S7960-1008S - Hamamatsu Photonics K.K.

Features Applications

IMAGE SENSOR

CCD area image sensor

Back-thinned FFT-CCD for high-speed application

S7960/S7961-1008

S7960/S7961-1008 are FFT-CCD area image sensors specifically designed for high speed operation. A high frame rate is attained by employing

a wide band width on-chip amplifier. In binning operation, S7960/S7961-1008 can be used as a linear image sensor having a long aperture in the

direction of the device length. The binning operation offers significant improvement in signal-to-noise ratio and signal processing speed compared

to conventional methods by which signals are digitally added by an external circuit. In area scan operation, S7960/S7961-1008 can be used as a

high frame rate camera. S7960/S7961-1008 also feature low dark signal (MPP mode operation). S7960/S7961-1008 have an effective pixel size

of 24 × 24 µm and is available in image areas of 24.576 (H) × 6.000 (V) mm.

One-stage peltier cooler is built into the package for thermoelectric cooling (S7961-1008). At room temperature operation, the device can be

cooled down to -10 ˚C (Typ.) without using any other cooling technique. In addition, since both the CCD chip and the peltier cooler are

hermetically sealed, no dry air is required, thus allowing easy handling.

■ Selection and order guide

Type No. Cooling Number of

total pixels

Number of

active pixels

Active area

[mm (H) × mm (V)]

S7960-1008 Non-cooled

S7961-1008 One-stage TE-cooled 1044 × 256 1024 × 250 24.576 × 6.000

A window material can be selected upon need, and the following is available.

AR-coated sapphire (standard): expressed by S #

Quart: expressed by Q #

Temporary window: expressed by N #

# This should be added at the end of a type No. when ordered.

ex. S7960-1008S: AR-coated sapphire

■ General ratings

Parameter Specification

CCD structure Full frame transfer

Fill factor 100 %

Number of active pixels 1024 (H) × 250 (V)

Pixel size 24 (H) × 24 (V) µm

Active area 24.576 (H) × 6.000 (V) mm

Vertical clock phase 2 phase

Horizontal clock phase 2 phase

Output circuit Two-stage MOSFET source follower

Package 24 pin ceramic package

Window AR coated sapphire

Quartz, temporary window are available upon request

● High-speed on-chip amplifier

● Greater than 90 % quantum efficiency

● Wide spectral response range

● Built-in TE-cooler

● MPP operation

● Non-cooled type: S7960-1008

One-stage TE-cooled type: S7961-1008

(Two-stage TE-cooled type is optional)

● High-speed spectrometer

● High-speed UV imaging

● Optical and spectrophotometric analyzer

CCD area image sensor

S7960/S7961-1008

■ Absolute maximum ratings (Ta=25 °C)

Parameter Symbol Min. Typ. Max. Unit

Operating temperature Topr -50 - +30 °C

Storage temperature Tstg -50 -+70 °C

OD voltage VOD -0.5 - +25 V

RD voltage VRD -0.5 -+18 V

ISV voltage VISV -0.5 - +18 V

ISH voltage VISH -0.5 -+18 V

IGV voltage VIG1V, VIG2V -10 - +15 V

IGH voltage VIG1H, VIG2H -10 -+15 V

SG voltage VSG -10 - +15 V

OG voltage VOG -10 -+15 V

RG voltage VRG -10 - +15 V

TG voltage VTG -10 -+15 V

Vertical clock voltage VP1V, VP2V -10 - +15 V

Horizontal clock voltage VP1H, VP2H -10 -+15 V

■ Operating conditions (MPP mode, Ta=25 °C)

Parameter Symbol Min. Typ. Max. Unit

Output transistor drain voltage VOD 12 15 18 V

Reset drain voltage VRD 11.5 12 12.5 V

Output gate voltage VOG 135V

Substrate voltage VSS - 0 - V

Test point (vertical input source) VISV -V

RD -V

Test point (horizontal input source) VISH - VRD - V

Test point (vertical input gate) VIG1V, VIG2V -8 0 - V

Test point (horizontal input gate) VIG1H, VIG2H -8 0 - V

High VP1VH, VP2VH 468

Vertical shift register

clock voltage Low VP1VL, VP2VL -9 -8 -7 V

High VP1HH, VP2HH 468

Horizontal shift register

clock voltage Low VP1HL, VP2HL -9 -8 -7 V

High VSGH 468

Summing gate voltage Low VSGL -9 -8 -7 V

High VRGH 468

Reset gate voltage Low VRGL -9 -8 -7 V

High VTGH 468

Transfer gate voltage Low VTGL -9 -8 -7 V

■ Electrical characteristics (Ta=25 °C)

Parameter Symbol Remark Min. Typ. Max. Unit

Signal output frequency fc - - 1 10 MHz

Reset clock frequency frg - - 1 10 MHz

Vertical shift register capacitance CP1V, CP2V - - 6,400 - pF

Horizontal shift register capacitance CP1H, CP2H - - 300 -pF

Summing gate capacitance CSG --7-pF

Reset gate capacitance CRG - - 7 - pF

Transfer gate capacitance CTG - - 150 - pF

Transfer efficiency CTE *10.99995 0.99999 - -

DC output level Vout *271013V

Output impedance Zo *2-500 -W

Power dissipation P *2, *3- 100 - mW

*1: Charge transfer efficiency per pixel, measured at half of the full well capacity.

*2: VOD=15 V, Load resistance=2.2 kW

*3: Power dissipation of the on-chip amplifier.

CCD area image sensor

S7960/S7961-1008

■ Electrical and optical characteristics (Ta=25 °C, unless otherwise noted)

Parameter Symbol Remark Min. Typ. Max. Unit

Saturation output voltage Vsat - Fw × Sv - V

Vertical 150 300 -

Full well

capacity Horizontal Fw *4

150 300 - ke-

CCD node sensitivity Sv *51.8 2.2 -µV/e-

25 °C - 4,000 12,000

Dark current

(MPP mode) 0 °C DS *6

- 200 600 e-/pixel/s

Readout noise Nr *7-60 120 e-rms

Line binning 1,250 5,000 -

Dynamic range Area scanning DR *8

1,250 5,000 - -

Spectral response range l- - 200 to 1,100 -nm

Photo response non-uniformity PRNU *9--±10%

*4: Large horizontal full well for line binning operation.

*5: VOD=15 V , Load resistance=2.2 kW

*6: Dark current nearly doubles for every 5 to7 °C increase in temperature.

*7: -40 °C, operating frequency is 1 MHz.

*8: DR = Fw / Nr

*9: Measured at half of the full well capacity.

PRNU (%) = noise / signal × 100

Noise: fixed pattern noise (peak to peak)

■ Pin connections

S7960 series S7961 seriesPin

No. Symbol Description Symbol Description Remark

1RD Reset drain RD Reset drain

2OS Output transistor source OS Output transistor source

3OD

Output transistor drain OD Output transistor drain

4OG Output gate OG Output gate

5SG Summing gate SG Summing gate Same timing as P2H

6NC NC

7NC NC

8P2H CCD horizontal register clock-2 P2H CCD horizontal register clock-2

9P1H

CCD horizontal register clock-1 P1H CCD horizontal register clock-1

10 IG2H Test point (horizontal input gate-2) IG2H Test point (horizontal input gate-2) Shorted to 0 V

11 IG1H Test point (horizontal input gate-1) IG1H Test point (horizontal input gate-1) Shorted to 0 V

12 ISH Test point (horizontal input source) ISH Test point (horizontal input source) Shorted to RD

13 TG Transfer gate TG Transfer gate Same timing as P2V *10

14 P2V CCD vertical register clock-2 P2V CCD vertical register clock-2

15 P1V CCD vertical register clock-1 P1V CCD vertical register clock-1

16 NC Th1 Thermistor

17 NC Th2 Thermistor

18 NC P- TE-cooler-

19 NC P+ TE-cooler+

20 SS Substrate (GND) SS Substrate (GND)

21 ISV Test point (vertical input source) ISV Test point (vertical input source) Shorted to RD

22 IG2V Test point (vertical input gate-2) IG2V Test point (vertical input gate-2) Shorted to 0 V

23 IG1V Test point (vertical input gate-1) IG1V Test point (vertical input gate-1) Shorted to 0 V

24 RG Reset gate RG Reset gate

*10: TG is an isolation gate between vertical register and horizontal resister.

In standard operation, the same pulse of P2V should be applied to the TG.

CCD area image sensor

S7960/S7961-1008

QUANTUM EFFICIENCY (%)

WAVELENGTH (nm)

(Typ. Ta=25 ˚C)

200 400 600 800 1000 1200

100

FRONT-SIDED

(UV COAT)

BACK-THINNED

KMPDB0058EA

■ Spectral response without window

100 200

WAVELENGTH (nm)

TRANSMITTANCE (%)

300 400 500 600 700 800 900

1000 1100 1200

100 (Typ. Ta=25 ˚C)

QUARTZ WINDOW

AR COATED SAPPHIRE

KMPDB0110EA

KMPDA0106EA

3.0

PHOTOSENSITIVE SURFACE

4.0

2.4

4.8

3.4

WINDOW 28.6

22.9

22.4

ACTIVE AREA 24.576

6.000

8.2

44.0

2.54

1st PIN INDEX MARK

(24 ×) 0.5

1 2

24 23

INDEX MARK

(24 ×) 0.5

6.9

1.0

3.0

6.3

4.8

PHOTOSENSITIVE SURFACE

7.7

1st PIN INDEX MARK

6.000

4.0

19.0

22.4

22.9

44.0

52.0

60.0

2.54

WINDOW 28.6

ACTIVE AREA 24.576

8.2

TE-COOLER

1 2

24 23

INDEX MARK

KMPDA0105EA

■ Dimensional outlines (unit: mm)

■ Spectral transmittance characteristic

of window material

S7960-1008 S7961-1008

CCD area image sensor

S7960/S7961-1008

KMPDC0096EA

■ Device structure, line output format

2 BEVEL

250 SIGNAL OUT

4 BLANK 4 BLANK

V=250

H=1024

4 BEVEL

THINNING

12345

6 BEVEL

1024

SIGNAL OUT

6 BEVEL

...

Pixel format

Left ¬ Horizontal direction ® Right

Blank Bevel Effective Bevel Blank

4 6 1024 6 4

Top ¬ Vertical direction ® Bottom

Bevel Effective Bevel

22504

KMPDC0097EA

■ Timing chart

● Area scanning 1 (low dark current mode)

P1V

P2V

P1H

P2H, SG

Vos

P1H

P2H, SG

Vos

INTEGRATION PERIOD

(Shutter must be opened)

Tpwv

READOUT PERIOD

(Shutter must be closed)

123

EXPANDED VIEW

DARK SIGNAL

PHOTO GENERATED SIGNAL

D1 D2

1 HORIZONTAL-SCANNING READOUT PERIOD

P2V

Tovr

Tpwh, Tpws

Tpwr

CCD area image sensor

S7960/S7961-1008

Parameter Symbol Remark Min. Typ. Max. Unit

Pulse width Tpwv 11 - - µs

P1V, P2V, TG Rise and fall time Tprv, Tpfv *

20 - - ns

Pulse width Tpwh 50 - - ns

Rise and fall time Tprh, Tpfh 10 - - nsP1H, P2H

Duty ratio -

*

-50 - %

Pulse width Tpws 50 - - ns

Rise and fall time Tprs, Tpfs 10 - - ns

Duty ratio -

-50- %

Pulse width Tpwr 15 - - ns

RG Rise and fall time Tprr, Tpfr -5 - - ns

TG  P1H Overlap time Tovr - 3 - - µs

*11: Symmetrical pulses should be overlapped at 50 % of maximum amplitude.

KMPDC0104EA

● Area scanning 2 (large full well mode)

P1V

P2V

P1H

P2H, SG

Vos

P1H

P2H, SG

Vos

123

EXPANDED VIEW

Tpwr

DARK SIGNAL

PHOTO GENERATED SIGNAL

D1 D2

1 HORIZONTAL-SCANNING READOUT PERIOD

P2V

Timing

Chart:

Area

Scanning

(S7960/S7961

Serie )

INTEGRATION PERIOD

(Shutter must be opened)

Tpwv

READOUT PERIOD

(Shutter must be closed)

Tovr

Tpwh, Tpws

Parameter Symbol Remark Min. Typ. Max. Unit

Pulse width Tpwv 11 - - µs

P1V, P2V, TG Rise and fall time Tprv, Tpfv *

20 - - ns

Pulse width Tpwh 50 - - ns

Rise and fall time Tprh, Tpfh 10 - - nsP1H, P2H

Duty ratio -

*

-50 - %

Pulse width Tpws 50 - - ns

Rise and fall time Tprs, Tpfs 10 - - ns

Duty ratio -

-50- %

Pulse width Tpwr 15 - - ns

RG Rise and fall time Tprr, Tpfr -5 - - ns

TG  P1H Overlap time Tovr - 3 - - µs

*12: Symmetrical pulses should be overlapped at 50 % of maximum amplitude.

CCD area image sensor

S7960/S7961-1008

KMPDC0017EA

● Line binning

P1V

P2V

P1H

P2H, SG

Vos

LINE BINNING PERIOD

D1 D2

READOUT PERIOD

Tpwv

Tpwh, Tpws

Tpwr

Parameter Symbol Remark Min. Typ. Max. Unit

Pulse width Tpwv 11 - - µs

P1V, P2V, TG Rise and fall time Tprv, Tpfv *!

20 - - ns

Pulse width Tpwh 50 - - ns

Rise and fall time Tprh, Tpfh 10 - - nsP1H, P2H

Duty ratio -

*!

-50 - %

Pulse width Tpws 50 - - ns

Rise and fall time Tprs, Tpfs 10 - - ns

Duty ratio -

-50- %

Pulse width Tpwr 15 - - ns

RG Rise and fall time Tprr, Tpfr -5 - - ns

TG  P1H Overlap time Tovr - 3 - - µs

*13: Symmetrical pulses should be overlapped at 50 % of maximum amplitude.

■ Specifications of built-in TE-cooler (S7961-1008)

Parameter Symbol Condition Min. Typ. Max. Unit

Internal resistance Rint Ta=27 °C - 1.2 - W

Maximum current *" Imax Th *#=27 °C

DT *$= DTmax - - 3.0 A

Maximum voltage Vmax

Th *#=27 °C

DT = DTmax

I = Imax

--3.6V

Maximum heat absorption *% Qmax Tc * &=Th *#=27 °C

I=Imax - - 5.0 W

Maximum temperature at hot side - - - 70 °C

CCD temperature -Ta=25 °C --10 0°C

*14: If the current is greater than Imax, the heat absorption begins to decrease due to the Joule heat. It should be noted that this

value is not a damage threshold. To protect the thermoelectric cooler and maintain stable operation, the supply current

should be less than 60 % of this maximum current.

*15: Temperature at hot side of thermoelectric cooler.

*16: DT = Th - Tc

*17:This is a theoretical heat absorption level that offsets the temperature difference in the TE-cooler element when the

maximum current is supplied to the unit.

*18: Temperature at cool side of thermoelectric cooler.

CCD area image sensor

S7960/S7961-1008

(Typ. Ta=25 ˚C)

10 kΩ

220 240 260

TEMPERATURE (K)

RESISTANCE

280 300

100 kΩ

1 MΩ

■ Precaution for use (Electrostatic countermeasures)

● Handle these sensors with bare hands or wearing cotton gloves. In addition, wear anti-static clothing or use a wrist band with

an earth ring, in order to prevent electrostatic damage due to electrical charges from friction.

● Avoid directly placing these sensors on a work-desk or work-bench that may carry an electrostatic charge.

● Provide ground lines or ground connection with the work-floor, work-desk and work-bench to allow static electricity to dis-

charge.

● Ground the tools used to handle these sensors, such as tweezers and soldering irons.

It is not always necessary to provide all the electrostatic measures stated above. Implement these measures according to the

amount of damage that occurs.

■ Heating/cooling rate

The heating/cooling rate should be set at less than 5 K/min.

■ Specifications of built-in temperature sensor (S7961-1008)

chip thermistor is built in the same package with a CCD chip, and the CCD chip temperature can be monitored with it. A relation

between the thermistor resistance and absolute temperature is expressed by the following equation.

R1 = R2 × expB (1 / T1 - 1 / T2)

where R1 is the resistance at absolute temperature T1 (K)

R2 is the resistance at absolute temperature T2 (K)

B is so-called the B constant (K)

The characteristics of the thermistor used are as follows.

R (298K) = 10 kW

B (298K / 323K) = 3450 K

KMPDB0111EA

HAMAMATSU PHOTONICS K.K., Solid State Division

1126-1 Ichino-cho, Hamamatsu City, 435-8558 Japan, Telephone: (81) 053-434-3311, Fax: (81) 053-434-5184, http://www.hamamatsu.com

U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218

Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658

France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10

United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777

North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01

Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741

Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.

Cat. No. KMPD1034E07

Feb. 2003 DN

VOLTAGE (V)

CCD TEMPERATURE (˚C)

-40

-30

432

CURRENT (A)

-20

-10

(Typ. Ta=25 ˚C)

VOLTAGE vs. CURRENT

CCD TEMPERATURE vs. CURRENT

KMPDB0179EA