or systems specially designed or
intended for military end-use or utilization by
military end-users.
For customers in Japan:
For products which are controlled items subject
to the “Foreign Exchange and Foreign Trade Law”
of Japan, the export license specifi ed by the law
is required for export.
2 Please contact our sales representatives or
product engineers before using the products in
this catalog for the applications listed below,
which require especially high reliability for the
prevention of defects which might directly
damage a third party’s life, body or property, or
when one of our products is intended for use
in applications other than those specified in
this catalog.
1 Aircra equipment
2 Aerospace equipment
3 Undersea equipment
4 Power plant equipment
5 Medical equipment
6 Transportation equipment (vehicles, trains,
ships, etc.)
7 Tra c signal equipment
8 Disaster prevention / crime prevention
equipment
9 Data-processing equipment
10 Application of similar complexity and/or
reliability requirements to the applications
listed above
3 Product specifi cations in this catalog are as of
December 2018. They are subject to change or
our products in it may be discontinued without
advance notice. Please check with our sales
representatives or product engineers before
ordering. If there are any questions, please contact
our sales representatives or product engineers.
4 Please read rating and CAUTION (for storage,
operating, rating, soldering, mounting and
handling) in this catalog to prevent smoking
and/or burning, etc.
5 This catalog has only typical specifi cations.
Therefore, please approve our product
specifi cations or transact the approval sheet
for product specifi cations before ordering.
6 Please note that unless otherwise specifi ed, we
shall assume no responsibility whatsoever for any
confl ict or dispute that may occur in connection
with the e ect of our and/or a third party’s
intellectual property rights and other related
rights in consideration of your use of our products
and/or information described or contained in our
catalogs. In this connection, no representation
shall be made to the e ect that any third parties
are authorized to use the rights mentioned above
under licenses without our consent.
7 No ozone depleting substances (ODS) under the
Montreal Protocol are used in our manufacturing
process.
Global Locations
For details please visit www.murata.com
Cat. No. S47E-4
S47E.pdf
Jan.11,2019
