1
CSM_EE-SPY801_802_DS_E_3_2
Wafer-carrier Mounting Photomicrosensors
EE-SPY801/802
Photomicrosensors for detecting
wafer-carrier mounting.
• The mounting position is set with a pedestal.
• The contact surface with the wafer carrier uses a special chemical-
resistant fluororesin.
• The unique optical system enables stable detection of almost all
wafer-carriers.
• Light modulation effectively reduces external light interference.
• Utilizes talc-free clean cables.
Be sure to read Safety Precautions on
page 3.
For the most recent information on models that have been certified for
safety standards, refer to your OMRON website.
Ordering Information
Sensors
Accessories (Order Separately)
Note: There are no sensor functions provided.
Appearance Sensing
method
Sensing
distance Output configuration Cable length Model
Reflective type Turns ON when wafer carrier is
present. 2 m
EE-SPY801 2M
EE-SPY802 2M
Infrared li
g
ht
0 to 3 mm
Item Model
Pedestal
EE9-C01
EE9-C02
2
EE-SPY801/802
Ratings and Specifications
I/O Circuit Diagrams
Item Models EE- SPY801/802
Sensing distance
(Standard sensing object)
0 to 5 mm (White paper: 15 × 15 mm2, reflection factor: 90%)
0 to 3 mm (Black paper: 15 × 15 mm2, reflection factor: 10%)
Sensing object Transparent or opaque wafer carriers
Operation indicator Lit orange when object is detected.
Light source GaAs infrared LED with a peak wavelength of 940 nm
Supply voltage 12 to 24 VDC ±10%, ripple (p-p): 5% max.
Current consumption 30 mA max.
Control output
NPN open collector:
Load power supply voltage: 5 to 24 VDC
Load current: 100 mA max.
OFF current: 0.5 mA max.
100 mA load current with a residual voltage of 0.8 V max.
40 mA load current with a residual voltage of 0.4 V max.
Response time 5 ms max.
Ambient illumination 3,000 lx max. with incandescent light or sunlight on the surface of the receiver
Ambient temperature range Operating: −10 to +55°C
Storage: −25 to +65°C (with no icing)
Ambient humidity range Operating: 5% to 85%
Storage: 5% to 95% (with no condensation)
Vibration resistance Destruction: 1 to 500 Hz, 1.0-mm single amplitude or 150 m/s2 each in X, Y, and Z directions
3 times and for 11 min. each
Shock resistance Destruction: 500 m/s2 for 3 times each in X, Y, and Z directions
Degree of protection IEC IP30
Connecting method Pre-wired (Standard length: 2 m)
Weight (packaged) Sensor: Approx. 43 g; Accessory (Pedestal): Approx. 9 g
Material Case Ethylene tetrafluoro ethylene (ETFE)
Base plate Polybutylene phthalate (PBT)
Accessories Instruction Manual
Model Output configuration Timing charts Output circuit
EE-SPY801
EE-SPY802
Turns ON when
wafer carrier is
present.
With wafer carrier
Without wafer carrier
ON
OFF
ON
OFF
Operates
Releases
Operation indicator
(orange)
Output
transistor
Load
(etc., relay)
OUT
(Black)
Operation indicator (orange)
− (Blue)
+ (Brown)
Main
circuit
Load
12 to 24 VDC
EE-SPY801/802
3
Standard Usage
This sensor is designed to detect wafer-carrier mountings. The
bottom of the wafer carrier has a ribbed construction for the leg
section, as shown in the following diagram. The EE-SPY801/802
detects the wafer-carrier mounting using a reflective optical sensor
that detects the leg section of the wafer-carrier.
Install a Sensor (or Pedestal) at each of the four corners indicated by
a circle in the following diagram.
Safety Precautions
Refer to Warranty and Limitations of Liability.
This product is not designed or rated for ensuring
safety of persons either directly or indirectly.
Do not use it for such purposes.
Make sure that this product is used within the rated ambient
environment conditions.
● Wiring
When extending the cable, use an extension cable with conductors
having a total cross-section area of 0.15 mm2 (AWG26 equivalent).
The total cable length must be 5 m maximum.
To use a cable length longer than 5 m, attach a capacitor with a
capacitance of approximately 10 μF to the wires as shown below. The
distance between the terminal and the capacitor must be within 5 m.
● Mounting
Mount the Photomicrosensors securely on a flat surface, and tighten
the mounting screws using a tightening force of 0.30 N·m max. (Using
a spring washer is recommended to prevent the screws from
becoming loose.)
● Adjustment
The EE-SPY801/802 requires 10 ms to be in stable operation after
power is supplied.
If separate power supplies are used for the EE-SPY801/802 and load,
be sure to supply power to the EE-SPY801/802 before supplying
power to the load.
● Operating Environment
Do not use the EE-SPY801/802 in locations subject to salty air or
corrosive gases, such as hydrogen chloride gas.
Sensor
Wafer carrier leg section
Wafer carrier side view
(details omitted)
(Side view)
Sensor
A and C EE-SPY801 or EE9-C01
B and D EE-SPY802 or EE9-C02
Wafer carrier side view
(details omitted)
(Top view)
AD
BC
WARNING
Precautions for Correct Use
4
EE-SPY801/802
(Unit: mm)
Dimensions Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified.
Sensors
Accessories (Order Separately)
32
22
11
30+1.3
0
8
2
Sensing
window
Indicator window (orange)
5
2
Two, M4
(
de
p
th: 6
)
15
8
7.4
6
Vinyl-insulated round cable of
3.5 dia., 3 cores,
(0.15 mm2 with 1.0-dia. insulator);
Standard length: 2 m
3.5 15
35°
35°
+1.3
−0.3
EE-SPY801
32+1.3
−0.3
22
11
30+1.3
0
2
Sensing window
Indicator window (orange)
5
2
Two, M4
(
de
p
th: 6
)
15
8
7.4
6
Vinyl-insulated round cable
of 3.5 dia., 3 cores,
(0.15 mm2 with
1.0-dia. insulator);
Standard length: 2 m
3.5
15
35°35°
8
EE-SPY802
32+1.3
−0.3
22
11
30+1.3
0
5
2
Two, M4
(
de
p
th: 6
)
15
6
15
35°
35°
Pedestal
EE9-C01
32+1.3
−0.3
22
11
30+1.3
0
5
2
Two, M4
(
de
p
th: 6
)
15
6
15
35°35°
Pedestal
EE9-C02
Read and Understand This Catalog
Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or
comments.
Warranty and Limitations of Liability
WARRANTY
OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if specified)
from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT, MERCHANTABILITY, OR
FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS
DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED.
LIMITATIONS OF LIABILITY
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS
IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT
LIABILITY.
In no event shall the responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS
OMRON'S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT
SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.
Application Considerations
SUITABILITY FOR USE
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of products in the customer's
application or use of the products.
At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the
products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product,
machine, system, or other application or use.
The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible
uses of the products, nor is it intended to imply that the uses listed may be suitable for the products:
Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this catalog.
Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles,
safety equipment, and installations subject to separate industry or government regulations.
Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE
SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCTS ARE PROPERLY RATED AND
INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof.
Disclaimers
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other reasons.
It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made.
However, some specifications of the products may be changed without any notice. When in doubt, special model numbers may be assigned to fix or
establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual
specifications of purchased products.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.
PERFORMANCE DATA
Performance data given in this catalog is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the
result of OMRON’s test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON
Warranty and Limitations of Liability.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical,
typographical, or proofreading errors, or omissions.
2012.8
In the interest of product improvement, specifications are subject to change without notice.
OMRON Corporation
Industrial Automation Company
http://www.ia.omron.com/
(c)Copyright OMRON Corporation 2012 All Right Reserved.
