MEMS Mass Flow Sensor D6F-03A3-000 19
MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS
technology for precision mass airflow
measurement.
• Precision unidirectional mass airflow up to 3 LPM
• Fast Response (< 5 msec, typical)
• Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm
• Low power consumption
• RoHS Compliant
Ordering Information
Note: Cable Assembly is sold separately.
* Contact Omron for other gases.
**Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm.
■Application examples
•Pick and place systems
•Industrial processes
•Leak detection
•Spectroscopy
•Mass flow controllers
•Scientific / test equipment
•Environmental comfort controls
•Fuel cell controls
Ratings
■Absolute Maximum Rating
■Electrical Performance
Description Case Applicable gas Flow range** Model
Mass Flow Sensor Thermoplastic resin / Aluminum Alloy Air* 0-3L/min D6F-03A3-000
Cable Connector Assembly - - - - - - - - - D6F-CABLE2
Item Symbol Rating Unit
Power supply VCC 26.4 VDC
Output voltage VOUT 6VDC
Item Symbol Condition Min. Max. Unit
Power supply VCC — 10.8 26.4 VDC
Operating temperature TOPR No condensation or icing 0 50 °C
Output voltage (max.) VOH Load resistance: 10kΩ55.7VDC
Output voltage (min.) VOL Load resistance: 10kΩ01VDC
20 MEMS Mass Flow Sensor D6F-03A3-000
Characteristics
* Contact Omron for other gases.
Operating Characteristics
D6F-03A3-000
D6F-03A3-000
Model D6F-03A3-000
Flow rate @ 0°C and 101.3 kPa 0-3L/min
Case material Thermoplastic resin
Applicable gas* Air
Electrical connection Connector (3 wire)
Withstand pressure (max.) 200kPa (about 30 psi)
Accuracy ±5% F.S. max of detected characteristics at 25°C
Operating temperature 0 to 50°C (with no icing or condensation)
Storage temperature -10 to 60°C (with no icing or condensation)
Operating and Storage humidity 85% RH max (with no icing or condensation)
Power supply voltage 10.8 to 26.4 VDC
Output signal 1 to 5 VDC, Analog Output (Load resistance: 10kΩ)
Current consumption 15 mA max. (No-Load with VCC = 12 to 24 VDC, VSS = 0V and 25°C)
Insulation resistance 20MΩ min. at 500 VDC, between lead terminal and case
Dielectric strength 500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and case
0.0 0.6 1.2 1.8 2.4 3.0
Output voltage(V)
Flow rate(L/min)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
Flow Rate (LPM) 0 0.6 1.2 1.8 2.4 3.0
Output Voltage (VDC) 1.00 ± 0.2 2.83 ± 0.2 3.77 ± 0.2 4.34 ± 0.2 4.72 ± 0.2 5.00 ± 0.2
MEMS Mass Flow Sensor D6F-03A3-000 21
Test Results (typical performance)
(5 samples, repeated 10 times each)
Dimensions
Unit: mm
D6F-03A3-000
Note: 1. When installing the pipes, use M5 screws for the joints and tighten to a torque of 1.5 N•m max. Use sealing tape to make the joints airtight.
2. Mount to a flat surface using an M3 pan head screw, tightened to 0.59 N•m max. torque.
Applicable Cable for D6F-03A3-000 (Optional - sold separately)
part number: D6F-CABLE2
Note:
Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information”
for correct use.
-3.0
-2.0
-1.0
0.0
1.0
2.0
3.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0
Flow Rate (lpm)
Repeatability (%F.S.)
InletOutlet
M5 screw
(Effective depth: 4.5)
3.1
+0.15
−0.05
+0.15
−0.05
3.4 dia. 18
±0.15
36.6
1416.8
3.1 dia. through holes
8
6.8
18
±0.05
Two, M3
screw holes
3: Vcc
1: GND
Enlarged
view
Mounting Hole Dimensions
2: Vout
Connect using the following from JST;
Housing: SHR-03V-S-B or SHR-03V-2
Terminal: SH-003T-P0.2
Wire: 28-32 AWG
15±3(5) 180±10
White wire
Black wire
Red wire
1. GND
2. Vout
3. Vcc
MEMS Mass Flow Sensor D6F-03A3-000
OMRON ON-LINE
Global - http://www.omron.com
USA - http://www.components.omron.com
Cat. No. X305-E-1 Printed in USA
OMRON ELECTRONIC
COMPONENTS LLC
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
10/10 Specifications subject to change without notice
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
