Airflow Sensors Line Guide Go with the flow of engineering leadership. All airflow sensors operate on heat transfer -- flow and differential pressure. But Honeywell Sensing and Control (S&C) offers advanced chip design, manufacturing techniques and microstructure technology, allowing our microbridge to be notably faster, smaller and more sensitive. Our silicon chip design is created from a thinfilm, thermally isolated bridge structure, containing both heater and temperature sensing elements. This provides rapid response to the air or gas flow and amount and direction, delivering a proportional output voltage. Amplified versions provide an enhanced output signal and less external circuitry, while unamplified versions allow additional external circuit options. What's more, a variety of port styles provides greater application flexibility. FEATURES Honeywell ZephyrTM Analog or Digital Airflow Sensors HAF Series-High Accuracy. Features: Total error band as low as 2.25 %FSS * Wide range of airflows from 50 SCCM to 750 SCCM * Full calibration and temperature compensation * Customizable for specific end-user needs * High stability * Low pressure drop * Linear output * Fast response time * 11-bit (analog version) or 12-bit (digital version) resolution * Low 3.3 Vdc operating voltage option and low power consumption * ASIC-based I2C digital output (digital version) * Bidirectional flow sensing capability * Insensitivity to mounting orientation * Insensitivity to altitude * Small size occupies less space on PCB * RoHS-compliant materials meet Directive 2002/95/EC Benefits: Provide an analog or digital interface for reading airflow over the specified full-scale flow span and temperature range. Thermally isolated heater and temperature sensing elements help provide a fast response to air or gas flow. Total error band as low as 2.25 %FSS allows for very precise airflow measurement, often ideal for demanding applications with high accuracy requirements. Detects presence or absence of airflow from 50 SCCM to 750 SCCM, increasing the options for integrating the sensor into the application; also has high sensitivity at very low flows. Full calibration and temperature compensation typically allow the customer to remove additional components associated with signal conditioning from the PCB, reducing PCB size as well as costs often associated with those components (e.g., acquisition, inventory, assembly). Customizable for specific end-user needs. High stability reduces errors due to thermal effects and null shift to provide accurate readings over time, often eliminating need for system calibration after PCB mount and periodically over time. Low pressure drop typically improves patient comfort in medical applications, and reduces noise and system wear on other components such as motors and pumps. Linear output provides more intuitive sensor signal than the raw output of basic airflow sensors, which can help reduce production costs, design, and implementation time. Fast response time allows the customer's application to respond quickly to airflow change, important in critical medical and industrial applications. 11-bit (analog version) or 12-bit (digital version) resolution increases ability to sense small airflow changes, allowing customers to more precisely control their application. Low 3.3 Vdc operating voltage option and low power consumption allow for use in battery-driven and other portable applications. ASIC-based I2C digital output (digital version) compatibility eases integration to microprocessors or microcontollers, reducing PCB complexity and component count. Bidirectional flow sensing capability eliminates the need for two airflow sensors, helping to reduce production costs and implementation time. Insensitivity to mounting orientation allows customer to position sensor in most optimal point in the system, eliminating concern for positional effects. Insensitivity to altitude eliminates customer-implemented altitude adjustments in the system, easing integration and reducing production costs continued on page 5 Airflow Sensors Line Guide Our technology is most sensitive to your needs. Honeywell S&C offers specially crafted airflow sensor housings to precisely direct and control the airflow across the element. The mechanical package design allows easy mounting to circuit boards, plus other advantages: amplified or un-amplified microbridge airflow; state-ofthe-art silicon micromachining; sensitivity to low flows (30 SCCM to 300 SLPM); accurate low pressure sensing 0.003 mbar to 10 mbar (0.0001 in H20 to 4.0 in H20); analog or digital output. Honeywell S&C airflow sensors offer enhanced performance in multiple potential applications, including HVAC system damper control, gas analysis, leak detection equipment, gas metering and chromatography, process control, and vent hoods. In the medical industry, potential applications range from respiratory equipment such as respirators, spirometers, anesthesia and oxygen delivery to sleep apnea equipment. 2 Honeywell ZephyrTM Analog or Digital Airflow Sensors HAF Series-High Accuracy Signal conditioning amplified, digital Technology silicon die with thermally isolated heater Flow/pressure range 50 SCCM to 750 SCCM Total error band as low as 2.25 %FSS Output analog (Vdc), digital (I2C) Power consumption 3.3 Vdc: 40 mW typ. (no load) (analog) 23 mW typ. (no load) (digital) 5.0 Vdc: 55 mW typ. (no load) (analog) 38 mW typ. (no load) (digital) Port style long port, short port Media capability non-corrosive dry gases Compensated temperature range 0 C to 50 C [32 F to 122 F] Operating temperature range -20 C to 70 C [-4 F to 158 F] Airflow Sensors AWM1000 Series AWM2000 Series Signal conditioning unamplified, compensated unamplified, compensated Technology silicon die silicon die Flow/pressure range 200 SCCM, 1000 SCCM to -600 SCCM, 5,0 mbar [2.0 in H20], 10,0 mbar [4.0 in H20] 30 SCCM, 1000 SCCM, 10,0 mbar [4.0 in H20] Output analog analog Power consumption 30 mW typ. 30 mW typ. Port style straight straight Media capability dry gas only dry gas only Operating temperature range -25 C to 85 C [-13 F to 185 F] -25 C to 85 C [-13 F to 185 F] www.honeywell.com/sensing Airflow Sensors AWM3000 Series Signal conditioning amplified Technology silicon die Flow/pressure range 30 SCCM, 200 SCCM, 1000 SCCM, 0 mbar to 1,25 mbar [0 in H20 to 0.5 in H20], 0 mbar to 5,0 mbar [0 in H20 to 2 in H20], 5,0 mbar [2.0 in H20] Output analog Power consumption 50 mW or 100 mW typ. Port style straight Media capability dry gas only Operating temperature range -25 C to 85 C [-13 F to 185 F] Airflow Sensors AWM5000 Series AWM700 Series amplified amplified Technology silicon die silicon die Flow/pressure range 0 SLPM to 5,0 SLPM, 0 SLPM to 10,0 SLPM, 0 SLPM to 15,0 SLPM, 0 SLPM to 20,0 SLPM 300 SLPM Output analog analog Signal conditioning Power consumption 100 mW max. 60 mW max. Port style 1/4 in-18 NPT 22 mm tapered Media capability dry gas only dry gas only Operating temperature range -20 C to 70 C [-4 F to 158 F] -25 C to 85 C [-13 F to 185 F] www.honeywell.com/sensing 3 Airflow Sensors Line Guide Airflow Sensors Signal conditioning AWM40000 Series AWM90000 Series unamplified (compensated) or amplified uncompensated Technology silicon die silicon die Flow/pressure range 25,0 SCCM, 1,0 SLPM, 6,0 SLPM 200 SCCM, 5,0 mbar [2.0 in H20] Output analog analog Power consumption 60 mW max., 75 mW max. 50 mW typ. Port style manifold parallel Media capability dry gas only dry gas only Operating temperature range -40 C to 125 C [-40 F to 251 F] (inclusive) -25 C to 85 C [-13 F to 185 F] 4 www.honeywell.com/sensing by not having to purchase additional sensors for altitude adjustments. Small size occupies less space on PCB, allowing easier fit and potentially reducing production costs; PCB size may also be reduced for easier fit into spaceconstrained applications. RoHS-compliant materials meet Directive 2002/95/EC. Designed for use in medical equipment such as anesthesia delivery machines, ventricular assist devices (heart pumps), hospital diagnostics (spectrometry, gas chromatography), nebulizers, oxygen concentrators, patient monitoring systems (respiratory monitoring), sleep apnea machines, as well as industrial analytical instrumentation, gas meters/leak detection, HVAC filters, and meteorlogical equipment. Airflow Sensors AWM1000 Series. Features: Precision silicon micromachining * Sensitivity to low flows (200 SCCM to 1000 SCCM) * Enhanced response time * Low power consumption * Analog output * Cost-effective * Bidirectional sensing capability * Low differential pressure sensing * Sensor to sensor interchangeability * Unamplified * Laser trimmed * Mass flow and differential pressure sensing Benefits: Cost-effective microbridge technology for potential applications including HVAC damper control, process control, respirators, oxygen concentrators, gas metering, and chromatography. Differential amplifier circuitry provides output gain and/or introduces voltage offsets to sensor output. AWM2000 Series. Features: Precision silicon micromachining * Sensitivity to low flows (30 SCCM to 1000 SCCM) * Enhanced response time * Low power consumption * Analog output * Cost-effective * Bidirectional sensing capability * Low differential pressure sensing * Actual mass airflow sensing * Unamplified * Laser trimmed * Sensor to sensor interchangeability * Mass flow and differential pressure sensing Benefits: Cost-effective microbridge technology for potential applications including process control, respirators, ventilators, oxygen concentrators, and leak detection equipment. Differential amplifier circuitry provides output gain and/or introduces voltage offsets to sensor output. including HVAC damper control, oxygen concentrators, leak detection equipment, gas metering, and chromatography. 1 Vdc to 5 Vdc linear output possible regardless of flow range or calibration gas. Active laser trimming improves interchangeability. AMP-compatible connector often provides reliable connection in demanding applications. AWM3000 Series. Features: Precision silicon micromachining * Sensitivity to low flows (30 SCCM to 1000 SCCM) * Enhanced response time * Low power consumption * Analog output * Cost-effective * Low differential pressure sensing * Laser trimmed * Amplified * Actual mass airflow sensing * Mass flow and differential pressure sensing * Sensor to sensor interchangeability Benefits: Amplified signal conditioning increases gain and introduces voltage offsets to sensor output. On board heater control circuit. Laser trimmed for improved sensor interchangeability. Potential applications include HVAC damper control, process control, respirators, leak detection equipment, gas metering, and chromatography. AWM5000 Series. Features: Precision silicon micromachining * Sensitivity to low flows (5 SLPM to 20 SLPM) * Enhanced response time * Low power consumption * Analog output * Cost-effective * Onboard signal conditioning * Venturi type flow housing * Remote mounting capability * Laser trimmed * "AMP" compatible connector * Rugged plastic package * Amplified * Mass flow pressure sensing * Sensor to sensor interchangeability Benefits: Performs amplification, linearization, temperature compensation, and gas calibration. Separate gas calibration types (nitrogen, carbon dioxide, nitrous oxide or argon). Microbridge chip in direct contact with flow stream reduces error due to orifice or bypass channel clogging. In-line flow measurement potential applications AWM700 Series. Features: Precision silicon micromachining * Sensitivity to low flows (200 SLPM to 300 SLPM) * Enhanced response time * Low power consumption * Analog output * Cost-effective * High flow range capability in a small package * Highly stable null and full-scale * Compact package design * Extremely low hysteresis and repeatability errors * AMP-compatible connector * Amplified * Mass flow and differential pressure sensing * Sensor to sensor interchangeability Benefits: Performs amplification and temperature compensation. Specially designed bypass flow housing provides in-line flow measurement. Provides combination of enhanced reliability, accuracy, and precision operating characteristics for use in potential medical ventilation equipment and medical and analytical instrumentation applications. Low power consumption for portable devices and battery-powered applications. Enhanced accuracy over life reduces need for recalibration. Snapin AMP-compatible connector provides reliable connection. AWM40000 Series. Features: Precision silicon micromachining * Sensitivity to low flows (25 SCCM to 6 SLPM) * Enhanced response time * Low power consumption * Analog output * Cost-effective * Repeatable response * Laser trimmed * Standard mounting centers * Amplified and unamplified * Mass flow pressure sensing * Sensor to sensor interchangeability Benefits: Sensitive to low flows, adaptable for use with higher flows for www.honeywell.com/sensing 5 potential applications including process control, respirators, ventilators, oxygen concentrators, gas metering, and chromatography. Low power consumption for portable devices and battery-powered applications. Laser-trimmed thick-film and thin-film resistors designed to provide consistent interchangeability from one device to the next. AWM90000 Series. Features: Precision silicon micromachining * Sensitivity to low flows (200 SCCM) * Low power consumption * Analog output * Cost-effective * Bidirectional sensing capability * Low differential pressure sensing * Actual mass airflow sensing * Enhanced response time * Uncompensated * Mass flow and differential pressure sensing Benefits: Proven thermal bridge technology. Two versions available, mass flow and differential pressure. Provides ability to customize sensor function for potential applications including HVAC damper control, process control, respirators, ventilators, oxygen concentrators, leak detection equipment, gas metering, and chromatography. Low power consumption for portable devices and battery-powered applications. Warranty. Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship. Honeywell's standard product warranty applies unless agreed to otherwise by Honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace, at its option, without charge those items it finds defective. The foregoing is buyer's sole remedy and is in lieu of all warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no event shall Honeywell be liable for consequential, special, or indirect damages. While we provide application assistance personally, through our literature and the Honeywell web site, it is up to the customer to determine the suitability of the product in the application. Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this printing. However, we assume no responsibility for its use. For more information about Sensing and Control products, visit www.honeywell. com/sensing or call +1-815-235-6847 Email inquiries to info.sc@honeywell.com Sensing and Control Automation and Control Solutions Honeywell 1985 Douglas Drive North Golden Valley, MN 55422 USA +1-815-235-6847 www.honeywell.com/sensing 008150-5-EN IL50 GLO February 2012 Copyright (c) 2012 Honeywell International Inc. All rights reserved.