2D CMOS Laser Type
High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.
ZS-HLDS150
ZS-HLDS60
1500±500mm
1500
600
100
50
20
15
10 600±350mm 100±20mm 50±5mm 20±1mm 25±2mm 15±0.75mm
10±0.5mm
ZS-HLDS10
ZS-LD10GT/LD15GT
ZS-HLDS5T
ZS-HLDS2T ZS-HLDS2VT
02
Measuring center distance
Highly Advanced Sensing Fu
More P.18
Enables onsite high-speed logging of data in external
memory (compact flash card) for the Sensor Controller or
Multi-Controller.
Effective for building traceability systems, statistical
process control (SPC), and much more.
Ideal for ZS Series Data Logging
Data Storage Unit ZS-DSU
ZS-DSU
High-speed sampling rate: 150 µs
Powerful support for logging data using various
trigger functions.
More P.17
Enables full application of Sensor
Controller information.
Multi-Controller ZS-MDC
Transfers data between multi-connected Sensor
Controllers and performs high-speed
multiprocessing.
Connects to up to nine Sensor Controllers.
More P.6
Range of models with measuring center distance of 20 to 1,500 mm.
Achieves maximum resolution of 0.25 µm.
Maximum response speed of 110 µs.
Parallel output supported.
Very High-performance Sensors that Support Core Quality
from Very Long-range to Extremely Precise Measurements
ZS-HL Series
See Record Control
03
USB
Business card size
nctions in a Compact Package
More P.14
Diffuse Reflective Sensors
Regular
Reflective Sensors
Measuring
center distance
200
350
80
130
50
40
20
ZS-LD130
ZS-LD200
ZS-LD350S
ZS-LD50/LD50S
ZS-LD80
ZS-LD40T
ZS-LD20T/LD20ST
Spot beam Line beam Line beam Line beam
Line/spot beam
Line/spot beam
Line beam
More P.12
Enable maximum sensing performance with fully digital
processing.
Sensor Controllers ZS-HLDC/LDC
Culmination of OMRON's lead-edge digital technology. Enables easy
utilization of the ultimate in measurement performance.
Business card size
USB provided as a standard feature.
Beam Shapes
Spot and line beam selection.
Wide Range of Products
Long-range, middle-range, and short-range models.
ZS-L Series
Manipulate
Monitor
More P.19
Setting Software for the ZS Series
SmartMonitor
Professional ZS-SW11E V3
Meets a wide range of logging needs.
Supports high-speed simultaneous multichannel waveform
graphs.
Excel macros provided for simple analysis.
ZS-LDC
Standard Sensors Most Suitable for a Variety of High-precision
Displacement Measurements, Including Spot Detection,
Wide-range Detection, and Long-distance Detection.
+XX-XX-XXX-XXX
+XX-XX-XXX-XXX
High-performance Sensors
Standard Sensors
Ratings and Specifications
Expansion Units
Advanced technology is carried
Smart Sensor
04
High Performance
ZS-HL Series
Standard
ZS-L Series
Very High-performance Sensors that Support Core Quality from Very Long-range to
Extremely Precise Measurements
Standard Sensors Ideal for a Variety of High-precision Displacement Measurements,
Including Spot Detection, Wide-range Detection, and Long-distance Detection
ZS-LD20ST
Ideal for measurements
requiring discrimination
between minute parts or
fine shape repeatability.
ZS-LD40T
Ideal for measuring glass
thickness and nozzle
gaps when coating glass
with resist or sealer.
ZS-LD50/LD80
Ideal for measuring the
warp of resin blades in
copy machine toners.
ZS-LD200
Ideal for checking the
precision of door
installations.
ZS-LD350S
Ideal for checking the
flatness of robot arms
that transport wafers in
load ports.
Main Applications
3D shape measurement using
automatic X-Y stage
Sealer coating Glass substrate
ZS-LD10GT/LD15GT
Ideal for measuring
and controlling
dispenser nozzle gaps
when applying sealer.
ZS-HLDS2T
Ideal for measuring
the thickness of sili-
cone or compound
semiconductor wafers
in polishing and testing
processes.
ZS-HLDS5T
Ideal for measuring
liquid gasket (FPIG)
application amounts.
Prevents defects such
as insufficient seal.
ZS-HLDS10
Ideal for confirming
positioning and
repeatability accuracy
of XY stages.
ZS-HLDS60
Ideal for level
detection for liquid
crystal coaters and
PDP fluorescent
substances.
ZS-HLDS150
Protruding objects and
steps can be measured
from a distance for
measurement objects
that cannot be
accessed easily.
ZS-HLDS2VT
Ideal for measuring
the potting resin height
for electronic
components.
05
Measuring Car Bodies
Measuring Door Attachment Offsets
Measuring Tire Exteriors
Measuring Electrode Thickness
on Compound Semiconductors Measuring Wafer Warping
and Thickness Measuring Arm Inclination
Measuring Glass Undulation
Measuring Glass Surfaces
Inspecting Glass Heights (Autofocus)
Inspecting Board Heights
Inspecting for Board Coplanarity
Measuring Shape for
Positioning Laminated Ceramics
Simultaneous Measuring of Touch
Panel Film Thickness and Gap
DVD Chassis Flatness Inspections
Digital Camera Tube Lens Inspection
Measuring Electrode
Thickness on Dielectrics
Moving Workpieces (Black Rubber)
Measuring Depth of O-Ring Insertion
Automobile and Automotive Parts Electronic Components
Semiconductors Household Appliances and Audio-visual
LCDs and PDPs Rubber, Resin, and Film
Applications by Industry
SmartMonitor graph screen
Spot beam
1 axis scan
Capacitor
PCB
Line beam
Advanced technology is carried
Smart Sensor
06
Wide lineup of products from 0.25 µm high-resolution models
to 1,500 mm long-range models.
Advanced sensing technology packed into the best Sensor Head for the highest sensing precision
ZS-HL Series Product Lineup 2D CMOS High-end Displacement Sensors
High-performance Sensors
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS150
1500±500 mm
500 µm
±0.2%F.S.
1.5 mm × 40 mm
ZS-HLDS60
600±350 mm
8 µm
±0.07%F.S.
0.3 mm × 16 mm
ZS-HLDS10
100±20 mm
1 µm
±0.1%F.S.
60 µm × 3.5 mm
ZS-HLDS5T
50±5 mm
0.25 µm
±0.1%F.S.
30 µm × 1 mm
ZS-HLDS2T
20±1 mm
0.25 µm
±0.05%F.S.
20 µm × 1 mm
ZS-HLDS2VT
25±2 mm
0.6 µm
±0.2%F.S.
45 µm × 2.2 mm
ZS-LD10GT/LD15GT
10±0.5 mm /15±0.75 mm
0.25 µm
±0.1%F.S.
25 µm × 900 µm
High-performance Sensors
High grade
07
Extreme Stability
Ideal Size and Stability
Head Size Superior Moving Resolution
Increased Lens Resolution
Reduced Error for Different Materials
2D CMOS
Complete sensing stability with optimum Sensor Head
size for best performance and holding mechanism
secured at 3 points. (See note.)
Moving resolution (error based on workpiece surface
position) has been reduced dramatically by optimizing
the optical system with increased sensitivity and
resolution of the light receiving lenses.
With a CCD, the charge overflows to the next pixel when
excessive light is received. This phenomenon does not occur
with CMOS, so there are no effects from light fluctuations
from different materials or excessive light reception.
Note: ZS-HLDS2T not applicable.
2D CMOS Laser Image
Sensing Element
The three basics of sensing -
precision, speed, and sensitivity
- can be balanced because
ideal measurement settings can
be made for light reception
area.
Digital Sensing
Totally reliable measurements
with completely digital sensing.
Extremely Sensitive Lenses
High Resolution at 0.001 µm
(ZS-LD10GT)
OMRON's digital sensing technology
achieves unbelievably high
resolution.
Super-high-speed Sampling at
110 µs
(ZS-HLDS@@/LD@@)
You get exact sensing with superior
workpiece following performance.
CMOS high-speed data reading
accurately catches moving
workpieces inline.
±0.05% FS Linearity
(ZS-HLDS2T)
Unique OMRON algorithms reduce
detection error to improve workpiece
measurement accuracy.
All Models Are Class 2 Lasers.
Very high
resolution
High
precision High
speed
Extreme
stability
ZS-HLDS5T/
HLDS10
ZS-HLDS2T
10
5
0
−5
−10
ZS-HLDS5T
Error (µm)
0.7 µmp-p
Cr
5
0
5
0
0
20
20
40
40
−10
−15
Error (µm)
Previous OMRON models
10 µmp-p
Cr
SUS Glass
0
10
5
0
−5
−10
1000 2000 3000 4000 5000 6000
Measurement value (µm)
Moving resolution when measuring SUS
13.5 µm
0
10
5
0
−5
−10
Travel distance
Travel
distance
(mm)
Travel
distance
(mm)
Travel distance
500 1000 1500 2000 2500 3000
4.5 µm
Measurement value (µm)
Moving resolution when measuring SUS ZS-HLDS5T
Previous OMRON models
ZS-HL Series
Previous OMRON models
ZS-HL Series
Constant
distance
Sampling: 4 ms Sampling: 4 ms
Constant
distance
High-performance Sensors
ZS-HLDS60/HLDS150
Cr
Glass
Glass
Advanced technology is carried
Smart Sensor
08
High-performance Sensors
High grade
High-performance Sensors
Linearity Characteristic Measuring Car Body Widths
(ZS-HLDS10)
Manage trends by measuring
widths of each car model.
Simple Long-distance Step Measurement
Note: This function may not be
applicable in bright surrounds.Peak/bottom measurement
ZS-HLDS5T/HLDS10
Detect Essentially Any Object Reduced Variation in Linearity between Different Objects, and Linearity
Determines Measurement Accuracy.
Makes it easier to introduce a variety of detection objects.
First 1,500 mm long range sensing in the industry enables measurement of previously
impossible points.
No.1 No.2 No.3 No.4 No.5
Sample-A Sample-B Sample-C Sample-D Sample-E
Peak
Bottom
ZS-HLDS60/HLDS150
A Long Range That Handles Essentially Any Installation Site
−0.15
−0.10
−0.05
0.00
0.05
0.10
0.15
40 42 44 46 48
−0.15
−0.10
−0.05
0.00
0.05
0.10
0.15
40.0 42.0 44.0 46.0 48.0
Peak
Bottom
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS150
1500±500 mm
500 µm
±0.2%F.S.
1.5 mm × 40 mm
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS60
600±350 mm
8 µm
±0.07%F.S.
0.3 mm × 16 mm
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS10
100±20 mm
1 µm
±0.1%F.S.
60 µm × 3.5 mm
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS5T
50±5 mm
0.25 µm
±0.1%F.S.
30 µm × 1 mm
Measuring range (mm)
Note: Typical examples
ZS-HLDS5T Regular reflection
Specified range
Specified range
Previous OMRON models Regular reflection
Linearity (% F.S.)
Linearity (% F.S.)
Measuring range (mm)
09
Advanced technology is carried
Smart Sensor
High-performance Sensors
Angle Characteristics
ZS-HLDS2VT
Ideal for Measuring the Height and Thickness
of Transparent Objects
Tilted and moving workpieces can also be stably measured.
Horizontal
direction
Vertical
direction
A special aspherical lens was
developed for the ZS-HLDS2VT,
and the design of the optical
structure was optimized for
regular-reflective workpieces.
This has greatly increased the
allowable degree of tilt and
improved stability for measuring
transparent and regular-
reflective workpieces.
0
2
4
6
1
3
5
Vertical + direction Vertical - direction Horizontal + direction Horizontal - direction
Previous OMRON model ZS-HLDS2VT
Limit angle (˚)
Aspherical lens (newly developed)
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS2VT
25±2 mm
0.6 µm
±0.2%F.S.
45 µm × 2.2 mm
10
ZS-HLDS2T/ZS-LD10GT/LD15GT
The Only Way to Very High-precision Measurements
Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision
Simultaneous Measuring of Touch Panel Film Thickness and Gap
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-HLDS2T
20±1 mm
0.25 µm
±0.05%F.S.
20 µm × 1 mm
Model
Measuring center distance
Resolution
Linearity
Beam shape
ZS-LD10GT/LD15GT
10±0.5 mm/15±0.75 mm
0.25 µm
±0.1%F.S.
25 × 900 µm
An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class.
Inspection of Disk Play on HDD Motor Rotating Plate
Height Control of Sealant Dispensers
400
350
300
250
200
150
100
50
00.80.60.40.201
Gap [µm]
100
95
90
85
80
75
70
65
60 0.80.60.40.20.201
Thickness [µm]
ZS-LD10GT
2
1
0
-1
-2
-3
-4
-5 1 251 501 751 Number
of data
Travel distance (mm)Travel distance (mm)
Displacement [µm]
Simultaneous measurement of transparent object thickness and gap
Measures amplitude undulations of 5 µm.
Slim
26.4 mm
Reduced pattern influence for moving
measurement, the best in the moving
resolution industry.
Possible to match nozzle drip point and
measurement point then measure.
Sensor Head with separate light emission
and reception in one unit to create nozzle
space.
High-performance Sensors
Film Gap
Thickness
Glass
Ideal for Measuring Nozzle Gaps!
Nozzle Gap Sensor
Nozzle
Measurement
point
Emitter Receiver
Sealant supply nozzle
ZS-LD10GT/LD15GT
Sealant application Glass substrate
High-performance Sensors
High grade
11
Technology
With OMRON's sensing technology and newly developed algorithms, stable, high-precision measurement is possible of workpieces that were difficult
to measure using laser displacement meters due to laser light penetration, transmission, excessive reflection, or insufficient light.
Measurement cycle time 1/8 better than
previous models with addition of received light
waveform captured by 2D CMOS and
simultaneous measurement of front and back
glass surfaces with separate sensitivities.
Large
Small
(Near) (Far)
Received light surface
Received light amount
Real peak position on
surface
Incorrect peak
calculation as a
result of laser light
penetration
Received light
waveform
disruption due to
penetration
Then with digital processing...
ZS-HL Series
Received light amount
Detects the measurement
position after adding the
received light lines.
Position
Removed
Received light amount
Detects the measurement position
for each received light line.
Light noise
Previous
products
ZS Series
One line at a time
Adding and averaging
Sensitivity
switching
Measurement error
Previous products
31 levels
Large
Small
Small (Black rubber)
Reflection coefficient
No measurement error
10,000 levels min. (essentially infinite)
Laser power
ZS Series
Mirror (Large)
Light quantity adjustment algorithms have
evolved for stable measurement of a variety of
measurement objects.
Even if the workpiece status changes
suddenly, the sensitivity can compensate at
any level so there is no measurement error
from sensitivity switching.
Stable measurement using laser power algorithms
that can be adjusted to any value.
Real surface displacement detected by
eliminating penetration effects for PCBs,
plastic, and other workpieces penetrated by
laser light.
Stable measurements are achieved by correctly
recognizing the light reception distribution on the
2D CMOS.
High-speed digital communications (LVDS)
used between Sensor and Controller.
Image signal stabilizes because the clock
error between the control signal from the
Controller and the light reception device
disappears. Optimum light quantity
adjustment is possible with laser power
algorithms that can be adjusted to any level,
which facilitates super high resolution.
Digital processing technology between the
Sensor and Controller provides high resolution.
Stable measurement by adding received light
waveform in 2D image and digital zoom
processing.
(Near)
(Far)
80 ns min.
Laser Pulse Control
Digital communications
Light quantity adjustment to any level.
Light quantity
fluctuation error
No error
Error
between
clocks
Previous
products
ZS Series
No clock offset.
Received Light Signal Control
Large
Small
(Near) (Far)
Received light amount
Received light surface
(1)
(2)
(3)
(2)
(1) (3)
High-performance Sensors
Mechanisms for Stable Measurement
No more errors due to reflection
coefficients between glass gaps
Patent Pending
Mechanisms for Stable Measurement
No more errors due to workpiece
reflection coefficients.
Patent Pending
Mechanisms for Stable MeasurementMechanisms for High Resolution
Patent Pending
No more error due to penetration.
No more resolution errors.
Advanced technology is carried
Smart Sensor
12
Outline of Functions
Sensor Controllers ZS-HLDC (Multitasking)
Enables maximum sensing performance with fully digital processing and multitasking functions.
A controller the size of a business card filled with OMRON's leading-edge digital technology.
Enables easy utilization of the ultimate in measurement performance.
ZS-HLDC ZS-LDC
Top Operation Menu
Sensing
Filter
Output
I/O Settings I/O Settings
Sensing
Multitask Mode
Single Task Mode (Standard Mode)
Measurement
point
Filter
Output
High-performance Sensing (Multitasking)
Control Using CompoWay/F*
Control Using No-protocol
Communications
Data Confirmation and
Analysis
• Checks sensing screen.
•
Checks measurement values.
•
Logs measurement values.
Data collection, control,
and changeovers
•
Gets measurement results.
• Resets to zero.
• Switches banks.
RS-232CUSB
Simultaneous Measurement and Output of Up to 4 Features
Simultaneous Control in 2 Systems of Data Confirmation and Analysis and
Data Collection, Control, and Changeovers
Improved Total Cycle Time with 1-second High-speed Bank Switching
Setting example
■Task 1: Average
■Task 2: Thickness
Setting example
■Task 1: Step
Setting example
■Task 1: Average, Average hold
■Task 2: Average, Point-to-point hold
Setting example
■Task 1: Average
Self-down trigger
Average hold
With delay
■Task 2: Average
Average hold
With delay
■Task 3: Calculation (Task 2 - Task 1)
Trigger level
Delay time 2
Delay time 1
Enlarged
High-performance Sensors
* OMRON's unique communications protocol.
TASK2 TASK3 TASK4TASK1 TASK1
When simultaneous
measurement of distance to
glass, glass thickness, gap, etc.,
required in glass measurement
applications
For detection of small
recesses and protrusions in
measurement location
For measurement of steps in
different locations with
moving Sensor or workpiece
For simultaneous measurement
of HDD surface deflection and
distance to HDD surface
High-performance Sensors
High grade
13
ZS-LDC
Single Task Controller
Simple Operation
Reasonable Price
Easy Sensing with an HMI That Couldn't Be Easier to Use (Common Functions)
Information at the Touch of a Button
In RUN (measurement) Mode, measured values and information are displayed using
2 rows of 8-segment LEDs. The large LED display improves visibility. Measurement
information includes the threshold, current, resolution, and received light amount
and is available with simple key operations. LCD screens can be customized to
change the display of desired information to easier-to-understand terminology.
Mount to DIN Track or
directly to control
panels.
Set Sensing Directly
In FUN (setting) Mode, setting menus are displayed on the 2 rows of
the LCD. Easy-to-understand guidance simplifies setting the many
display capabilities of the LCD. Function keys correspond to
displayed menu items for intuitive setting of measurement conditions
and other parameters. You can also easily switch between Japanese
and English displays. Communication with the operator is better than
ever before.
Connect directly to a PC using USB.
USB 2.0 and RS-232C provided as standard features.
LVDS, a new-generation digital high-speed
communications interface, is used between the Sensor
Head and Controller, an industry first. If USB is used to
connect to the computer, high-speed all digital
measurement data transfer is possible.
Firmware can be updated easily using the
SmartMonitor WarpEngine.
FUN (setting mode)
Direct setting with
function keys.
Patent Pending
Patent Pending
USB Connection
Panel Mounting Adapter (Option, Sold Separately)
High-performance Sensors
RUN
(measurement mode)
Measured value displayed.
Threshold, current, resolution,
received light amount, etc.
Switch measurement information
at the touch of a button.
Example of
Display Customization
Threshold Current
Resolution
Received light
amount
MAIN:MEASURE
SUB :THRESH
MAIN:MEASURE
SUB :THRESH
MAIN:MEASURE
SUB :CURRENT
MAIN:MEASURE
SUB :RESOLU
LD POWER 80.0%
SUB:BRIGHT
Device:
OMRON #1
Advanced technology is carried
Smart Sensor
14
∗1. Spot Beam Sensors.
More than
sufficient
range
2D CMOS
image sensor
Laser Class 2
Degree of Protection: IP67
(Models with 2 m cable)
Measurement range: 30 mm
Measurement range: 10 mm
Super Sensitive Lens
Note: The ZS-LD50 uses
high-precision
ganged lenses.
Measurement range: 270 mm
ZS-LD80
Measuring center: 80 mm
ZS-LD130
Measuring center: 130 mm
ZS-LD200
Measuring center: 200 mm
ZS-LD350S ∗1
Measuring center: 350 mm
ZS-LD50
Measuring center: 50 mm
Measurement range: 30 mm
Measurement range: 100 mm
Diffuse Reflection Sensor
Diffuse Reflection Sensors
2D CMOS
image sensing
element
Laser Class 2
Degree of Protection: IP67
(Models with 2 m cable)
High-precision
ganged lenses
ZS-LD40T
Measuring center: 40 mm
Resolution: 0.4 μm
Line beam
(2000 × 35 μm)
ZS-LD20T
Measuring center: 20 mm
Resolution: 0.25 μm
Line beam
(900 × 25 μm)
Regular Reflection
Sensors
Regular reflection
Sensors
Measurement range:
5 mm
Measurement range:
2 mm
ZS-LD20ST
Measuring center: 20 mm
Measurement range: 2 mm Spot beam
(25 μm dia.)
ZS-LD50S
Measuring center: 50 mm
Measurement range:
10 mm Spot beam
(50 μm dia.)
Note: Sensor Head can be installed to for either
diffuse reflection or regular reflection.
(except ZS-LD350S)
Correctly compensates measurement values
to suit different applications.
Smallest size in this class (65 × 65 mm)
Uniform Sensor Head size
Line/spot beam type
Detects black rubber, mirror, and transparent workpieces
ZS-L Series Product Lineup 2D CMOS Low-end Displacement Sensors
Advanced sensing technology packed into the smallest Sensor Heads in this class.
ZS-LD50/LD80/LD130/LD200/LD350S
ZS-LD20T/LD40T ZS-LD20ST/LD50S
Spot Beam Sensors
Standard Sensors
Standard
Standard Sensors
15
Response: 8 ms, High-precision mode,
Black gain: 0, Red gain: 5 (max.)
1.75
Height (mm)
1.73
1.71
1.69
1.67
1.65
Penetration mode and gain settings used.
Gain setting: 5
15.000
10.000
5.000
0.000
−5.000
−10.000
−15.000
Height (mm)
Number of data
0
10
20
30
40
Complete measurement data will be obtained at angles of up to 40°.
Measuring the Shape of Black Resin Workpieces
PCB shapes can be measured without burs or waveform disruptions.
Measuring the Shape PCB Surfaces
Ideal for measuring glass thickness and slit nozzle gaps when coating glass with resist or sealer.
Measuring Glass Surfaces
FUN (setting mode)
Set Sensing Directly
Measurements for Moving Glass
Response for glass 8 ms
0.2 μm
4
[μm]
3
2
1
0
−1
−2
−3
−4
All you need to do is select the proper mode to achieve stable sensing of PCBs, resins, black
rubber, and other light-penetrating workpieces (these could not be easily handled with
previous reflective laser displacement meters.)
Easy Sensing with an HMI That Couldn't Be Easier to Use
Stable Measurements for PCBs, Black Resin, and Metal
Line Beam Sensors for Emphasis
on Stable Measurement
Spot Beam Sensors Ideal for Minute
Workpieces and Shape Measurement
Stably measure height and undulations in transparent, coated, or colored glass on work tables.
Stable detection at 40 mm with a line beam of 2 mm.
A 2-mm line beam reduces the influence of black and white patterns on granite work tables to achieve
stable measurements.
Stable Measurements for Glass
ZS-LD80
ZS-LD50
ZS-LD40T
Ideal for measurements requiring minute
shape repeatability while matching laser
beam position with a minute target
measurement area.
Line beams produce an averaging affect that is
less likely to be affected by surface irregularities,
creating stable measurements.
Ideal for stable measurements that do not rely on
the surface of the target workpiece.
Beam width Beam diameter
Travel
Amount of
displacement Amount of
displacement
Beam diameter
25 μm 35 μm 60 μm 60 μm 70 μm 100 μm
Beam width 0.9 mm 2 mm 0.9 mm 0.9 mm 0.6 mm 0.9 mm
Line Beam
sensors ZS-
LD20T ZS-
LD40T ZS-
LD50 ZS-
LD80 ZS-
LD130 ZS-
LD200
Spot Beam sensors
ZS-LD20ST ZS-LD50S ZS-LD350S
Beam width 25 μm dia. 50 μm dia. 240 μm dia.
Travel
Travel
distance Travel
distance
Beam
diameter
Standard Sensors
Just select High-precision Mode to stably measure black rubber.
Just select Penetration Mode to stably measure PCBs or black resin.
Direct setting with
function keys.
Advanced technology is carried
Smart Sensor
16
ZS-HL Series
Multi-Controllers Data Storage
Units
Sensor Controllers
SmartMonitor (PC)
ZS-SW@@V3E ZR-MDR10
Mobile Data Recorder
Data logger
ZS-CRT Sensor Communications Unit
PLCs etc.
PLC
PLCs etc.
High-speed Input Boards (PC)
RS-232C
Analog
USB
Parallel I/O
Sensors Controllers Peripheral Devices
System Configuration
ZS-L Series
ZS-HL-series Long-distance Extension Cable
ZS-DSU
Log measurement Values.
ZG-RPD
Sensor Head
ZS-HLDS@
Controller
ZS-HLDC@
High-speed
binary output
of measurement data.
∗
3
Connection Cable
ZS-XC02D
ZS-XEQ
Digital Equalizer ∗4Digital Equalizer
ZS-XEQ ∗4
Flexible Long-distance Extension Cable
ZS-XC15CR/XC25CR
ZS-HLDC ∗1
ZS-LDC ∗2
ZS-MDC
Calculating measurement
results for each sensor.
∗1: The ZS-HLDC can be connected to a ZS-HL/L-series Sensor Head.
∗2: The ZS-LDC can be connected only to a ZS-L-series Sensor Head.
∗3: The ZG-RPD Expansion I/O Unit can be connected only to a ZS-HL-series Sensor Controller.
∗4: ZS-XEQ Digital Equalizer can be connected to ZS-HL Series only.
25 m max.
Expansion I/O Units
Expansion Units
Enhancing unit
Expansion Units
CompoNet
17
Expansion Units
Multi-calculations of Data
Multipoint measurement
High-speed data transfer
Multi-Controller ZS-MDC
Centralized Controller Information Calculations
High-speed Connections for Up To 9 Controllers
See the difference in applications requiring multipoint measurement, such as thickness, steps, and flatness
measurements. Connect up to 9 Controllers with the fastest high-speed bus in the industry. Digital processing
prevents data dropouts to provide the capability to measure exactly what is seen.
Sampling speed with 3 Controllers connected: 110 μs, Sampling speed with 9 Controllers connected: 380 μs
Note: When using communications commands.
ZS-MDC
Monitor connected Controllers
together
Multipoint measurement
(flatness of resins or metals)
Transfers data between multi-connected Controllers and performs high-speed multiprocessing.
Processing results
SmartMonitorMulti-Controllers
Sensor Head
USB
B D F
Flatness Calculations
A
Calculating the difference between the
maximum and minimum values.
Processing Enabled by the Multi-Controller
Number of Sensor
Controllers: 3 to 9
Calculation:
Task 1 = Max. (A, B, ···) − Min. (A, B, ···)
CB
Reference Step Calculations
A
Calculating the difference between a
reference point (A) and other points.
Number of Sensor
Controllers: 3 to 9
Individual judgments
Calculation:
TASK1 = A − B
TASK2 = A − C
CB
Relative Step Calculations
Calculating the difference between all points.
Multipoint Thickness Calculations
A
Calculating the difference between pairs of points.
C E
Average Height Calculations
A
Calculating the average surface height.
Number of Sensor
Controllers: 2 to 9
Calculation: Task 1 = Average (A, B, C, ···)
CB
Warp Calculations
Calculating warping of selected sides
Number of Sensor
Controllers: 3
Calculation: Task 1 = B − (A + C)/2
Twisting Calculations
Calculating twisting between opposing sides.
Number of Sensor
Controllers: 4
Calculation: TASK1 = (A − B) − (D − C)
···
A
Individual judgments
CB
Number of Sensor
Controllers: 2, 4, 6, or 8
Individual judgments
Calculation:
TASK1 = K + (A − B)
TASK2 = K + (C − D)
TASK3 = K + (E − F)
A
C
B
AD
C
B
User-set Calculations
Formulas can be flexibly set.
[K + mX + nY]
Number of Sensor
Controllers: 3 to 9
Calculation:
TASK1 = A − B
TASK2 = B − C
TASK3 = C − A
Advanced technology is carried
Smart Sensor
Enhancing unit
Expansion Units
18
Expansion Units
Multipoint data collection
Traceability
Changeover Unit
Sensor Controller
(ZS-LDC) Sensor Controller
(ZS-LDC)
Data Storage Unit
(ZS-DSU)
CF Card
Data Storage Unit ZS-DSU
Logging Software for Onsite Installed
Number of
connectable Controllers
Config-
uration
Perform-
ance
Functions
Software (included)
Connectable Controllers
Data resolution
Sampling rate
Trigger functions
Other functions
10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.)
ZS-HLDC@, ZS-LDC@, ZS-MDC@
32 bits
Start and end triggers can be set separately.
External trigger/data trigger (self-trigger)
Time triggers
Data Storage UnitZS-DSU
Efficiently stores sensing data using a variety of logging functions.
High-speed, long term logging settings can be used to precisely process the required sensing
data, which can be reliably and completely collected using USB and an all-digital bus.
Sensor setting data can also be stored.
Data for up to 128 banks can be stored and transferred to the Master Unit for changeovers.
High-speed sampling rate: 150 μs max.
Powerful support for logging data using various trigger functions.
Typical examples
• Connected to ZS-LDC
∗1) For One-shot Mode
Min. sampling interval Longest logging time
1
2
4
9
150 μs
200 μs
350 μs
650 μs
10 min
6.5 min
5.5 min
4.5 min Typical examples
• Example for 64-MB Memory Card
∗2) For Repeat Mode (Logging time depends on capacity of Memory Card.)
1
2
4
9
10 ms
10 ms
10 ms
10 ms
20 h
10 h
5 h
2 h Typical examples
• Connected to ZS-MDC
1
2
4
9
350 μs
400 μs
500 μs
700 μs
20 min
12 min
8 min
5 min
• Shortest high-speed logging mode (One-shot Mode) ∗1
• Long-term logging mode (Repeat Mode) ∗2
• Sampling period: 10 ms to 1 h (at 1-ms intervals)
• CSV file generation Software
• Excel macros for simple analysis
(Equivalent to software provided with SmartMonitor Professional.)
• External bank function
• Alarm output function
• Saved data format customization function
• Time function (timestamps)
Number of
channels Min. sampling interval Longest logging time
Number of
channels Min. sampling interval Longest logging time
Number of
channels
Advanced technology is carried
Smart Sensor
19
Expansion Units
Meets a wide range of logging needs.
High-speed simultaneous multichannel waveform graphs.
Excel macro provided for simple analysis.
More Powerful Setting Support
Setting Software for ZS Series SmartMonitor
V3 Professional ZS-SW11V3E
Use a Computer for Everything from Ideal ZS Settings to Powerful Support of Data Collection and Analysis.
Easy Settings Using USB.
Log measurement results at various times to leave judgment
and inspection results.
The fastest sampling interval is 500 μs (see note).
Note: Data may be skipped, depending on the computer system.
Use a computer that meets the recommended system requirements.
High-speed display: 2-ms interval at max. speed (see note);
Simultaneous multichannel waveform display: Up to 9
waveforms can be displayed.
Note: Data may be skipped, depending on the computer system. Use a computer
that meets the recommended system requirements.
Data collected by logging can be processed with an Excel
macro using filters, slope compensation, filter median transitions,
differentiation, integration, and arithmetic functions and then
used for nominal judgments and other determinations.
The CMOS light reception image and the received light
waveform can be displayed. The real power of the
SmartMonitor is seen when measuring transparent objects and
other workpieces that create multiple received light waveforms.
●Received Light Monitor
●Multi-channel Waveform Display ●Analysis
●Logging
Received light
waveform
(Light Brightness)
Light reception image
Recommended System Requirements
SmartMonitor Professional
OS: Windows 7 (32-bit/64-bit version)
Windows XP (Service Pack3 or higher, 32-bit version)
CPU: Intel Pentium III 1 GHz or faster (2 GHz min. recommended.)
Memory: 1 GB min.
Available hard disk space: 50 MB min.
Display screen: 1,024 × 768 dots min., 16 million colors min.
Note: If the recommended system requirements are not met, data
may be interrupted and waveforms not displayed correctly
when using the logging, high-speed graph drawing, and multi-
channel waveform drawing functions.
SmartAnalyzer Macro Edition
For Microsoft Excel Macro Programming
Microsoft Excel 2000 or later required.
- Window is registered trademarks of Microsoft Corporation in the
USA and other countries.
- Other company names and product names in this document are the
trademarks or registered trademarks or their respective companies.
Specification
Ratings and Specifications
Ordering Information
Smart Sensor
ZS-HL-series Sensor Heads
Data Storage Units
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs
PNP outputs
ZS-DSU11
ZS-DSU41
Multi-Controllers
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs
PNP outputs
ZS-MDC11
ZS-MDC41
ZS-HL-series Sensor Controllers
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs
PNP outputs
ZS-HLDC11
ZS-HLDC41
ZS-L-series Sensor Controllers
Shape Supply voltage Control outputs Model
24 VDC
NPN outputs
PNP outputs
ZS-LDC11
ZS-LDC41
Resolution (see note 1.)
Model
Regular Reflective Models
Diffuse Reflective
Models
Optical system Sensing distance Beam shape Beam diameter
Line beam
Line beam
Line beam
Line beam
Line beam
25±2 mm
50±5 mm
600±350 mm
1500±500 mm
2.2 mm × 45 μm
1.0 mm × 30 μm
1 μm
8 μm
0.6 μm
0.25 μm
500 μm
40 mm × 1.5 mm
16 mm × 0.3 mm
ZS-HLDS150
ZS-HLDS60
ZS-HLDS5T
ZS-HLDS2VT
Line beam20±1 mm 1.0 mm × 20 μm 0.25 μmZS-HLDS2T
100±20 mm 3.5 mm × 60 μmZS-HLDS10
Note 1: Refer to the table of ratings and specifications for details.
2: Specify the cable length when ordering.
Note 1: Refer to the table of ratings and specifications for details.
2: Specify the cable length when ordering.
ZS-HL-series Sensor Heads (For Nozzle Gaps)
Regular Reflective
Models
Optical system Line beam
Line beam
10±0.5 mm
15±0.75 mm
0.25 μm
0.25 μm
900 × 25 μm
900 × 25 μm
ZS-LD15GT
ZS-LD10GT
Resolution (see note 1.)
ModelSensing distance Beam shape Beam diameter
Note 1: No. of samples to average: 128 when set to High-precision Mode.
2: Specify the cable length when ordering.
ZS-L-series Sensor Heads
Diffuse Reflective
Models
Regular Reflective
Models
Line beam
Line beam
Line beam
Line beam
Spot beam
Line beam
Line beam
Spot beam
Spot beam
50±5 mm
80±15 mm
130±15 mm
40±2.5 mm
20±1 mm
350±135 mm
200±50 mm
900 × 60 μm
50 μm dia.
2 μm
3 μm
0.8 μm
0.8 μm
5 μm
20 μm
0.25 μm
0.4 μm
0.25 μm
25 μm dia.
240 μm dia.
900 × 60 μm
900 × 25 μm
2000 × 35 μm
900 × 100 μm
600 × 70 μm
ZS-LD40T
ZS-LD20ST
ZS-LD20T
ZS-LD350S
ZS-LD200
ZS-LD130
ZS-LD80
ZS-LD50S
ZS-LD50
Optical system
Resolution (see note 1.)
ModelSensing distance Beam shape Beam diameter
Ratings and Specifications
20
Advanced technology is carried
Smart Sensor
Accessories (Sold Separately)
Memory Cards
F160-N256S 256 Mbytes
Controller Link Unit
Panel Mount Adapter
RS-232C Cables
Logging Software
Shape Model
Shape
Connected to Model Qty
Model
Name Model
ZS-XCN
ZS-XPM1 For 1st Controller
ZS-XRS2
Personal computer
(2 m)
PLC/PT
(2 m)
1
1ZS-XPT2 ZS-SW11V3ESmartMonitor Professional
Extension Cables for Sensor Heads
1 m ZS-XC1A 1
4 m ZS-XC4A 1
5 m ZS-XC5B (∗1, ∗2) 1
8 m ZS-XC8A 1
10 m ZS-XC10B (∗1) 1
ZS-XPM2 For expansion
(from 2nd Controller on)
∗1. Up to two ZS-XC@B Cables can be connected. (22 m max.)
∗2. A Robot Cable (ZS-XC5BR) is also available.
Model Capacity
ZG-RPD11NPN outputs
PNP outputs ZG-RPD41
Realtime Parallel Output Unit (for ZS-HL Series)
CompoNet-compatible Sensor Communications Unit.
ModelControl outputsShape
Cable length Model Qty
Long Extension Cables for Sensor Heads
(Used with a Digital Equalizer
for ZS-HL Series
)
Digital Equalizer (Relay) ZS-XEQ 1
Extension Cable (long distance, flexible 15 m cable) ZS-XC15CR 1
Extension Cable (long distance, flexible 25 m cable) ZS-XC25CR 1
Digital Equalizer Connection Cable (0.2 m) ZS-XC02D 1
Name Model Qty
ZS-CRT
ModelShape
Ratings and Specifications
21
22
Item Model
ZS-HLDC11/LDC11 ZS-HLDC41/LDC41
No. of samples to average
Number of mounted Sensors
Connection method
USB 2.0
RS-232C
Output
Status indicators
Main digital
Sub-digital
LCD
Setting keys
Slide switch
Power supply voltage
Current consumption
Ambient temperature
Ambient humidity
Degree of protection
Materials
Cable length
Weight
Accessories
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
1 per Sensor Controller
Serial I/O: connector, Other: pre-wired (Standard cable length: 2 m)
1 port, Full Speed (12 Mbps max.), MINI-B
1 port, 115,200 bps max.
HIGH/PASS/LOW 3 outputs HIGH/PASS/LOW: 3 outputs
NPN open collector, 30 VDC, 50 mA max., residual voltage 1.2 V max. PNP open collector, 50 mA max., residual voltage 1.2 V max.
Selectable from 2 types of output, voltage or current (selected by slide switch on bottom).
• V oltage output: −10 to 10 V, output impedance: 40 Ω
• Current output: 4 to 20 mA, maximum load resistance: 300 Ω
ON: Short-circuited with 0 V terminal or 1.5 V or less ON: Short-circuited to supply voltage or within 1.5 V of supply voltage.
OFF: Open (leakage current: 0.1 mA max.) OFF: Open (leakage current: 0.1 mA max.)
HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and ENABLE (green)
8-segment red LED, 6 digits
8-segment green LEDs, 6 digits
16 digits x 2 rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
21.6 V to 26.4 VDC (including ripple)
0.5 A max. (when Sensor Head is connected)
Operating: 0 to 50°C, Storage: −15 to +60°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
IP20 (IEC60529)
Case: Polycarbonate (PC)
2 m
Approx. 280 g (excluding packing materials and accessories)
Ferrite core (1), instruction sheet
Inputs
External interface
Serial I/O
Judgment
output
Linear
output
Laser OFF, ZERO reset timing,
RESET
Segment display
Setting inputs
Functions
Ratings and Specifications
ZS-HL/L-series Sensor Controllers
∗1. Can be used with ZS-HLDC@1 when Multitask Mode selected.
∗2. Terminal block output is a function of the ZS-HLDC@1.
Ratings and Specifications
Display: Measured value, threshold value, voltage/current, received light amount, and resolution/terminal block output ∗2
Sensing: Mode, gain, measurement object, head installation
Measurement point ∗1: Average, peak, bottom, thickness, step, and calculations
Filter: Smooth, average, and differentiation
Outputs: Scaling, various hold values, and zero reset
I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank (switching and clear) ∗2
System: Save, initialization, measurement information display, communications settings, key lock, language, and data load
Task: ZS-HLDC@1: Single task or multitask (up to 4)
ZS-LDC@1: Single task
23
Advanced technology is carried
Smart Sensor
Ratings and Specifications
ZS-HL-series Sensor Heads
Item Model
ZS-HLDS2T ZS-HLDS2VT ZS-HLDS5T ZS-HLDS10 ZS-HLDS60 ZS-HLDS150
Applicable Controllers
Optical system
Measuring center distance
Measuring range
Light source
Beam shape
Beam diameter ∗1
Linearity ∗2
Resolution ∗3
Temperature characteristic ∗4
Sampling cycle
NEAR indicator
LED Indicators
FAR indicator
Operating ambient illumination
Ambient temperature
Ambient humidity
Degree of protection
Materials
Cable length
Weight
Accessories
∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line.
Linearity may change according to the workpiece.
The following options are available.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode
when the number of samples to average is set to within the graph.
The maximum resolution at 250 mm is also shown for the ZS-HLDS60. The following options are available.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. (typical example)
∗5. Ask your OMRON representative about Sensor Heads with IP67 protection.
Ratings and Specifications
Model Diffuse reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS2VT --- Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic ---
Model Diffuse reflection Mirror reflection
ZS-HLDS2T SUS block Glass
ZS-HLDS2VT --- Glass
ZS-HLDS5T White alumina ceramic Glass
ZS-HLDS10 White alumina ceramic
ZS-HLDS60/HLDS150 White alumina ceramic ---
8 μm (No. of samples to average: 64 at 250 mm),
40 μm (No. of samples to average: 64 at 600 mm)
Illumination on received light surface:
1000 lx or less (incandescent light) Illumination on received light surface:
500 lx or less (incandescent light)
0.25 μm (No. of samples to average: 256)
ZS-HLDC series
Regular reflection
20 mm
±1 mm
Regular reflection
25 mm
±2 mm
Diffuse reflection
5.2 mm
±1 mm
Diffuse reflection
50 mm
±5 mm
Regular reflection
44 mm
±4 mm
Diffuse reflection
100 mm
±20 mm
Regular reflection
94 mm
±16 mm
Diffuse reflection
600 mm
±350 mm
Diffuse reflection
1500 mm
±500 mm
Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2) Visible semiconductor laser (wavelength: 658 nm, 1 mW max., JIS Class 2)
Line beam
1.0 mm × 20 μm 2.2 mm × 45 μm 1.0 mm × 30 μm 3.5 mm × 60 μm 16 × 0.3 mm (at 500 mm) 40 × 1.5 mm (at 1,500 mm)
0.25 μm
(No. of samples to average: 512)
0.6 μm
(No. of samples to average: 128)
1 μm (No. of samples to average: 64) 500 μm (No. of samples to average: 64)
±0.05%F.S. ±0.2%F.S. ±0.1%F.S.
±0.07%F.S. (250 to 750 mm), ±0.1%F.S. (750 to 950 mm)
±0.2%F.S.
0.01%F.S./°C0.1%F.S./°C0.01%F.S./°C
110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 μs (High-precision Mode), 4.4 μs (High-sensitivity Mode)
Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Illumination on received light surface: 3000 lx or less (incandescent light)
Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
IP64 IP67 IP66
∗5
Approx. 350 g
0.5 m, 2 m 0.5 m, 2 m2 m
Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m: IP66, cable length 2 m: IP67
Laser labels (1 each for JIS/EN), ferrite cores (2), insure locks (2), instruction sheet
Approx. 600 g Approx. 800 g
24
Ratings and Specifications
ZS-L-series Sensor Heads
Item Model
ZS-LD20T ZS-LD20ST ZS-LD40T ZS-LD10GT ZS-LD15GT
Applicable Controllers ZS-HLDC/LDC Series
Optical system Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection
Measuring center distance 20 mm 6.3 mm 20 mm 6.3 mm 40 mm 30 mm 10 mm 15 mm
Measuring range ±1 mm ±1 mm ±1 mm ±1 mm ±2.5 mm ±2 mm ±0.5 mm ±0.75 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam
Beam diameter ∗1 900 × 25 μm 25 μm dia. 2000 × 35 μm Approx. 25 × 900 μm
Linearity ∗2 ±0.1% FS
Resolution ∗3 0.25 μm 0.25 μm 0.4 μm 0.25 μm 0.25 μm
Temperature characteristic ∗4 0.04% FS/°C 0.04% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
NEAR indicator Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
LED Indicators Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67 IP40
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350 g Approx. 400 g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet Laser safety labels (1 each for JIS/EN), ferrite cores (2), insure locks (2)
∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the regular reflection mode. Linearity may change according to the workpiece.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
The standard workpiece is white aluminum ceramics and glass in the regular reflection mode.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.(typical example)
Ratings and Specifications
25
Advanced technology is carried
Smart Sensor
Ratings and Specifications
Item Model
ZS-LD50 ZS-LD50S ZS-LD80 ZS-LD130 ZS-LD200 ZS-LD350S
Applicable Controllers ZS-HLDC/LDC Series
Optical system Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection
Measuring center distance 50 mm 47 mm 50 mm 47 mm 80 mm 78 mm 130 mm 130 mm 200 mm 200 mm 350 mm
Measuring range ±5 mm ±4 mm ±5 mm ±4 mm ±15 mm ±14 mm ±15 mm ±12 mm ±50 mm ±48 mm ±135 mm
Light source Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape Line beam Spot beam Line beam Line beam Line beam Spot beam
Beam diameter ∗1 900 × 60 μm 50 μm dia. 900 × 60 μm 600 × 70 μm 900 × 100 μm 240 μm dia.
Linearity ∗2 ±0.1% FS ±0.1% FS ±0.25% FS ±0.1% FS ±0.25% FS ±0.1% FS
Resolution ∗3 0.8 μm 0.8 μm 2 μm 3 μm 5 μm 20 μm
Temperature characteristic ∗4 0.02% FS/°C 0.02% FS/°C 0.01% FS/°C 0.02% FS/°C 0.02% FS/°C 0.04% FS/°C
Sampling cycle ∗5 110 μs (High-speed Mode), 500 μs (Standard Mode), 2.2 ms (High-precision Mode), 4.4 ms (High-sensitivity Mode)
NEAR indicator Lights near the measuring center distance, and closer than the measuring center distance inside the measuring range.
LED Indicators Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
FAR indicator Lights near the measuring center distance, and farther than the measuring center distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination Illumination on received light surface: 3000 lx or less (incandescent light) Illumination on received light surface: 3000 lx or less (incandescent light)
Ambient temperature Operating: 0 to 50°C, Storage: −15 to 60°C (with no icing or condensation)
Ambient humidity Operating and storage: 35% to 85% (with no condensation)
Degree of protection Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials Case: Aluminum die-cast, Front cover: Glass
Cable length 0.5 m, 2 m
Weight Approx. 350g
Accessories Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure locks (2), instruction sheet
ZS-L-series Sensor Heads
∗1. Defined as 1/e2 (13.5%) of the center optical intensity at the actual measuring center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.
∗2. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode. Linearity may change according to the workpiece.
∗3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode.
The standard workpiece is white aluminum ceramics and glass in the ZS-LD50/LD50S regular reflection mode.
∗4. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.
∗5. This value is obtained when the measuring mode is set to the high-speed mode.(typical example)
Illumination on received light surface:
2000 lx or less (incandescent light)
Ratings and Specifications
26
Ratings and Specifications
ZS-MDC@1 Multi-Controllers Controller Link Units
ZS-DSU@1 Data Storage Unit
Item ZS-DSU11 ZS-DSU41
Number of mounted Sensor Heads
Number of connectable Controllers
Connectable Controllers
Connection method
USB 2.0
External interface RS-232C
Output
Inputs
Data resolution
Logging trigger functions
Other functions
Status indicators
Segment display
LCD
Setting keys
Slide switch
Power supply voltage
Current consumption
Ambient temperature
Ambient humidity
Materials
Weight
Accessories
Serial I/O
32 bits
Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers
External banks, alarm outputs, saved data format customization, and clock
OUT (orange), PWR (green), ACCESS (orange), and ERR (red)
8-segment green LEDs, 6 digits
16 digits x 2 rows, Color of characters: green, Resolution per character: 5 × 8 pixel matrix
Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
21.6 V to 26.4 VDC (including ripple)
0.5 A max.
Operating: 0 to 50°C, Storage: 0 to 60°C (with no icing or condensation)
Operating and storage: 35% to 85% (with no condensation)
Case: Polycarbonate (PC)
Approx. 280 g (excluding packing materials and accessories)
Ferrite core (1), instruction sheet for Data Storage Unit: CSV File Converter for Data Storage Unit/Smart Analyzer Macro Edition
Functions
Setting inputs
Cannot be connected
10 max. (ZS-MDC: 1, ZS-HLDC/LDC: 9 max.) ∗1
ZS-HLDC@@, ZS-LDC@@, ZS-MDC@@
Serial I/O: connector, Other: pre-wired (standard cable length: 2 m)
1 port, Full Speed (12 Mbps max.), MINI-B
1 port, 115,200 bps max.
3 outputs: HIGH, PASS, and LOW; PNP open-collector, 50 mA max., residual voltage: 1.2 V max.
ON: Short-circuited to supply voltage or within 1.5 V of supply voltage; OFF: Open (leakage current: 0.1 mA max.)
3 outputs: HIGH, PASS, and LOW; NPN open-collector, 30 VDC, 50 mA max., residual voltage: 1.2 V max.
ON: Short-circuited with 0 V terminal or 1.5 V or less; OFF: Open (leakage current: 0.1 mA max.)
Basic specifications are the same as those for the ZS-LDC@1 Sensor Controllers. The following points, however, are different.
1. Sensor Heads cannot be connected.
2. Control Link Units are required to connect up to 9 Controllers.
Control Link Units are required to connect Controllers.
3. Processing functions between Controllers: Arithmetic functions
Connection Using the ZS-XCN Controller Link Units
Multi-ControllerData Storage Unit Sensor Controllers
∗1. Control Link Units are required to connect Controllers.
Ratings and Specifications
Model
27
Advanced technology is carried
Smart Sensor
Ratings and Specifications
Dimensions
Sensor Controllers
ZS-HLDC@1/LDC@1Multi-Controllers
ZS-MDC@1Data Storage Units
ZS-DSU@1
23.20
4.30
52.50
11.7 dia.
24.20
13 10
32.90
18
4.61
10.80
3.90
90
60
11.7 dia.
24.20
13 10
32.90
18
4.30
52.50
3.90
90
60
10.80
4.84.7
10.80
5.2
11
4.30
52.50
59.85
90
60
3.90
11.7 dia.
24.20
13 10
32.90
18
Heat-resistive vinyl chloride, 5.2 mm dia.
Standard length: 2 m
Heat-resistive vinyl chloride, 5.2 mm dia.
Standard length: 2 m
Heat-resistive vinyl chloride, 5.2 mm dia.
Standard length: 2 m
28
Dimensions
Sensor Heads
ZS-HLDS2T Sensor Heads
ZS-HLDS5T/HLDS10
Sensor Heads
ZS-HLDS60/HLDS150
Mounting hole dimensions
Reference surface
Vinyl insulated round cable, 6.8 mm dia.
Standard length: 0.5 m and 2 m
Emission axis
Reception
axis
Measuring
center
Three, 4.5 mm dia.
mounting holes
Operation indicators
Optical
axis
Reference surface
Emitter
L (See note.)
A° (See note.)
Note: L = 50 and A = 30° for the ZS-HLDS5T.
L = 100 and A = 25° for the ZS-HLDS10.
80
72
70
45.1
16.9
9.5
4
Receiver
Three, M4
22.7 70±0.1
69±0.1
9.5±0.1
13 dia.
8
92.1
46
25
2569100
82(5)
(15)
9.5
18
36
16.4
30.1
42
26.4
12
206.5
4
57
32
20
25°
4
65
25°
18.1
56.5
20
4
6520
57±0.1
Mounting hole dimensions
Two, M4
Reference
surface
Receiver
Emitter
Operation indicators
Emission axis
Reception
axis
Reference surface
Measuring
center
30.1
42
Vinyl insulated round cable, 6.8 mm dia.
Standard length: 0.5 m and 2 m
Two, 4.5 mm dia.
mounting holes
(Unit: mm)
Operation indicators
Optical axis
Reference surface
Emitter
Receiver
Reference
surface
Reception axis
Emission axis
Measuring
center
Mounting hole dimensions
Vinyl insulated round cable, 6.8 mm dia.
Standard length: 0.5 m and 2 m
22.7
L (See note.)
A° (See note.)
75
65
28 47 8
65±0.1
45±0.1
Three, M4
5
13 dia.
115.06
16.4
46
19
45
120
102
(5)
88.75 9.5
25 38
57 2
Note: L = 600 and A = 7° for the ZS-HLDS60.
L = 1500 and A = 3° for the ZS-HLDS150.
30.1
42
(Unit: mm)
(Unit: mm)
Ratings and Specifications
29
Advanced technology is carried
Smart Sensor
Dimensions
29±0.1
20±0.1
30±0.1
Four, M 4.50
40
820
30
Four, 4.5 mm dia. mounting holes
Four, 8 mm dia. countersunk, depth: 4
Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
Connector
42
8.5
115
48
40
30
25
20
12 45
35
84
74
55
44
24
16.5
11.5
15
29
44
24
11.5 16.5
5
Two, C14
Measuring
center
Emission axis Reception
axis
90°
45
Mounting hole dimensions Receiver
Emitter
36±0.3
Three, 4.5 mm dia. mounting holes
26±0.3
46±0.1
Three, M4
76±0.1
40±0.25
26±0.1
96±0.1
105±0.3
Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m 30
30
8.5
30
42
Connector
15
85±0.3
55±0.3
Reception axis
Measuring
center
Emission axis
Reference
surface
12.50
12.50
17.50
17.50
45
56
25
25
1010
90°
ReceiverMounting hole dimensions Emitter
4
16
Ratings and Specifications
(Unit: mm)(Unit: mm) ZS-LD15GT
Sensor Heads
ZS-LD10GT
42
8.5
65
8
56
8
564.5
56±0.1
56±0.1
Two, M4
45
Reference
surface
Two, 4.5 mm dia. mounting holes
Connector Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
35
15.30
30.1
L (See note.)
Mounting hole dimensions
Receiver
A° (See note.)
Reception
axis
Emission
axis
Emitter
Measur-
ing
center
4
27.1
Range
indicator
30
8
4.5
8
65 (Unit: mm)(Unit: mm) ZS-HLDS2VT/LD20T/LD20ST/LD40T
Note: L = 50 and A = 30° for the ZS-LD50/50S.
L = 80 and A = 15° for the ZS-LD80.
L = 130 and A = 12° for the ZS-LD130.
L = 200 and A = 8° for the ZS-LD200.
L = 350 and A = 5° for the ZS-LD350S.
Note: L = 25 and A = 34.5° for the ZS-HLDS2VT.
L = 20 and A = 45° for the ZS-LD20T/20ST.
L = 40 and A = 32° for the ZS-LD40T.
42
8.5
11
65
65
8 8
56 4.5
8
8
564.5
45
Reference
surface
Two, 4.5 mm dia. mounting holes
Connector Vinyl insulated round cable, 6.2 mm dia.
Standard length: 0.5 m and 2 m
35
15.3
30.1
L (See note.)
Receiver
A (See note.)
Reception
axis
Emission
axis
Emitter
Measur-
ing
center
4
27.1
Range
indicator
Sensor Heads
ZS-LD50/LD50S/LD80/LD130/LD200/LD350S
56±0.1
56±0.1
Two, M4
Mounting hole dimensions
Reference
surface
30
Dimensions
(Unit: mm)
(60 × n) + 8
116±1
n: Number of gang-mounted Controllers (1 to 11)
Panel cutout dimensions
Panel Mount Adapter
ZS-XPM1/XPM2 (Dimensions for Panel Mounting)
Realtime Parallel Output Unit
ZG-RPD@1
122
90
Panel
Panel Mount Adapter
Panel
Note: Dimensions are shown for a panel thickness of 2.0 mm.
(60 × n) + 12
60 × n
(37.5)
(140)
DIN Track
133
(2)
(See note.)
Digital Equalizer
ZS-XEQ
33
Two, M4
37
3
21
70
33
10.50 dia.
16.50
11.50
Mounting bracket
25.5
15° +1°
0
15° +1°
0
3
4.5
54
43 5.5
4.5
43
37
22
Three, R2.25
4.5
4.5
5.5
90°±1°
22
37
(Unit: mm)
15° +1°
0
15° +1°
0
Ratings and Specifications
(14.15) (2.85)
13 70
(
150
)
35.20
30
11.5
6
55
32.90
10
29.60 28.40
7
21
Two mounting holes
15.65
66.50
15.85
9
8
10.25
30
80
89
98
9
(Unit: mm)
31
Advanced technology is carried
Smart Sensor
Ratings and Specifications
READ AND UNDERSTAND THIS DOCUMENT
Please read and understand this document before using the products. Please consult your OMRON representative if you have
any questions or comments.
WARRANTY
OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year
(or other period if specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT,
MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER
ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY
MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR
IMPLIED.
LIMITATIONS OF LIABILITY
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS
OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON
CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.
In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE
PRODUCTS UNLESS OMRON's ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED,
INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE
MODIFICATION OR REPAIR.
SUITABILITY FOR USE
THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED
FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR
PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated products.
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of
products in the customer's application or use of the product.
At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of
use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the
products in combination with the end product, machine, system, or other application or use.
The following are some examples of applications for which particular attention must be given. This is not intended to be an
exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the
products:
• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in
this document.
• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement
machines, vehicles, safety equipment, and installations subject to separate industry or government regulations.
• Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT
ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON
PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR
SYSTEM.
PERFORMANCE DATA
Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a
warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application
requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other reasons.
It is our practice to change model numbers when published ratings or features are changed, or when significant construction
changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special
model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with
your OMRON representative at any time to confirm actual specifications of purchased products.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is
assumed for clerical, typographical, or proofreading errors, or omissions.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof.
COPYRIGHT AND COPY PERMISSION
This document shall not be copied for sales or promotions without permission.
This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us before
copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this document to another,
please copy or transmit it in its entirety.
Safety Precautions for Using Laser Equipment
Do not expose your eyes to the laser radiation
either directly or indirectly (i.e., after reflection
from a mirror or shiny surface).
The laser radiation has a high power density
and exposure may result in loss of sight.
Attach the following warning
label to the side of the ZS series
Sensor Head.
Laser Label Indications
WARNING
Authorized Distributor:
In the interest of product improvement,
specifications are subject to change without notice.
Printed in Japan
© OMRON Corporation 2009 All Rights Reserved.
OMRON Corporation Industrial Automation Company
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
Contact: www.ia.omron.com
Tokyo, JAPAN
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No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandr a Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
This document provides information mainly for selecting suitable models. Please read the manual carefully for information that the user must
understand and accept before purchase, including information on warranty, limitations of liability, and precautions.
Cat. No. E375-E1-02
CSM_1_7_1012
